Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Development of Uncertainty Evaluation Model for Vacuum Measurement Standards

진공측정표준의 불확도 평가모델 개발

  • Hong, S.S. (Korea Research Institute of Standards and Science) ;
  • Lim, J.Y. (Korea Research Institute of Standards and Science) ;
  • Shin, Y.H. (Korea Research Institute of Standards and Science)
  • 홍승수 (한국표준과학연구원 기반표준본부) ;
  • 임종연 (한국표준과학연구원 기반표준본부) ;
  • 신용현 (한국표준과학연구원 기반표준본부)
  • Received : 2011.06.26
  • Accepted : 2011.08.09
  • Published : 2011.09.30
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Abstract

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM), a static volume expansion system (SVES), and an orifice-type dynamic expansion system (ODES). For each system explict measurement model equations with multiple variables are respectively given. According to ISO standards, all these system variables errors were used to calculate the expanded uncertainty (U).

한국표준과학연구원(Korea Research Institute of Standards and Science, KRISS)에는 초음파간섭 수은주압력계(ultrasonic interferometer manometer, UIM), 정적형표준기(static volume expansion system, SVES), 오리피스형 정압표준기(orifice-type dynamic expansion system, ODES) 등 세 개의 주요한 국가 진공표준기가 있다. 이 장치들의 불확도 평가를 위해 각각 변수들의 측정 및 계산 모델을 개발하였다. 국제표준화기구(International Organization for Standardization, ISO) 지침에 따라 표준기들의 확장불확도(expanded uncertainty, U)를 계산하였다.

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References

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