• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.5-6
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.1-2
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.30 no.7
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• pp.702-708
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• 2013

The white-light scanning interferometer (WSI) is an effective optical measurement system for high-precision industries (e.g., flat-panel display and electronics packaging manufacturers) and semiconductor manufacturing industries. Its major disadvantages include a slow image-capturing speed for interferogram acquisition and a high computational cost for peak-detection on the acquired interferogram. Here, a WSI system is proposed for the semiconductor inspection process. The new imaging acquisition technique uses an 'on-the-fly' imaging system. During the vertical scanning motion of the WSI, interference fringe images are sequentially acquired at a series of pre-defined lens positions, without conventional stepwise motions. To reduce the calculation time, a parallel computing method is used to link multiple personal computers (PCs). Experiments were performed to evaluate the proposed high-speed WSI system.

• The Journal of Advanced Prosthodontics
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• v.6 no.6
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• pp.468-473
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• 2014

PURPOSE. This study aimed to evaluate the accuracy of digitizing dental impressions of abutment teeth using a white light scanner and to compare the findings among teeth types. MATERIALS AND METHODS. To assess precision, impressions of the canine, premolar, and molar prepared to receive all-ceramic crowns were repeatedly scanned to obtain five sets of 3-D data (STL files). Point clouds were compared and error sizes were measured (n=10 per type). Next, to evaluate trueness, impressions of teeth were rotated by $10^{\circ}-20^{\circ}$ and scanned. The obtained data were compared with the first set of data for precision assessment, and the error sizes were measured (n=5 per type). The Kruskal-Wallis test was performed to evaluate precision and trueness among three teeth types, and post-hoc comparisons were performed using the Mann-Whitney U test with Bonferroni correction (${\alpha}=.05$). RESULTS. Precision discrepancies for the canine, premolar, and molar were $3.7{\mu}m$, $3.2{\mu}m$, and $7.3{\mu}m$, respectively, indicating the poorest precision for the molar (P<.001). Trueness discrepancies for teeth types were $6.2{\mu}m$, $11.2{\mu}m$, and $21.8{\mu}m$, respectively, indicating the poorest trueness for the molar (P=.007). CONCLUSION. In respect to accuracy the molar showed the largest discrepancies compared with the canine and premolar. Digitizing of dental impressions of abutment teeth using a white light scanner was assessed to be a highly accurate method and provided discrepancy values in a clinically acceptable range. Further study is needed to improve digitizing performance of white light scanning in axial wall.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.531-532
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• 2012

• Journal of the Korean Society for Precision Engineering
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• v.24 no.4 s.193
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• pp.21-28
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.21-27
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• 2005

• Journal of the Korean Institute of Intelligent Systems
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• v.23 no.4
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• pp.286-291
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• 2013

In this paper, in-line type flip chip bump 3D inspection equipment, using white light interferometer with large F.O.V., which is aimed to be used in flip chip bump test process is developed. Results of flip chip bump height measurement in many substrates and repeatability test results for the bumps in fixed location of each substrate are shown. Test results from test bench and those from developed flip chip bump 3D inspection equipment are compared and as a result repeatability is improved by reducing the impact of system vibration. A valuation basis for the testing quality of flip chip bump 3D inspection equipment is proposed.

• Journal of the Optical Society of Korea
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• v.3 no.2
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• pp.35-40
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• 1999

One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 ${\mu}{\textrm}{m}$.

• The korean journal of orthodontics
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• v.44 no.6
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• pp.281-293
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• 2014

Objective: Esthetic improvements during orthodontic treatment are achieved by changes in positions of the lips and surrounding soft tissues. Facial soft-tissue movement has already been two-dimensionally evaluated by cephalometry. In this study, we aimed to three-dimensionally assess positional changes of the adult upper lip according to simulated maxillary anterior tooth movements by white light scanning. Methods: We measured changes in three-dimensional coordinates of labial landmarks in relation to maxillary incisor movements of normal adults simulated with films of varying thickness by using a white light scanner. Results: With increasing protraction, the upper lip moved forward and significantly upward. Labial movement was limited by the surrounding soft tissues. The extent of movement above the vermilion border was slightly less than half that of the teeth, showing strong correlation. Most changes were concentrated in the depression above the upper vermilion border. Labial movement toward the nose was reduced significantly. Conclusions: After adequately controlling several variables and using white light scanning with high reproducibility and accuracy, the coefficient of determination showed moderate values (0.40-0.77) and significant changes could be determined. This method would be useful to predict soft-tissue positional changes according to tooth movements.