• 한국결정성장학회지
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• 제30권1호
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• pp.1-6
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• 2020

본 연구에서는 패턴화된 사파이어 기판 위에 HVPE(Hydride Vapor Phase Epitaxy System) 법에 의해 50 nm 두께의 AlN thin film을 증착한 뒤, 에피층 구조가 MO CVD에서 성장되었다. AlN 버퍼층 박막의 표면형상이 SEM, AFM에 의해서, 에피층 구조의 GaN 박막의 결정성은 X-선 rocking curve에 의해 분석되었다. 패턴화된 사파이어 기판 위에 증착된 GaN 박막은, 사파이어 기판 위에 증착된 GaN 박막의 경우보다 XRD 피크 세기가 다소 높은 결과를 나타냈다. AFM 표면 형상에서 사파이어 기판 위에 AlN 박막이 증착된 경우, GaN 에피층 박막의 p-side 쪽의 v-pit 밀도가 상대적으로 낮았으며, 결함밀도가 낮게 관찰되었다. 또한, AlN 버퍼층이 증착된 에피층 구조는 AlN 박막이 없는 에피층의 광출력에 비해 높은 값을 나타냈다.

• 한국자기학회지
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• 제11권4호
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• pp.168-172
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• 2001

Sol-gel법을 이용하여 Co$_{0.9}$Zn$_{0.1}$Fe$_2$O$_4$ 박막을 제조하였다. 성장한 박막의 구조 및 자기적 성질에 관하여 x선 회절분석기 (XRD), atomic force microscopy(AFM) 및 Auger electron spectroscopy(AES), 진동시료자화측정기 (VSM)을 이용하였다. Co-Zn 페라이트 박막의 경우, 400 $^{\circ}C$ 이상의 열처리 온도에서 단일상의 spinel 구조만을 가지고 있으며, 아무런 방향성이 없이 성장함을 나타내고 있다. 열처리 온도가 600 $^{\circ}C$ 이하에서 성장된 박막 표면의 거칠기는 3 nm 이하였으며, 형성된 입자의 크기는 약 40nm이하임을 알 수 있었다. 또한, 40$0^{\circ}C$에서 열처리한 경우 기판에서 Si이 Co-Zn 페라이트 박막내로 확산이 거의 나타나지 않았으나, 870 $^{\circ}C$에서 열처리한 경우 계면에서 기판과 박막의 상호 확산을 확인할 수 있었다. 제작한 박막은 외부 자기장의 방향과는 무관한 등방성의 자기적 특성을 보이며, 최대 보자력은 600 $^{\circ}C$에선 열처리한 자성박막이 약 1,900 Oe을 가짐을 알 수 있었다.있었다.

• Tribology and Lubricants
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• 제11권5호
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• pp.128-135
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• 1995

Atomic force microscopy/friction force microscopy (AFM/FFM) techniques are increasingly used for tribological studies of engineering surfaces at scales, ranging from atomic and molecular to microscales. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation, detection of material transfer, and boundary lubrication and for nanofabrication/nanomachining purposes. Micro/nanotribological studies of single-crystal silicon, natural diamond, magnetic media (magnetic tapes and disks) and magnetic heads have been conducted. Commonly measured roughness parameters are found to be scale dependent, requiring the need of scale-independent fractal parameters to characterize surface roughness. Measurements of atomic-scale friction of a freshly-cleaved highly-oriented pyrolytic graphite exhibited the same periodicity as that of corresponding topography. However, the peaks in friction and those in corresponding topography were displaced relative to each other. Variations in atomic-scale friction and the observed displacement has been explained by the variations in interatomic forces in the normal and lateral directions. Local variation in microscale friction is found to correspond to the local slope suggesting that a ratchet mechanism is responsible for this variation. Directionality in the friction is observed on both micro- and macro scales which results from the surface preparation and anisotropy in surface roughness. Microscale friction is generally found to be smaller than the macrofriction as there is less ploughing contribution in microscale measurements. Microscale friction is load dependent and friction values increase with an increase in the normal load approaching to the macrofriction at contact stresses higher than the hardness of the softer material. Wear rate for single-crystal silicon is approximately constant for various loads and test durations. However, for magnetic disks with a multilayered thin-film structure, the wear of the diamond like carbon overcoat is catastrophic. Breakdown of thin films can be detected with AFM. Evolution of the wear has also been studied using AFM. Wear is found to be initiated at nono scratches. AFM has been modified to obtain load-displacement curves and for nanoindentation hardness measurements with depth of indentation as low as 1 mm. Scratching and indentation on nanoscales are the powerful ways to screen for adhesion and resistance to deformation of ultrathin fdms. Detection of material transfer on a nanoscale is possible with AFM. Boundary lubrication studies and measurement of lubricant-film thichness with a lateral resolution on a nanoscale have been conducted using AFM. Self-assembled monolyers and chemically-bonded lubricant films with a mobile fraction are superior in wear resistance. Finally, AFM has also shown to be useful for nanofabrication/nanomachining. Friction and wear on micro-and nanoscales have been found to be generally smaller compared to that at macroscales. Therefore, micro/nanotribological studies may help def'me the regimes for ultra-low friction and near zero wear.

• Journal of Periodontal and Implant Science
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• 제48권6호
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• pp.373-382
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• 2018

Purpose: The aim of this study was to evaluate the effects of various prophylactic treatments of titanium implants on bacterial biofilm formation, correlating surface modifications with the biofilms produced by Pseudomonas aeruginosa PAO1, Staphylococcus aureus, and bacteria isolated from saliva. Methods: Pure titanium disks were treated with various prophylactic procedures, and atomic force microscopy (AFM) was used to determine the degree to which surface roughness was modified. To evaluate antibiofilm activity, we used P. aeruginosa PAO1, S. aureus, and saliva-isolated Streptococcus spp., Bacteroides fragilis, and Staphylococcus epidermidis. Results: AFM showed that the surface roughness increased after using the air-polishing device and ultrasonic scaler, while a significant reduction was observed after using a curette or polishing with Detartrine ZTM (DZ) abrasive paste. In addition, we only observed a significant (P<0.01) reduction in biofilm formation on the DZ-treated implant surfaces. Conclusion: In this study, both AFM and antibiofilm analyses indicated that using DZ abrasive paste could be considered as the prophylactic procedure of choice for managing peri-implant lesions and for therapy-resistant cases of periodontitis.

• 한국진공학회지
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• 제16권1호
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• pp.52-57
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• 2007

생명현상 발현에 중요한 역할을 하는 생체 분자간 특이적 상호작용을 단분자 수준에서 이해하려는 연구는 매우 중요한 일이다. 나노 바이오 측정기술을 이용하여 여러 복잡한 생명현상을 그 기본 단위인 단일 세포 차원에서 직접 측정하여 응용하려는 시도가 이루어지고 있다. 이런 시도로써, 원자힘 현미경을 이용한 생체분자간의 결합력 측정은 생명현상과 가장 유사한 환경에서 단일 생체 분자간 또는 분자 내 힘을 직접 측정함으로써, 단일 생체분자의 현상을 관찰 할 수 있다는 장점을 가지고 있다. 특히 단분자 힘 분광학을 이용한 단일 생체분자내의 세부 단위체간 상호작용에 대한 연구와 단백질-단백질, 단백질-리간드, DNA-DNA의 분자인지 상호작용에 대한 연구는 많은 생명과학 분야 연구자들의 관심을 끌고 있을 뿐만 아니라 더 나아가 새로운 관련 기술의 개발을 촉진시키고 있다.

• 전기화학회지
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• 제5권3호
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• pp.143-152
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• 2002

Self-assembled monolayer(SAM)로 변형된 금 전극 위로 폴리피롤의 전기화학적 석출 과정을 수용액 상태에서 in-situ EQCM (Electrochemical Quartz Crystal Microbalance)과 ex-situ AFM (Atomic Force Microscopy)을 이용하여 조사하였다. 금 전극에서 cyclic voltammetry로 살펴본 폴리머의 석출은 산화 제한 전위 (anodic limiting potential) 값에 매우 의존적이었으며 주사 횟수에는 의존하지 않았다. 제한 산화 전위가 0.8V (vs Ag | ArCl) 이상일 때 폴리머의 석출은 크게 증가하였다. 그리고 주사 횟수가 증가하면서 질량의 비이상적 변화가 관찰되었는데 이것은 폴리피롤 필름의 rearrangement가 원인이라고 생각된다. 1-dodecanethiol SAM 전극과 thiophene SAM전극에서는 폴리머가 3차원적으로 성장하며 필름의 rearrangement를 수반하였지만 BPUS $(Bis(\omega(N-pyrrolyl)-n-undecyl)disulfide)$ SAM 전극에서는 2차원적인 layer-by-layer 성장을 하고 필름의 rearrangement는 관찰되지 않았다. 폴리머가 급격하게 전극 면으로 석출되면 사슬 모양과 도너츠 모양의 폴리머를 만들며, 정류 상태에 이르면서 주름잡힌 폴리머 필름이 생성되는 것이 원자 힘 현미경 (Atomic Force Microscopy) 이미지로 관찰되었다.

• 한국재료학회지
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• 제10권8호
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• pp.525-531
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• 2000

플라즈마 화학증착법을 이용하여 Corning glass 1737 기판에 안티몬 도핑 산화주석 박막을 증착하였다. 플라즈만 화학증착시 반응변수에 따른 박막의 결정상 및 형성된 표면거칠기에 대하여 XRD와 AFM을 이용하여 검토하였다. 반응온도 $450^{\circ}C$, 유입가스비 R[$P_{SbCl}P_{{SnCl}_4}$]=1.12, r.f. power 30W에서 비교적 결정성이 뛰어난 박막을 얻을 수 있었다. 화학증착법(TCVD)에 비해 플라즈마 열화학증착법(PECVD)으로 얻은 박막의 표현형상이 보다 균일하였다. 안티몬 도핑농도가 증가할수록, 증착온고가 낮을수록, 증착두께가 작을수록 박막의 표면거칠기가 보다 감소하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.135-135
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• 2010

In Mn-Ge equilibrium phase diagram, many Mn-Ge intermetallic phases can be formed with difference structures and magnetic properties. The MnGe has the cubic structure and antiferromagnetic(AFM) with Neel temperature of 197 K. The calculation predicted that the $MnGe_2$ with $Al_2Cu$-type is hard to separate between the paramagnetic(PM) states and the AFM states because this compound displays PM and AFM configuration swith similar energy. Mn-doped Ge showed the FM with Currie temperature of 285 K for bulk samples and 116 K for thin films. In addition, the $Mn_5Ge_3$ compound has hexagonal structure and FM with Curie temperature around 296K. The $Mn_{11}Ge_8$ compound has the orthorhombic structure and Tc is low at 274 K and spin flopping transition is near to 140 K. While the bulk $Mn_3Ge_2$ exhibited tetragonal structure ($a=5.745{\AA}$;$c=13.89{\AA}$) with the FM near to 300K and AFM below 150K. However, amorphous $Mn_3Ge_2$ ($a-Mn_3Ge_2$) was reported to show spin glass behavior with spin-glass transition temperature (Tg) of 53 K. In addition, the transition of crystalline $Mn_3Ge_2$ shifts under high pressure. At the atmospheric pressure, $Mn_3Ge_2$ undergoes the magnetic phase transition from AFM to FM at 158 K. The pressure dependence of the phase transition in $Mn_3Ge_2$ has been determined up to 1 GPa. The transition was found to occur at 1 GPa and 155 K with dT/dP=-0.3K/0.1 GPa. Here report that Ferromagnetic $Mn_3Ge_2$ thin films were successfully grown on GaAs(001) and GaSb(001) substrates using molecular beam epitaxy. Our result revealed that the substrate facilitates to modify magnetic and electrical properties due to tensile/compressive strain effect. The spin-flopping transition around 145 K remained for samples grown on GaSb(001) while it completely disappeared for samples grown on GaAs(001). The antiferromagnetism below 145K changed to ferromagnetism and remained upto 327K. The saturation magnetization was found to be 1.32 and $0.23\;{\mu}B/Mn$ at 5 K for samples grown on GaAs(001) and GaSb(001), respectively.

• Bulletin of the Korean Chemical Society
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• 제18권7호
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• pp.737-740
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• 1997

The influence of cyclic treatments with H2O2/DIW (1 : 10) and HF/DIW (1 : 100) on the roughness of silicon surface in the wet chemical processing was investigated by atomic force microscopy (AFM). During the step of the SC-1 cleaning, there is a large increase in roughness on the silicon surface which will result in the poor gate oxide breakdown properties. The roughness of the silicon wafer after the SC-1 cleaning step was reduced by cyclic treatments of hydrogen peroxide solution and hydrofluoric acid solution instead of HF-only cleaning. AFM images after each step clearly illustrated that the average roughness of silicon surface after three times treatments with H2O2 and HF solutions was reduced by 10 times compared with that after the SC-1 cleaning step.

• 소음진동
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• 제24권1호
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• pp.26-30
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• 2014