Properties of ZnO:Ga Thin Films Deposited by RF Magnetron Sputtering with Ar Gas Flows (RF 마그네트론 스퍼터링법으로 제조한 GZO 박막의 Ar 유량에 따른 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.33 no.6
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- pp.450-453
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- 2020