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http://dx.doi.org/10.7844/kirr.2013.22.4.81

Technical Trend on the Recycling Technologies for Stripping Process Waste Solution by the Patent and Paper Analysis  

Lee, Ho-Kyung (Korex Corp.)
Lee, In-Gyoo (Korex Corp.)
Park, Myung-Jun (Korex Corp.)
Koo, Kee-Kahb (Sogang University)
Cho, Young-Ju (Korea Institute of Geoscience and Mineral Resources)
Cho, Bong-Gyoo (Korea Institute of Geoscience and Mineral Resources)
Publication Information
Resources Recycling / v.22, no.4, 2013 , pp. 81-90 More about this Journal
Abstract
Since the 1990s, the rapid development of information and communication industry, the demand for semiconductor and LCD continues to increase. Therefore in the formation of fine circuit patterns, which are the cores of sensitizer and the most expensive thinner and stripper liquor used to remove photoresist and its dilution, the amount in demand are dramatically increasing, emerging need for recycling of waste thinner and stripper liquor. Recently, recycling technologies of stripping process waste solution has been widely studied by economic aspects and environmental aspects, in terms of efficiency of the stripping process. In this study, analyzed paper and patent for recycling technologies of waste solution from stripping process. The range of search was limited in the open patents of USA (US), European Union (EP), Japan (JP), Korea (KR) and SCI journals from 1981 to 2010. Patents and journals were collected using key-words searching and filtered by filtering criteria. The trends of the patents and journals was analyzed by the years, countries, companies, and technologies.
Keywords
stripping process waste solution recycling; patent; paper; analysis; technical trend;
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