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http://dx.doi.org/10.5757/JKVS.2011.20.5.313

Development of Uncertainty Evaluation Model for Vacuum Measurement Standards  

Hong, S.S. (Korea Research Institute of Standards and Science)
Lim, J.Y. (Korea Research Institute of Standards and Science)
Shin, Y.H. (Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.20, no.5, 2011 , pp. 313-321 More about this Journal
Abstract
The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM), a static volume expansion system (SVES), and an orifice-type dynamic expansion system (ODES). For each system explict measurement model equations with multiple variables are respectively given. According to ISO standards, all these system variables errors were used to calculate the expanded uncertainty (U).
Keywords
Vacuum measurement standards; Ultrasonic interferometer manometer; Static volume expansion system; Dynamic expansion system; Uncertainty;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 P. L. M. Heydemann, C. R. Tilford, and R. W. Hyland, J. Vac. Sci. Technol. 14, 587 (1977).
2 C. R. Tilford, Applied Optics 16, 1857 (1977).   DOI
3 P. L. M. Heydemann, C. R. Tilford, and R. W. Hyland, J. Vac. Sci. Technol. 14, 599 (1977).
4 S. S. Hong, Y. H. Shin, K. H. Chung, I. T. Lim, S. Y. Woo, and S. C. Choi, J. Korean Vacuum Soc. 10, 173 (2001).
5 Guide to the Expression of Uncertainty in Measurement. ISO 11 (1993).
6 K. Jousten, Vacuum 45, 1205 (1994).   DOI   ScienceOn
7 K. W. T. Elliott and P. B. Clapham, NPL Mon. 28, 1 (1978).
8 S. S. Hong, Y. H. Shin, K. H. Chung, and I. Arakawa, Metrologia 42, 1 (2005).   DOI   ScienceOn
9 D. E. Weaver, J. Vac. Sci. Technol. A4, 338 (1986).
10 J. Y. Lim and K. H. Chung, Vacuum 42, 979 (1991).   DOI
11 K. H. Chung, S. S. Hong, Y. H. Shin, J. Y. Lim, S. K. Lee, and S. Y. Woo, Metrologia 36, 675 (1999).   DOI
12 K. H. Chung and S. S. Hong, IMEKO XIII, Pro XIII IMEKO World Con. Torino 5-9 Sep. 3, 1951 (1994).
13 S. S. Hong, I. T. Lim, Y. H. Shin, K. H. Chung, and I. Arakawa, J. Korean Vacuum Soc. 12, 151 (2003).
14 S. S. Hong, Y. H. Shin, and K. H. Chung, J. Korean Vacuum Soc. 5, 181 (1996).