• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.313-321
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• 2011

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM), a static volume expansion system (SVES), and an orifice-type dynamic expansion system (ODES). For each system explict measurement model equations with multiple variables are respectively given. According to ISO standards, all these system variables errors were used to calculate the expanded uncertainty (U).

• Proceedings of the Korean Vacuum Society Conference
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• 2005.08a
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• pp.175-175
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• 2005

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.347-353
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• 2006

A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.