1 |
Park, J. H., "Development of the 6 DOF Ultra Precision Positioning System using the PZTActuators and Elastic Hinges," Ph. D Thesis for Mechanical Engineering, Seoul National University,2003
|
2 |
Yong, Y. K., Lu, T. and Handley, D. C., "Review of circular flexure hinge design equations and derivation of empirical formulations," Precision Engineering, Vol. 32, No. 2, pp. 63-70, 2008
DOI
ScienceOn
|
3 |
Ljung, L., "System Identification: Theory for the User," Prentice-Hall, 1987
|
4 |
Moon, J. H., Kim, H. S. and Pahk, H. J., "Design and Modeling of a 3-DOF Precision Stage for Vibration Isolation," J. of KSPE, Vol. 24, No. 3, pp. 124-133,2007
과학기술학회마을
ScienceOn
|
5 |
Paros, J. M. and Weisbord, L., "How to Design Flexure Hinges," Machine Design, Vol. 37, pp. 151-156, 1965
|
6 |
Shan, X., Kuo, S., Zhang, J. and Menq, C., "Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage," IEEE/ASME Transactions on Mechatronics, Vol. 7, No. 1, pp. 67-78, 2002
DOI
ScienceOn
|
7 |
Gordon, C. G., "Generic Criteria for Vibration-Sensitive Equipment," Proceedings of International Society for Optical Engineering(SPIE), Vol. 1619, pp.71-85, 1991
|
8 |
Yao, Q., Dong, J. and Ferreira, P. M., "Design, analysis, fabrication and testing of a parallelkinematic micropositioning XY stage," International Journal of Machine & Tools Manufacture, Vol. 47, No. 6, pp. 946-961, 2007
DOI
ScienceOn
|