Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Gas sensing characteristics of Co3O4 thick films with metal oxides

금속산화물을 첨가한 Co3O4 후막의 가스 감지특성

  • Jo, Chang-Yong (Devision of EE, Gyeongsang National University) ;
  • Park, Ki-Cheol (Research Institute of Computer and Information Communication, Gyeongsang National University) ;
  • Kim, Jeong-Gyoo (Research Institute of Computer and Information Communication, Gyeongsang National University)
  • 조창용 (경상대학교 전기전자공학부) ;
  • 박기철 (경상대학교 컴퓨터정보통신연구소) ;
  • 김정규 (경상대학교 컴퓨터정보통신연구소)
  • Published : 2009.01.31
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Abstract

${Co_3}{O_4}$ and ${Co_3}{O_4}$-based thick films with additives such as ${Co_3}{O_4}-{Fe_2}{O_3}$(5 wt.%), ${Co_3}{O_4}-{SnO_2}$ (5 wt.%), ${Co_3}{O_4}-{WO_3}$(5 wt.%) and ${Co_3}{O_4}$-ZnO(5 wt.%) were fabricated by screen printing method on alumina substrates. Their structural properties were examined by XRD and SEM. The sensitivities to iso-${C_4}H_{10}$, $CH_4$, CO, $NH_3$ and NO gases were investigated with the thick films heat treated at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. From the gas sensing properties of the films, the films showed p-type semiconductor behaviors. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed higher sensitivity to i-${C_4}H_{10}$ and CO gases than other thick-films. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed the sensitivity of 170 % to 3000 ppm iso-${C_4}H_{10}$ gas and 100 % to 100 ppm CO gas at the working temperature of $250^{\circ}C$. The response time to i-${C_4}H_{10}$ and CO gases showed rise time of about 10 seconds and fall time of about $3{\sim}4$ minutes. The selectivity to i-${C_4}H_{10}$ and CO gases was enhanced in the ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film.

Keywords

References

  1. T. Seiyama, A. Kata, K. Fukiishi, and M. Nagatini, 'A new detector for gaseous components using semiconductive thin films', Anal. Chem., vol. 34, pp. 1502-1504, 1962 https://doi.org/10.1021/ac60191a001
  2. 김영해, '가스센서와 그 응용', 기전연구사, pp. 53-62, 1992
  3. T. Seiyama, J. Shiokawa, S. Suzuki, and K. Fueki, Chemical Sensor, Kodensha Scientific, pp. 13-73, 1984
  4. T. Oyabu et al, 'Sensing characteristics of tin oxide gas sonsor', J. Appl. Phys., vol. 53, 7125, 1982 https://doi.org/10.1063/1.331605
  5. T. Minami, H. Sato, H. Nanto, and S. Takata, 'Group impurity doped zinc oxide thin films prepared by RF magnetron sputtering', Jpn J. Appl. Phys., vol. 24, no. 10, pp. L781-L784, Oct. 1985 https://doi.org/10.1143/JJAP.24.L781
  6. M. Akiyama, J. Tamaki, N. Miura, and N. Yamazoe, 'Tungsten oxide-based semiconductor sensor highly to NO and $NO_{2}$', Chemistry letter, pp. 1611-1614, 1991
  7. 정완영, 임준우, 이덕동, 노보루 야마조에, '스핀 코팅에 의한 In2O3 박막의 가스감지특성', 센서학회지, 제7권, 제2호, pp. 117-123, 1998
  8. 정진화, 최순돈, '저온동작용 $Co_{3}O_{4}$ 부탄가스 감소소자(I)', 센서학회지, 제5권, 제6호, pp. 7-14, 1996
  9. S.-D. Choi and B,-K. Min, '$Co_{3}O_{4}$-based isobutane sensor operating at low temperatures', Sensors and Actuators B, vol. 77, pp. 330-333, 2000 https://doi.org/10.1016/S0925-4005(01)00720-1
  10. H. Yamaura, K. Moriya, N. Miura, and N. Yamazoe, 'Mechanism of sensitivity promotion in CO sensor using indium oxide and cobalt oxide', Sensor and Actuators B, vol. 65, pp. 39-41, 2000 https://doi.org/10.1016/S0925-4005(99)00456-6
  11. U.-S. Choi, G. Sakai, K. Shimanoe, and N. Yamazoe, 'Sensing properties of Au-loaded $SnO_{2}-Co_{3}O_{4}$ composites to CO and $H_{2}$', Sensor and Actuators B, vol. 96, pp. 596-601, 2003 https://doi.org/10.1016/S0925-4005(03)00646-4
  12. J. Wollenstein, M. Burgmair, and G. Plescher, 'Cobalt oxide based gas sensors on silicon substrate for operation at low temperatures', Sensors And Actuators B, 107, pp. 397-401, 2005 https://doi.org/10.1016/j.snb.2004.10.033
  13. Shriram B. Patil, P.P. Patil, and Mahendra A. More, 'Acetone vapour sensing characteristics of cobaltdoped $SnO_{2}$ thin films', Sensors And Actuators B, vol. 125, pp. 126-130, 2007 https://doi.org/10.1016/j.snb.2007.01.047
  14. P. T. Moseley, 'Thick film semiconductor gas sensor', Thick Film Sensors, M. Prudenziati(ed.), Elsevier, Amsterdam, p. 289, 1994
  15. 조철형, 박기철, 마대영, 김정규, '$Cr_{2}O_{3}$ 후막의 암모니아 가스 감지 특성', 센서학회지, 제13권, 제6호, pp. 424-429, 2004 https://doi.org/10.5369/JSST.2004.13.6.424
  16. 양종인, 김일진, 임한조, 한상도, 정관수, 'N-형 $WO_{3}$계 가스센서의 전기적 특성', 센서학회지, 제7권, 제3호, pp. 188-196, 1998
  17. 김준곤, 안병렬, 마대영, 박기철, 김정규, '$Al_{2}O_{3}$를 첨가한 $LaFeO_{3}$ 후막의 암모니아 가스감지특성', 센서학회지, 제11권, 제1호, pp. 18-27, 2002

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