• 제목/요약/키워드: triple ion

검색결과 53건 처리시간 0.027초

MeV 이온주입에 의한 Retrograde Triple-well 형성시 발생하는 결합제어 (Control of Defect Produced in a Retrograde Triple Well Using MeV Ion Implantation)

  • 정희석;고무순;김대영;류한권;노재상
    • 한국항해항만학회:학술대회논문집
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    • 한국항해항만학회 2000년도 추계학술대회논문집
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    • pp.17-20
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    • 2000
  • This study is about a retrograde triple well employed in the Cell tr. of next DRAM and flash memory. triple well structure is formed deep n-well under the light p-well using MeV ion implantation. MeV P implanted deep n-well was observed to show greatly improved characteristics of electrical isolation and soft error. Junction leakage current, however, showed a critical behavior as a function of implantation and annealing conditions. {311} defects were observed to be responsible for the leakage current. {311} defects were generated near the R$\sub$p/ (projected range) region and grown upward to the surface during annealing. This is study on the defect behavior in device region as a function of implantation and annealing conditions.

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MeV 이온주입에 의한 Retrograde Triple-well 형성시 발생하는 결함제어 (Control of Defect Produced in a Retrograde Triple Well Using MeV Ion Implantation)

  • 정희석;고무순;김대영;류한권;노재상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.17-20
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    • 2000
  • This study is about a retrograde triple well employed in the Cell tr. of next DRAM and flash memory. Triple well structure is formed deep n-well under the light p-well using MeV ion implantation. MeV P implanted deep n-well was observed to show greatly improved characteristics of electrical isolation and soft error. Junction leakage current, however, showed a critical behavior as a function of implantation and annealing conditions. {311} defects were observed to be responsible for the leakage current. {311} defects were generated near the R$\_$p/ (Projected range) region and grown upward to the surface during annealing. This is study on the defect behavior in device region as a function of implantation and annealing conditions.

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고에너지 이온주입에 의한 triple-well과 twin-well 구조에서 래치업 예방을 위한 해석 (An analysis of latch-u immunity on triple-well and twin-well architecgure using a high energy ion implanttion)

  • 홍성표;전현성;김중연;노병규;조재영;오환술
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.445-448
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    • 1998
  • 본 논문은 triple-well과 twin-well에서의 고에너지 이온주입 에너지와 도즈량 변화에 따른 래치업 특성을 비교하였다. 공정시뮬레이터인 ATHENA로 소자를 제작하고 도핑프로파일 형태와 구조를 조사한 후, 래치업 특성은 소자 시뮬레이터인 ATLAS를 이용하였다. triple-well 공정이 마스크 스텝수를 줄이고, 이온주입 후 열처리시간을 단축하며 별도의 열처리 공정없이 도핑르로파일을 넓은 형태로 분포시켜 래치업 면역특성이 매우 좋은 결과를 얻었다.

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Li+ and Li+I-Li+ ions Solvated by 1,4-dioxane: An ion Mobility Spectrometry-Mass Spectrometry Study

  • Choi, Yunseop;Ji, Inyong;Seo, Jongcheol
    • Mass Spectrometry Letters
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    • 제12권4호
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    • pp.152-158
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    • 2021
  • Electrospray ionization (ESI) and ion mobility spectrometry-mass spectrometry (IMS-MS) were employed to investigate the solvated structures of ionic species in the lithium iodide electrolyte solution in the gas phase. The Li+I-Li+ triple ion and single standalone Li+ ions solvated by 1,4-dioxane were successfully generated and observed by ESI-MS under the influence of dioxane vapor at the inlet region. Under the present experimental condition, (1,4-dioxane)m·Li+ complex ions (m = 1, 2, and 3) and a (1,4-dioxane)·Li+I-Li+ complex ion were observed, which were further examined by IMS to investigate their structures. The presence of multiple structural isomers was confirmed, which accounts for the endothermic conformational transition of 1,4-dioxane from a chair to a boat to achieve bidentate O-donor binding to Li+ and Li+I-Li+. Further structural details critical for the ion-solvent interactions were also examined and discussed with the help of density functional theory calculations.

Triple-bed Adsorbent Tube를 이용한 가스상 극미량 복합 악취 및 휘발성 유기화합물의 동시 분석 (Simultaneous Analyses for Trace Multi-Odorous and Volatile Organic Compounds in Gas using a Triple-bed Adsorbent Tube)

  • 서용수;이제근
    • Korean Chemical Engineering Research
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    • 제48권2호
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    • pp.244-252
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    • 2010
  • 본 연구에서는 Triple-bed 흡착튜브를 제작하여 열탈착장치와 GC-MS로써 다성분 복합 악취성물질 및 휘발성유기 화합물을 동시분석 가능성을 평가하고자 하였다. Triple-bed 흡착튜브는 하나의 튜브에 Tenax-TA와 소량의 Carbopack B 및 Carbosieve SIII 흡착제를 흡착강도 순으로 3단 배열된 것이다. GC-MS의 분석조건은 mass range 20~350 m/z, 불순물 1 ppm 이하의 헬륨을 운반가스로 하여 저비점 저분자량 물질의 분리동정에 효과적일 수 있도록 하고, 목적이온 추출을 통하여 정량하였다. 그 결과 ppbv 수준의 $C_1{\sim}C_5$의 알콜(4), 알데히드(6), 케톤(2) 그리고 황화합물(2)을 포함한 14종의 물질 모두 99%이상의 회수율과 양호한 재현성 및 직진성으로 동시분석이 가능하였다. 비교적 휘발성이 강하고 분자량이 낮은 물질인 메틸알콜, 아세트알데히드는 상대습도 45% 이하, 흡착유속 50 mL/min, 흡착량 2 L 이하에서 높은 회수율로 보다 안정적으로 정량분석이 가능하였다. 또한 목적이온 추출은 물질피크가 겹쳐 나타난 경우에도 다성분 물질을 각각 정량 가능하였다.

Deep Submicron급 CMOS 디바이스에서 Triple Well 형성과 래치업 면역 향상에 관한 연구 (A Study on Improvement Latch-up immunity and Triple Well formation in Deep Submicron CMOS devices)

  • 홍성표;전현성;강효영;윤석범;오환술
    • 전자공학회논문지D
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    • 제35D권9호
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    • pp.54-61
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    • 1998
  • Deep submicron급 CMOS디바이스에서 래치업 면역특성을 향상시키기 위한 새로운 Triple well구조를 제안하였다. Triple well에서 이온주입 에너지와 도즈량 변화에 따른 최적인 래치업 면역을 위한 공정조건을 확립하고 이것을 기존의 Twin well구조와 비교분석하였다. 공정은 공정시뮬레이터인 ATHENA로 소자를 제작하여 도핑프로파일과 구조를 해석하고 래치업 특성은 소자시뮬레이터인 ATLAS를 사용하였다. Triple well과 Twin well의 구조에서 공정상의 차이가 도핑프로파일에 미치는 영향과 프로파일 형태가 래치업 특성에 미치는 영향을 규명하였다. Triple well구조에서 p-well이온주입에너지 2.5MeV, 도즈량 1×10/sup 14/[cm/sup -2/]일 때 트리거 전류가 2.5[mA/${\mu}{m}$]로 매우 큰 래치업 면역특성을 얻었다.

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Optimization of Reflectron for Kinetic and Mechanistic Studies with Multiplexed Multiple Tandem (MSn) Time-of-flight Mass Spectrometry

  • Bae, Yong-Jin;Yoon, So-Hee;Moon, Jeong-Hee;Kim, Myung-Soo
    • Bulletin of the Korean Chemical Society
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    • 제31권1호
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    • pp.92-99
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    • 2010
  • Photoexcitation of a precursor ion inside a cell floated at high voltage installed in a tandem time-of-flight (TOF) mass spectrometer provides triple tandem mass spectrometric information and allows kinetic and mechanistic studies. In this work, the factors affecting, or downgrading, the performance of the technique were identified. Ion-optical and computational analyses showed that an optimum instrument could be designed by utilizing a reflectron with linear-plus-quadratic potential inside. Theoretical predictions were confirmed by tests with instruments built with different ion-optical layout. With optimized instruments, masses of intermediate ions in the consecutive dissociation of a precursor ion could be determined with the maximum error of $\pm5$ Da. We also observed excellent agreement in dynamical parameters (critical energy and entropy) for the dissociation of a model peptide ion determined by instruments with different ion-optical layout operated under optimum conditions. This suggests that these parameters can be determined reliably by the kinetic method developed previously when properly designed and operated tandem TOF instruments are used.

Surface Complexation Model을 이용한 양이온 중금속(Pb, Cd) 흡착반응의 모델화 연구 (Studies on the Adsorption Modeling of Cationic Heavy Metals(Pb, Cd) by the Surface Complexation Model)

  • 신용일;박상원
    • 한국환경과학회지
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    • 제8권2호
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    • pp.211-219
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    • 1999
  • Surface complexation models(SCMs) have been performed to predict metal ion adsorption behavior onto the mineral surface. Application of SCMs, however, requires a self-consistent approach to determine model parameter values. In this paper, in order to determine the metal ion adsorption parameters for the triple layer model(TLM) version of the SCM, we used the zeta potential data for Zeolite and Kaolinite, and the metal ion adsorption data for Pb(II) and Cd(II). Fitting parameters determined for the modeling were as follows ; total site concentration, site density, specific surface area, surface acidity constants, etc. Zeta potential as a new approach other than the acidic-alkalimetric titration method was adopted for simulation of adsorption phenomena. Some fitting parameters were determined by the trial and error method. Modeling approach was successful in quantitatively simulating adsorption behavior under various geochemical conditions.

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TRIFLE DIFFERENCE APPROACH TO LOW EARTH ORBITER PRECISION ORBIT DETERMINATION

  • Kwon, Jay-Hyoun;Grejner brzezinska, Dorota-A.;Yom, Jae-Hong;Lee, Dong-Cheon
    • Journal of Astronomy and Space Sciences
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    • 제20권1호
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    • pp.1-10
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    • 2003
  • A precise kinematic orbit determination (P-KOD) procedure for Low Earth Orbiter(LEO) using the GPS ion-free triple differenced carrier phases is presented. Because the triple differenced observables provide only relative information, the first epoch's positions of the orbit should be held fixed. Then, both forward and backward filtering was executed to mitigate the effect of biases of the first epoch's position. p-KOD utilizes the precise GPS orbits and ground stations data from International GPS Service (IGS) so that the only unknown parameters to be solved are positions of the satellite at each epoch. Currently, the 3-D accuracy off-KOD applied to CHAMP (CHAllenging Min-isatellite Payload) shows better than 35 cm compared to the published rapid scientific orbit (RSO) solution from GFZ (GeoForschungsZentrum Potsdam). The data screening for cycle slips is a particularly challenging procedure for LEO, which moves very fast in the middle of the ionospheric layer. It was found that data screening using SNR (signal to noise ratio) generates best results based on the residual analysis using RSO. It is expected that much better accuracy are achievable with refined prescreening procedure and optimized geometry of the satellites and ground stations.