• 전기학회논문지
• /
• 제64권10호
• /
• pp.1440-1447
• /
• 2015

This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

• 대한기계학회논문집A
• /
• 제21권7호
• /
• pp.1013-1020
• /
• 1997

Among various gyroscopes, the vibrating gyroscope has advantages such as compact size, mass-productivity and low cost. However this kind of gyroscope usually suffer from low linearity and low signal to noise ratio. Therefore, it is necessary to study on vibrating gyroscope to improve performance. In this paper, triangular cross section si selected in consideration for several points. The existing designs of exciting and sensing have some problems such that small signal size and low linearity. This paper proposes new design of exciting and sensing which is named one period exciting and the other period sensing. This design improves signal size, but it cannot improve linearity. This is because above two designs are the same open-loop type. So, another new design is proposed, which is named rebalancing, is applied to one period exciting and the other period sensing. This design are closed-loop type. It feedbacks the output signal. According to control theory, it can improve linearity. The circuits of each design are realized and used to calibration test. Calibration results show that new design of rebalancing improves linearity and signal size.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 A
• /
• pp.235-238
• /
• 2003

In this study, we propose a method of digital control to drive the vibrating gyroscope using electromagnetic-force. The gyroscope requires accurate vibration control and signal processing for high performance. Conventional PLL based analog controller is not only difficult to manufacture but also weak to outer environment such as temperatures, air pressures and etc. But digital controller using DSP can consistently maintain the cylinder vibration and perform digital signal processing regardless of disturbance. DSP's PWM function was utilized to control the vibration, and rotation-detecting algorithm was developed. Finally, the controller was verified by simulation and experiment using rotation-rate table.

• 한국정밀공학회지
• /
• 제18권1호
• /
• pp.89-97
• /
• 2001

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

• 소음진동
• /
• 제5권3호
• /
• pp.403-411
• /
• 1995

Square beam type piezoelectric vibrating gyro is developed for the measurement of angular velocity, which is compact, small in size and mass- producible. It features that three pieces of piezoelectric ceramics and bonded onto one face of equilateral square bar type gyro head. Two of them are used as sentuators which drive the gyro head and measure Coriolis force. The third piece is used for the feedback signal in order to resonate the gyro head and measure Coriolis force. The third piece is used for the feedback signal in order to resonate the gyro head with its fundamental natural frequency. Matching two fundamental natural frequencies in the gyro head with its driving frequency is found critical in the design of vibration gyro. Calibration results show that the vibrating gyro developed has the dynamic characteristics of first-order system within the frequency range of interest, which can be easily compensated by a lead compensator.

• 한국소음진동공학회논문집
• /
• 제13권2호
• /
• pp.92-98
• /
• 2003

A rate gyroscope has been used popularly to measure the angular motion of a given vehicle using a symmetric rotor spinning rapidly about its symmetry axis. Since the rapid rotation is required in this type of gyroscope, the motor has been used to make the rotor spin, so that it results in a heavy configuration. The toning-fork gyroscope has been developed to avoid this problem, which utilizes a Coriolis coupling term and vibration about one axis. Due to the Coriolis effect, the vibration of one axis is transferred to other axis when the angular motion along the vibrating axis is given to the system. The concept of a tuning-fork gyroscope was recently realized using MEMS techniques. However, the dynamic characteristics of the tuning-fork gyroscope has not been discussed in detail. In this study. we derived the equations of motion for the tuning-fork type gyroscope using the energy approach and investigated the dynamic characteristics by means of numerical analysis.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2003년도 ICCAS
• /
• pp.1537-1541
• /
• 2003

In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

• 한국소음진동공학회논문집
• /
• 제14권1호
• /
• pp.64-72
• /
• 2004

In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2002년도 추계학술대회논문집
• /
• pp.37-43
• /
• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2003년도 추계학술대회논문집
• /
• pp.970-976
• /
• 2003

In this paper, we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the notation of the gyroscope main body. The motions of the ring are electro-statically derived, sensed and balanced by electrodes. The equations of motion are formulated. The scheme of angular velocities sensing by force-to-rebalance method is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.