• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.9
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• pp.613-620
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• 2016

In order to scrutinize the fluid conductivity effects on the electromagnetic flowmeter(EMF) characteristics, a small scale EMF was designed and fabricated. The measuring tube has a $3mm{\times}4mm$ rectangular cross-section, 9 mm length, and a $2mm{\times}3mm$ plate electrode and a ${\Phi}1.5mm$ point electrode. The design parameters, such as the magnetizing frequency and the number of coil turns, and the diameter were optimized. The EMF was tested with a gravimetric calibrator and showed good linearity in the range of 0 to $1.17{\times}10^{-5}m^3/s$. The fluid conductivity was varied between 3 and $11{\mu}S/cm$, and the magnitude of the flow signal was proportional to the fluid conductivity and the wetted area of the electrode. The design information and the test results provide flow measurement techniques for very low flowrate.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3268-3270
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• 1999

This paper presents the fabrication of a micro electromagnetic flowmeter for liquid flow rate measurement. The flowmeter consists of a silicon flow channel with two electrodes and two permanent magnets. The micro flow channel and the detection electrodes are fabricated by the anisotropic etching of two silicon substrates and the metal evaporation process respectively. If conductive fluid passes through a magnet field, electromotive force is generated and detected by two electrodes. When the flow rate is 2.6 ml/sec, the measured output voltage is 7.4 mV.

• Korean Journal of Materials Research
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• v.7 no.7
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• pp.623-631
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• 1997

본 연구에서는 주조 2상 스테인리스강의열시효에 대한 시효온도, 시효시간 및 Nb함유량의 영향을 관찰하기 위해 기계적 성질 및 조직을 조사하였으며 Nb을 함유한 주조 2상 스테인리스강의 파괴기구를 규명하기 위해 SEM에 의한 파단면 관찰과 WDS성분분석을 통해 파괴기구의 특성을 고찰하였다. 시효온도와 시효시간이 증가함에 따라 페라니트으 미소경도가 증가하였으며 항복강도의 경우 시효온도와 시효시간에는 영향을 받지 않았으나 Nb을 함유한 재료들이 Nb을 함유치 않은 재료들에 비해 다소 낮은 항복강도 값을 보였다. 충격흡수에너지 값은 시효시간 및 시효온도의 증가에 따라 시험된 모든 재료에서 저하되었는데 0.4% Nb을 함유하는 경우 Nb을 약간 함유하거나 함유치 않은 재료들에 비해 시효시간에 따라 급격한 감소 경향을 보였다. 파단면 관찰결과 페라이트 기지 또는 페라이트/오스테나이트 상경계에서 석출된 VbC를 비롯한 탄화물들이 취성저항성을 낮추는데 크게 기여했음을 알 수 있었다.