• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1394-1397
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• 2005

The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.12
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• pp.1366-1371
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• 2011

In ultra precision machining, it is necessary to adjust the horizontality and reference position of a workpiece in a noncontact manner. For this, a simple process by measuring impedance between a tool tip and a workpiece which are connected to impedance analyzer is proposed. As the distance between the tool and the workpiece gets closer, the reduction rate of impedance becomes higher over all frequency ranges. By setting threshold value of impedance reduction rate at specific frequencies through preliminary experiments, the distance between the tool and the workpiece can be predicted and it directly enables us to horizontalize the workpiece and to set the tool to the desired reference position.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.101-103
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• 2007

In this paper. we design a robust optimal controller for ultra-precision positioning system. Generally, it is hard to control the nanometric scale positioning system because of the parameter uncertainties and external disturbances. To solve this problem. we suggest a control algorithm based on the modified sliding-mode control and the LQ control in an augmented system. The augmented system is composed of additional state variables: state estimates and control input in the nominal system. Through comparison with LQ optimal control, it is verified that the proposed control algorithm is more robust to the unexpected parameter variations and external noises.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.106-113
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• 2009

A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.309-312
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• 2005

DTM (Diamond Turning Machine) is using for ultra precision manufacturing such as, plastic lens die or aspherical optics. This study is on a design of precision 2-axis stage for DTM. We designed and manufactured a back lash free stage using different weights and measured the positioning accuracy using Interferometer. Also, the 2-D moving accuracy is measured using the high magnification CCD technique. Then, the stage is tested with the machining of spherical and aspherical lens in a DTM with air bearing spindle. It was shown that the back lash free stage is effective for improving the positioning accuracy. Also, positioning control errors in motion control board were able to be found using the proposed stages system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.391-392
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• 2010