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Pole Height Inspection on LCD Glass via High Speed White Light Interferometry  

Ko, Kuk-Won (선문대학교 제어계측 공학과)
Ko, Kyung-Cheol (선문대학교 제어계측 공학과)
Kim, Jong-Hyeong (서울산업대학교 기계설계자동화공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.4, 2007 , pp. 21-28 More about this Journal
Keywords
Autofocuse; 3D measurement; Pole; LCD; WSI (White Light Scanning Interferometry;
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  • Reference
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