• 제목/요약/키워드: $A_2/O$ Process

검색결과 6,102건 처리시간 0.039초

Crude N2O로부터 정제된 N2O 분리공정에 관한 연구 (A Study on the N2O Separation Process from Crude N2O)

  • 조정호;이택홍;박종기
    • Korean Chemical Engineering Research
    • /
    • 제43권4호
    • /
    • pp.467-473
    • /
    • 2005
  • 액상의 아산화질소($N_2O$) 혼합물은 주요 불순물로써 공기, 일산화탄소, 수분, 이산화탄소와 NOx 성분을 포함하고 있다. 저온에서 고체화하여 고 순도의 $N_2O$를 얻어내는 것은 위험하다고 알려져 있다. 본 연구에서는 연속식 증류공정에 기초하여 고 순도의 $N_2O$ 제품을 얻어내는 새로운 방법을 소개하였다. 99.999% 이상의 고 순도의 $N_2O$ 제품을 얻어낼 수 있는 연속식 증류공정을 모델화하기 위하여 intalox wire guaze 타입의 SCH-80S의 충진탑을 사용하였다. Peng-Robinson 상태방정식을 사용하여 연속식 증류탑과 냉동 사이클을 모사하였다. 본 연구에서 수행한 전산모사 결과는 상용성 화학공정모사기인 Aspen Plus로 모사한 결과와 매우 잘 일치함을 알 수 있었다.

The Study on the Uniformity, Deposition Rate of PECVD SiO2 Deposition

  • Eun Hyeong Kim;Yoon Hee Choi;Hyeon Ji Jeon;Woo Hyeok Jang;Garam Kim
    • 반도체디스플레이기술학회지
    • /
    • 제23권2호
    • /
    • pp.87-91
    • /
    • 2024
  • SiO2, renowned for its excellent insulating properties, has been used in the semiconductor industry as a valuable dielectric material. High-quality SiO2 films find applications in gate spacers and interlayer insulation gap-fill oxides, among other uses. One of the prevalent methods for depositing these SiO2 films is plasma enhanced chemical vapor deposition (PECVD) favored for its relatively low processing costs and ability to operate at low temperatures. However, compared to the increasingly utilized atomic layer deposition (ALD) method, PECVD exhibits inferior film characteristics such as uniformity. This study aims to produce SiO2 films with uniformity as close as possible to those achieved by ALD through the adjustment of PECVD process parameters. we conducted a total of nine PECVD processes, varying the process time and gas flow rates, which were identified as the most influential factors on the PECVD process. Furthermore, ellipsometry analysis was employed to examine the uniformity variations of each process. The experimental results enabled us to elucidate the relationship between uniformity and deposition rate, as well as the impact of gas flow rate and deposition time on the process outcomes. Additionally, thickness measurements obtained through ellipsometer facilitate the identification of optimal process parameters for PECVD.

  • PDF

RECYCLING PROCESS OF U3O8 POWDER IN MnO-Al2O3 DOPED LARGE GRAIN UO2 PELLETS

  • Oh, Jang Soo;Kim, Dong-Joo;Yang, Jae Ho;Kim, Keon Sik;Rhee, Young Woo;Koo, Yang-Hyun
    • Nuclear Engineering and Technology
    • /
    • 제46권1호
    • /
    • pp.117-124
    • /
    • 2014
  • The effect of various process variables on the powder properties of recycled $U_3O_8$ from MnO-$Al_2O_3$ doped large grain $UO_2$ pellets and the effect of those recycled $U_3O_8$ powders on the sintered density and grain size of MnO-$Al_2O_3$ doped large grain $UO_2$ pellets have been investigated. The evolution of morphology, size, and BET surface area of the recycled $U_3O_8$ powders according to the respective variation of the thermo-mechanical treatment variables of oxidation temperature, powder milling, and sequential cyclic heat treatment of oxidation and then reduction was examined. The correlation between the BET surface area of recycled $U_3O_8$ powder and the sintered pellet properties of MnO-$Al_2O_3$ doped pellets showed that the pellet density and grain size of doped pellets were increased and then saturated by increasing the BET surface area of the recycled $U_3O_8$ powder. The density and grain size of the pellets were maximized when the BET surface area of the recycled $U_3O_8$ powder was in the vicinity of $3m^2/g$. Among the process variables applied in this study, the cyclic heat treatment followed by low temperature oxidation was a potential process combination to obtain the sinter-active $U_3O_8$ powder.

Li2O-Al2O3-SiO2-B2O3 구조의 무기합성매질을 이용한 LiCl-KCl 공융염 내 희토류 핵종(Nd)의 분리 및 고화에 관한 기초연구 (A Basic Study on Capture and Solidification of Rare Earth Nuclide (Nd) in LiCl-KCl Eutectic Salt Using an Inorganic Composite With Li2O-Al2O3-SiO2-B2O3 System)

  • 김나영;은희철;박환서;안도희
    • 방사성폐기물학회지
    • /
    • 제15권1호
    • /
    • pp.83-90
    • /
    • 2017
  • 사용후핵연료 파이로프로세싱에서는 방사성 희토류 염화물($RECl_3$)을 함유한 LiCl-KCl 공융염폐기물이 발생되며, 핫셀시설에서 운영을 목적으로 단순한 형태의 공융염폐기물 처리공정을 개발하는 것이 필요하다. 본 연구에서는, LiCl-KCl 공융염폐기물 내 희토류 핵종 분리/고화공정의 단순화를 목적으로 $Li_2O-Al_2O_3-SiO_2-B_2O_3$계의 무기합성매질을 이용하여 LiCl-KCl 공융염 내 희토류 핵종(Nd)을 분리한 후 분리생성물을 바로 고화하는 시험을 실시하였다. 공융염 내 희토류 염화물($NdCl_3$) 대비 0.67의 무게비에 해당하는 무기합성매질의 양으로도 Nd 핵종을 98wt% 이상 분리할 수 있었고, 이 때 얻은 희토류 핵종 포집생성물은 약 50wt% 수준의 희토류 산화물 함량을 보유하고 있었으며, 이 포집생성물을 화학적 내구성이 우수한 단일상의 균질한 유리고화체로 제조할 수 있었다. 이 결과들은 LiCl-KCl 공융염폐기물 내 희토류 핵종의 분리/고화공정을 단순화하기 위한 방안수립에 활용될 수 있을 것이다.

수학적 모델을 활용한 alternating 형태 공정과 recirculating 형태 공정의 성능 평가 (Performance Evaluation between Alternating Type Process and Recirculating Type Process by using a Mathematical Model)

  • 김효수;김예진;차재환;최수정;민경진;김창원
    • 한국물환경학회지
    • /
    • 제26권1호
    • /
    • pp.160-167
    • /
    • 2010
  • In this research, the performance evaluation between an alternating type process and a recirculating type process was investigated by using mathematical models. The Advanced Phase Isolation Ditch (APID) process and the $A^2/O$ process were selected the target processes of the alternating type and recirculating type, respectively. For more quantitative evaluation, 5 performance indexes which included economy and energy efficiency as well as effluent quality were used, and various disturbance conditions of influent were given to the process models. As simulation results, the APID process which had the specific operation modes to use the organic matter in influent effectively showed higher efficiency of denitrification than the $A^2/O$ process. In the case of effluent TSS, the $A^2/O$ process that the retention time in reactors could be maintained stably was more effective than the APID process. In the cases of various disturbance condition, although it was identified that both two processes had similar effluent quality, the sludge production of the $A^2/O$ process showed lower than that of the APID process while the APID process showed higher energy efficiency.

산업폐수 중의 질소 성분의 제거를 위한 고도처리 공정의 응용 (Application of Advanced Treatment Process for Nitrogen Compounds Removal of Industrial Waste-water)

  • 방성훈;임은태;정귀택;박재희;박석환;김성준;박돈희
    • KSBB Journal
    • /
    • 제23권6호
    • /
    • pp.541-545
    • /
    • 2008
  • This paper was studied to research regarding the removal of contained nitrogen in industrial wastewater which uses the A2O4 advanced water treatment process. The field researches of two companies' wastewater occurred in each wastewater treatment site to apply the A2O4 process system, it was observed them for 20 days. As a result of the A2O4 system advanced wastewater process which applied an altitude control process obtained $10{\sim}76\;mg/L$, and 20 mg/L total nitrogen compound concentration in the two wastewater plants. In conclusion, it applied the A2O4 system in the two companies' wastewater system.

에어로졸 공정을 이용한 오산화바나듐(V2O5)-그래핀 복합체 제조 및 슈퍼커패시터 응용 (Preparation of V2O5-Graphene Composites using Aerosol Process for Supercapacitors Application)

  • 이총민;장희동
    • 한국입자에어로졸학회지
    • /
    • 제16권4호
    • /
    • pp.95-105
    • /
    • 2020
  • Vanadium Pentoxide (V2O5) has been emerged as alternative electrode materials for supercapacitors due to their low cost, natural abundance, and environmental friendliness. Graphene (GR) loaded with V2O5 can exhibit enhanced specific capacitance. In this study, we present three-dimensional (3D) crumpled graphene (CGR) decorated with V2O5. The V2O5-graphene composites were synthesized from a colloidal mixture of graphene oxide (GO) and Ammonium metavanadate (NH4VO3), via aerosol spray drying and post heat treatment process. The average size of composite was ranged from 1.82 to 4.6 ㎛. Morphology of the composite changed from a crumpled paper ball to spherical ball having relatively smooth surface as the content of V2O5 increased in the composites. The electrochemical performance of the V2O5-graphene composites was examined. The V2O5-graphene composite electrode showed the specific capacitance of 312 F/g. In addition, the device possessed acceptable cyclic stability, with 84% after 2000 cycles at 2 A/g. These outstanding properties are expected to make the composites prepared in this study as promising electrode materials for supercapacitor applications.

Sol-gel법으로 제조한 강유전성 Bi3.25La0.75Ti3O12박막의 급속열처리에 따른 전기적 특성에 관한 연구 (A Study on Electrical Properties of Sol-gel Derived Bi3.25La0.75Ti3O12 Thin Films by Rapid Thermal Annealing)

  • 이인재;김병호
    • 한국세라믹학회지
    • /
    • 제40권12호
    • /
    • pp.1189-1196
    • /
    • 2003
  • Sol-gel법으로 강유전성 B $i_{3.25}$L $a_{0.75}$ $Ti_3$ $O_{12}$ (BLT) stock solution을 합성하고 Pt/Ti $O_2$/ $SiO_2$/Si 기판위에 스핀코팅법으로 BLT 박막을 증착하였다. 본 실험에서는 Bi(TMHD)$_3$, La(III)2-Methoxyethoxide, Ti(IV)i-propoxide를 출발물질로 사용하였으며 2-Methoxyethanol을 용매로 사용하였다. 급속열처리(RTA)가 BLT 박막의 결정성장을 촉진시키기 위해 사용되었고, RTA를 실시한 시편과 RTA를 실시하지 않은 시편의 전기적 특성을 비교하였다. RTA를 실시한 후 72$0^{\circ}C$에서 로 열처리 한 BLT 박막의 경우 5V 인가 전압 하에서 2Pr 값은 RTA를 실시하지 않은 경우보다 27% 증가한 20.46$\mu$C/$ extrm{cm}^2$이었다.

Fabrication of $Ti(Al,\;O)-Al_2O_3$ Powder Feedstock for Thermal Spraying and Evaluation of the Composite Coating

  • Cao, Peng;Gabbitas, Brian;Zheng, Ling;Zhang, Deliang
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
    • /
    • pp.49-50
    • /
    • 2006
  • [ $Ti(Al,\;O)-Al_2O_3$ ] composite powders were produced by high energy mechanical milling of a mixture of Al and $TiO_2$ powders followed by a combustion reaction. The powders were subsequently thermally sprayed on H13 steel substrates. Microstructural examination was conducted on the composite powders and thermally sprayed coatings, using X-ray diffractometry (XRD) and scanning electron microscopy (SEM). The performance of the coatings was evaluated in terms of micro-hardness and thermal fatigue. The thermally sprayed coatings performed very well in the preliminary thermal fatigue tests and showed no wetting tendency to molten aluminum.

  • PDF

솔-젤 공정으로 제조된 SiO2-C 복합 전구체를 사용하여 열탄소환원법에 의한 β-SiC 분말 합성에 금속 Si 첨가가 미치는 영향 (Effects of Metallic Silicon on the Synthsis of β-SiC Powders by a Carbothermal Reduction Using SiO2-C Hybrid Precursor Fabricated by a Sol-gel Process)

  • 조영철;염미래;윤성일;조경선;박상환
    • 한국세라믹학회지
    • /
    • 제50권6호
    • /
    • pp.402-409
    • /
    • 2013
  • The objective of this study was to develop a synthesis process for ${\beta}$-SiC powders to reduce the synthesis temperature and to control the particle size and to prevent particle agglomeration of the synthesized ${\beta}$-SiC powders. A phenol resin and TEOS were used as the starting materials for the carbon and Si sources, respectively. $SiO_2$-C hybrid precursors with various C/Si mole ratios were fabricated using a conventional sol-gel process. ${\beta}$-SiC powders were synthesized by a carbothermal reduction process using $SiO_2$-C hybrid precursors with various C/Si mole ratios (1.6 ~ 2.5) fabricated using a sol-gel process. In this study, the effects of excess carbon and the addition of Si powders to the $SiO_2$-C hybrid precursor on the synthesis temperature and particle size of ${\beta}$-SiC were examined. It was found that the addition of metallic Si powders to the $SiO_2$/C hybrid precursor with excess carbon reduced the synthesis temperature of the ${\beta}$-SiC powders to as low as $1300^{\circ}C$. The synthesis temperature for ${\beta}$-SiC appeared to be reduced with an increase of the C/Si mole ratio in the $SiO_2$-C hybrid precursor by a direct carburization reaction between Si and excess carbon.