Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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A Study on Electrical Properties of Sol-gel Derived Bi3.25La0.75Ti3O12 Thin Films by Rapid Thermal Annealing

Sol-gel법으로 제조한 강유전성 Bi3.25La0.75Ti3O12박막의 급속열처리에 따른 전기적 특성에 관한 연구

  • 이인재 (고려대학교 재료공학과) ;
  • 김병호 (고려대학교 재료공학과)
  • Published : 2003.12.01
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Abstract

Ferroelectric B $i_{3.25}$L $a_{0.75}$ $Ti_3$ $O_{12}$ (BLT) solution was synthesized by sol-gel process. BLT thin films were deposited on Pt/Ti $O_2$/ $SiO_2$/Si substrates by spin-coating. In this experiments, Bi(TMHD)$_3$, La(III)2-Methoxyethoxide, and Ti(IV) i-propoxide were used as starting materials, which were dissolved in 2-Methoxyethanol. Rapid Thermal Annealing (RTA) was used to promote crystallization of BLT thin films. The thin films with RTA process were compared with those with non-RTA process on electrical properties. After RTA process, the remanent polarization value (2Pr) of BLT thin films annealed at 72$0^{\circ}C$ was 20.46 $\mu$C/$\textrm{cm}^2$ which was approximately 27% higher than that of non-RTA process at 5 V.

Sol-gel법으로 강유전성 B $i_{3.25}$L $a_{0.75}$ $Ti_3$ $O_{12}$ (BLT) stock solution을 합성하고 Pt/Ti $O_2$/ $SiO_2$/Si 기판위에 스핀코팅법으로 BLT 박막을 증착하였다. 본 실험에서는 Bi(TMHD)$_3$, La(III)2-Methoxyethoxide, Ti(IV)i-propoxide를 출발물질로 사용하였으며 2-Methoxyethanol을 용매로 사용하였다. 급속열처리(RTA)가 BLT 박막의 결정성장을 촉진시키기 위해 사용되었고, RTA를 실시한 시편과 RTA를 실시하지 않은 시편의 전기적 특성을 비교하였다. RTA를 실시한 후 72$0^{\circ}C$에서 로 열처리 한 BLT 박막의 경우 5V 인가 전압 하에서 2Pr 값은 RTA를 실시하지 않은 경우보다 27% 증가한 20.46$\mu$C/$ extrm{cm}^2$이었다.

Keywords

References

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