Characterization of YSZ(Yttria-stabilized zirconia) thin film by RF-magnetron sputtering (RF-magnetron sputtering를 이용한 YSZ(Yttria-stabilized zirconia) 박막의 제조 및 특성 평가)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1997.10a
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- pp.116-116
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- 1997