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3D MEMS 소자에 적합한 열적 응력을 고려한 수직 접속 구조의 설계 (A design of silicon based vertical interconnect for 3D MEMS devices under the consideration of thermal stress)

  • 정진우;김현철;전국진
    • 대한전자공학회논문지SD
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    • 제45권2호
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    • pp.112-117
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    • 2008
  • 3D MEMS 소자 또는 적층형 패키지에 응용하기 위해서 실리콘 관통 비아를 이용한 새로운 수직 접속 방법을 제안하고 그 실효성을 증명하기 위해 제작하였다. 제안된 실리콘 관통 비아는 기존의 관통 비아에서 도전 물질로 사용되던 구리대신 실리콘을 적용하였다. 그 결과 열팽창 계수 차이에 의한 열응력 줄일 수 있어 높은 온도에서 이루어지는 MEMS 공정과 병행 가능하게 되었다. $30{\mu}m$ 두께의 실리콘 기판 2층이 적층되었으며 $40{\mu}m$$50{\mu}m$의 간격을 가지는 관통 비아 배열을 제작하였다. 관통 비아의 전기적 특성을 측정하고 분석하였다. 측정된 저항 값은 $169.9\Omega$이었다.

실리콘 관통형 Via(TSV)의 Seed Layer 증착 및 Via Filling 특성 (Characteristic of Through Silicon Via's Seed Layer Deposition and Via Filling)

  • 이현주;최만호;권세훈;이재호;김양도
    • 한국재료학회지
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    • 제23권10호
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    • pp.550-554
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    • 2013
  • As continued scaling becomes increasingly difficult, 3D integration has emerged as a viable solution to achieve higher bandwidths and good power efficiency. 3D integration can be defined as a technology involving the stacking of multiple processed wafers containing integrated circuits on top of each other with vertical interconnects between the wafers. This type of 3D structure can improve performance levels, enable the integration of devices with incompatible process flows, and reduce form factors. Through silicon vias (TSVs), which directly connect stacked structures die-to-die, are an enabling technology for future 3D integrated systems. TSVs filled with copper using an electro-plating method are investigated in this study. DC and pulses are used as a current source for the electro-plating process as a means of via filling. A TiN barrier and Ru seed layers are deposited by plasma-enhanced atomic layer deposition (PEALD) with thicknesses of 10 and 30 nm, respectively. All samples electroplated by the DC current showed defects, even with additives. However, the samples electroplated by the pulse current showed defect-free super-filled via structures. The optimized condition for defect-free bottom-up super-filling was established by adjusting the additive concentrations in the basic plating solution of copper sulfate. The optimized concentrations of JGB and SPS were found to be 10 and 20 ppm, respectively.

Comparison between Visual Inspection of Cervix and Cytology Based Screening Procedures in Bangladesh

  • Nessa, Ashrafun;Nahar, Khadiza Nurun;Begum, Shirin Akhter;Anwary, Shahin Ara;Hossain, Fawzia;Nahar, Khairun
    • Asian Pacific Journal of Cancer Prevention
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    • 제14권12호
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    • pp.7607-7611
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    • 2013
  • Background: Cervical cancer continues to be a major problem in Bangladesh with approximately 18,000 new cases annually of which over 10,000 women die from it. Visual inspection of the cervix after 3-5% acetic acid (VIA) application is a simple and easy to learn method for cervical cancer screening, although cytology-based screening is more often applied in developed countries where it has successfully reduced the prevalence of cervical cancer. Objective: To compare the efficacy of VIA and cytology-based primary methods for cervical cancer screening in Bangladesh. Materials and Methods: This hospital based comparative study was conducted at the VIA centre and Colposcopy Clinic of Bangabandhu Sheikh Mujib Medical University (BSMMU) from October 2008 to October 2010. Results: Among 650 women, 74 (11.4%) were VIA+ve and 8 (1.2%) had abnormalities in their Pap smear reports. During colposcopy, 38 (7.7%) women had different grades of CIN and 4 (0.6%) had cervical cancer. The gold standard histology findings proved 20 women had CIN I, 14 had CIN II/II and 4 had cervical cancer. Among the 38 histology diagnosed abnormalities, VIA test could identify 30 abnormalities including two cervical cancers. However, Pap smear could detect only 8 cases of histological abnormalities (2 low grade and 6 had high grade lesion) and it missed all the cervical cancer cases. The sensitivity and specificity of VIA were 88.9% and 52.1%. The positive predictive value (PPV) and negative predictive value (NPV) were 41.0%, and 92.6% respectively. Moreover, the sensitivity, specificity, PPV and NPV of Pap smear were 33.3%, 95.8%, 75.0% and 79.3%, respectively. Conclusions: VIA test should be used as the primary screening tool even with its low sensitivity and specificity in low resource countries like Bangladesh. False positive results may be greater, but overtreatment can be minimized by colposcopy evaluation of the VIA positive women.

버추얼 인터페이스 아키텍처 및 인터벌 캐쉬에 기반한 분산 VOD 서버 (A Distributed VOD Server Based on Virtual Interface Architecture and Interval Cache)

  • 오수철;정상화
    • 한국정보과학회논문지:시스템및이론
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    • 제33권10호
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    • pp.734-745
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    • 2006
  • 본 논문에서는 VIA(Virtual Interface Architecture) 통신 프로토콜과 인터벌 캐쉬 기법을 적용하여 서버 내부 통신망의 부하를 감소시킨 PC 클러스터 기반 분산 VOD 서버를 제안한다. 분산 VOD 서버의 각 노드는 클러스터상에 분산 저장된 비디오 데이타를 서버 내부 통신망을 사용하여 전송받아 사용자에게 제공한다. 이 때, 대량의 비디오 데이타가 서버 내부 통신망을 통하여 전송됨으로 서버 내부 통신망에 부하가 증가한다. 본 논문에서는 TCP/IP의 통신 오버헤드를 제거한 사용자 수준 통신 프로토콜인 VIA에 기반한 분산 VOD 파일 시스템을 개발함으로써, 원격 디스크를 접근하는데 소요되는 내부 통신망 비용을 최소화하려고 하였다. 또한, VIA의 최대 전송 크기를 VOD 시스템에 맞게 확장함으로써 내부 통신망의 성능을 향상시키려고 하였다. 추가로 본 논문은 인터벌 캐쉬 기법을 적용하여 원격 서버 노드에서 전송 받은 비디오 데이타를 지역 노드의 메인 메모리에 캐쉬함으로써, 서버 내부 통신망에 발생하는 통신량을 감소시켰다. 실험을 통하여 분산 VOD 서버의 성능을 측정하였으며, TCP/IP에 기반하고 인터벌 캐쉬를 지원하지 않는 기존의 분산 VOD 서버와 성능을 비교하였다. 실험결과, VIA 적용으로 약 11.3%의 성능 향상, 그리고 인터벌 캐쉬 기법을 적용하여 추가로 약 10%의 성능 향상이 생겨 총 21.3%의 성능 향상을 얻을 수 있었다.

Role of Print and Audiovisual Media in Cervical Cancer Prevention in Bangladesh

  • Nessa, Ashrafun;Hussain, Muhammad Anwar;Ur Rashid, Mohammad Harun;Akhter, Nargis;Roy, Joya Shree;Afroz, Romena
    • Asian Pacific Journal of Cancer Prevention
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    • 제14권5호
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    • pp.3131-3137
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    • 2013
  • Background: Visual inspection of cervix with acetic acid (VIA) is offered at 252 centers in 64 districts of Bangladesh. VIA+ve women are managed at colposcopy clinics of Bangabandhu Sheikh Mujib Medical University (BSMMU) and 14 Medical College Hospitals (MCHs). This research work has been supported by 'UICC Cancer Prevention Campaign' programme. Objectives: This study explored the role of print materials and electronic media to improve cervical cancer screening in the present socio-cultural context of Bangladesh. Methods: This study was performed from January to August 2011 at two upazilas of Bangladesh (Singair with screening facility and Sonargaon without screening facility). Data were collected by focus group discussion (FGD) with women, husbands and community people before and after intervention. Information on cervical cancer screening and VIA camps was disseminated using advertisement through local cable line of the television, microphone announcement, service providers and leaflet throughout the week prior to a VIA camp. Three-day VIA camps were organized at the upazila health complex (UHC) of both upazilas. Quantitative data was gathered from women at the camps on source of information on VIA and the best method of awareness creation. Results: The population was aware of "cancer" and a notable number knew about cervical cancer. Baseline awareness on prevention and VIA was low and it was negligible where screening services were unavailable. Awareness was increased fourfold in both upazilas after interventions and half of the women and the majority of the community people became aware of screening and available facilities. Cable line advertisement (25.5%), microphone announcement (21.4%), and discussion sessions (20.4%) were effective for awareness creation on VIA. Television was mentioned as the best method (37.4%) of awareness creation. Conclusion: Television should be used for nation-wide awareness creation. For local awareness creation, cable line advertisement, microphone announcements and health education at Uthan Baithaks/ EPI sessions can easily be adopted by the government.

쥐치아 치근면의 치주인대세포의 활성도를 평가하는 방법으로 MTT검색법의 적절성에 대한 조직학적인 검증 (THE VERIFICATION OF THE MTT ASSAY ON THE VIABILITY OF PERIODONTAL LIGAMENTAL CELLS IN RAT MOLARS THROUGH THE HISTOLOGIC EXAMINATION)

  • 김현기;김의성;최인복;김진;이승종
    • Restorative Dentistry and Endodontics
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    • 제28권5호
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    • pp.385-391
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    • 2003
  • The purpose of this study is to examine the viability of PDL cells in rat molars by using MTT assay and to verify the MTT assay through the histologic observation. Thirty of Sprague-Dawley white female rats of 4-weeks old with a body weight of about 100 grams were used. Groupings are as follows : Immediate Group : Positive control group(n=10)-after extraction immediately. Dried Group : Negative control group(n=10)-after drying for an hour under warm dry. $ViaSpan^{\circledR}$ Group : 1hour $ViaSpan^{\circledR}$ group(n=10)-after storing in $ViaSpan^{\circledR}{\;}at{\;}4^{\circ}C$ for 1hour. Ten teeth of each group were treated as same as above and replanted to the original socket of experimental animals. After two weeks of replantation. all the experimental animals were sacrificed. And after fixation, extracted maxillary jaw was dimineralized. After it was embedded in paraffin. serial section by $5\mu\textrm{m}$ was carried out and for construction of specimen, hematoxylin-eosin dye was used. The mean MTT measurement of immediate group(positive control) is 2.81 and the mean measurement of dried group(negative control) is 0.98 which is significantt differnt(P<0.05), The mean measurement of $ViaSpan^{\circledR}$ group is 2.65 and there is significant difference between dried group and $ViaSpan^{\circledR}$ group(P<0.05), However, there is no difference between immediate group and $ViaSpan^{\circledR}$ group. The average resorption points of immediate group is 3.03 points. In the dried group, average 6.44 points resorption and 2.68 points showed resorption in the $ViaSpan^{\circledR}$ group. Unlike with MTT assay, there was no significant difference between the immediate group and $ViaSpan^{\circledR}$ group. The usage of MTT assay as a viable cell marker may give us a better indication of the maintenance of periodontal ligament cell vitality.

세라믹 패키지 내에서 비아에 따른 열적 거동에 관한 연구 (A Study on the Thermal Behaviour of Via Design in the Ceramic Package)

  • 이우성;고영우;유찬세;김경철;박종철
    • 마이크로전자및패키징학회지
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    • 제10권1호
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    • pp.39-43
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    • 2003
  • 열전달에 대해 고려하는 것은 LTCC와 같은 고밀도 회로기판을 설계하는데 매우 중요한 요소이다. 본 연구에서는 열전달 효과를 조사하기 위해서 LTCC 기판 내에 열 비아 및 패드를 위치시킨 기판을 제작하였다. 제작된 기판의 정확한 열적인 분석을 이해하기 위해서 Laser Flash Method에 의한 샘플의 열전도도 분석 및 수치해석을 수행하였다. 열비아 및 열방출을 위한 패드로 구성된 LTCC 기판의 열전도 특성은 순수 Ag재료의 44%인 103 W/mK 값을 초과하는 특성을 나타내었다. 수치해석에 의해서 LTCC 기판내의 비아 배열, 크기, 밀도 변화에 따른 열거동의 해석을 수행하였다.

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체온 이용이 가능한 나노입자 박막 열전소자의 플랫폼 개발연구 (Design of the Platform for a Nanoparticle thin Film Thermoelectric Device transforming Body Heat into Electricity)

  • 양승건;조경아;최진용;김상식
    • 전기전자학회논문지
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    • 제20권2호
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    • pp.174-176
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    • 2016
  • 본 연구에서는 HgTe 나노입자 박막 수평열전 플랫폼에 via를 형성하여 나노입자 박막 양단의 온도 차이를 극대화하였다. HgTe 나노입자 박막은 p-type의 열전 특성을 보였으며, HgTe 나노입자 박막 수평열전소자에서 제백계수는 $290{\mu}V/K$이였다. 또한 피부 위의 via 열전 플랫폼을 통해서 향후 차세대 웨어러블 전자 소자의 구현 가능성을 확인하였다.