Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of Micro-flowmeter for Supplying Photo-resist

포토레지스트 공급용 미소유량계 개발

  • 김신호 (금오공과대학교 대학원 생산기계공학과) ;
  • 정선환 (금오공과대학교 기계공학부) ;
  • 최성대 (금오공과대학교 기계공학부)
  • Published : 2007.10.15
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Abstract

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

Keywords

References

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