• Resources Recycling
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• v.18 no.1
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• pp.58-67
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• 2009

The annual requirement of domestic waste photoresist stripper solution is about 1 trillion won level (50,000 tons) depends entirely on imports for its supplies. Nevertheless, there waste strippers which contain the impurities have been recycled or incinerated to a low level of recycle. These days the recycling technologies of the waste stripper solution has been widely studied from the view points of economy and efficiency. In this paper, the recycling technologies on patent of the waste stripper solution were analyzed. The range of search was limited within the open patents of USA (US), European Union (EP), Japan (JP), and Korea (KR) up to september, 2007. Patents have been collected using key-words searching and filtered by filtering criteria. The trends of the patents was analyzed by the years, countries, companies, and technologies.

• Clean Technology
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• v.14 no.4
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• pp.275-280
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• 2008

In this study, we carry out economic and technical feasibility study for treatment process of waste solvent such as SD waste solution and stripper solution from LCD manufacturing process. Extensive screening work has been done for selecting the best extraction solvent. As a result, it is shown that $CHCl_3$ is the most adequate extraction solvent for separation and recovery of both SD waste solvent and stripper waste. Rigorous simulation study has been carried out for extraction process and distillation process as a candidate of waste solvent treatment. The result shows that the solvent extraction process is more beneficial than the simple distillation process.

• Clean Technology
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• v.13 no.4
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• pp.257-265
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• 2007

As a basic study for the development of pilot-scale distillation process of waste photoresist strippers from semiconductor industry, lab-scale experiments for the recovery of NMP (N-methy1-pyrrolidione) and BDG (Butyldiglycol) from waste photoresist strippers have been made using a spinning band vacuum distillation column. Purities of NMP and BDG obtained from the present experiments were higher than 99.5%. Furthermore, water content was less than 1000 ppm, color grade(APHA) less than 50, most metal contents except sodium less than 1 ppb. Those results indicate that NMP and BDG reclamed by distillation satisfy the their specifications required for the formulation of new photoresist strippers. Recovery rate of NMP and BDG was 96 and 53%, respectively, for type A, and 93 and 57%, respectively, for type B waste PR stripper solution.

• Resources Recycling
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• v.23 no.3
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• pp.37-43
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• 2014

A study has been made on the recovery of tin and copper from waste solder stripper by oxalate precipitation. With the increasing of the oxalic acid addition, tin was precipitated effectively and removed above 99.5% of tin when the oxalic acid, in an amount 1.0-1.5 times the stoichometric requirement, was added. But, in this case, only 2.0% of copper was precipitated and lead, iron were not precipitated. So, tin was selectively removed from the waste solution. With the increasing of the reaction temperature, the removal percentage of tin was increased and maximum value at arounf $60^{\circ}C$ and decreased with increase in the temperature any more. After filtering the precipitate and drying in oven, $SnO_2$ was obtained from the precipitate. After removal of tin in stripping solution, above 91% of copper was selectively removed by Cu-oxalate by addition of oxalic acid.

• Resources Recycling
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• v.22 no.4
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• pp.81-90
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• 2013

Since the 1990s, the rapid development of information and communication industry, the demand for semiconductor and LCD continues to increase. Therefore in the formation of fine circuit patterns, which are the cores of sensitizer and the most expensive thinner and stripper liquor used to remove photoresist and its dilution, the amount in demand are dramatically increasing, emerging need for recycling of waste thinner and stripper liquor. Recently, recycling technologies of stripping process waste solution has been widely studied by economic aspects and environmental aspects, in terms of efficiency of the stripping process. In this study, analyzed paper and patent for recycling technologies of waste solution from stripping process. The range of search was limited in the open patents of USA (US), European Union (EP), Japan (JP), Korea (KR) and SCI journals from 1981 to 2010. Patents and journals were collected using key-words searching and filtered by filtering criteria. The trends of the patents and journals was analyzed by the years, countries, companies, and technologies.

• Resources Recycling
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• v.24 no.5
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• pp.33-39
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• 2015

A basic study was conducted to effectively recover nitric acid from a waste solder stripper by diffusion dialysis using anion exchange membranes. The effects of flow rate, flux ratio, nitrate concentration, and metallic ion types and concentration on the recovery percentage of nitric acid were investigated. The recovery percentage of nitric acid was decreased with the increase of flow velocity. But the recovery percentage of nitric acid was increased as the increase of flux ratio(W/F) and showing a recovery percentage of nitric acid of about 99% at a flux ratio of 1.5 or more. As the increase of nitric acid concentration in feed solution, the recovery percentage of nitric acid was increased up to 3.0M, but in case of greater than 3.0M, the recovery percentage gradually was decreased. Leakage percentage of metallic ions through the membrane were in the order of Pb, Na and Cu but Fe and Sn did not leakaged. As a result of diffusion dialysis using real waste solder stripper at a flow rate of $0.9L/hr-m^2$, W/F = 1.3, a recovery percentage of nitric acid of approximately 94% was gained.