• Geophysics and Geophysical Exploration
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• v.4 no.4
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• pp.133-144
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• 2001

An effective seismic reflection technique for mapping the cavities and bedrock surface in carbonate rocks is described. The high resolution seismic reflection images were successfully registered by using the hydrophones employed in the stream-water driven trench, and were effectively focused by applying optimal data processing sequences. The strategy included enhancement of the signal interfered with the large-amplitude scattering noise, through pre- and post stack processing such as time-variant filtering, bad-trace editing, residual statics, velocity analysis, and careful muting after NMO (normal moveout) correction. The major reflections including the bedrock surface were mapped with the desired resolution and were correlated to the seismic crosshole tomographic data. Shallow major reflectors could be identified and analyzed on the AGC (auto gain control)-applied field records. Three subhorizontal layers were identified with their distinct velocities; overburden (<3000 m/s), sediments (3000-4000 m/s), limestone bedrock (>4000 m/s). Taking into account of no diffraction effects in the field records, gravel-rich overburdens and sediments are considered to be well sorted. Based on the images mapped consistently on the whole survey line and seismic velocity increasing with depth, this area probably lacks in sizable cavities (if any, no air-filled cavities).

• Geophysics and Geophysical Exploration
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• v.14 no.2
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• pp.158-163
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• 2011

The small-loop electromagnetic (EM) survey is an effective method to delineate contamination areas and pathways of contaminant plumes from landfill. A multi-frequency small-loop EM survey was applied to find them at landfill area, located in delta region, and checked the results with in-situ surveys including 24 trench excavations and 12 drilling boreholes. The correlation between these two results indicates this survey would be suitable to investigate the contamination area. However, it would be difficult to analyze low resistivity less than 10 ohm-m below 10 m depth in delta area without drilling survey because of a limitation to expand the penetration depth lower than 10 m depth due to the separation of 1.66 m between the two coils of GEM-2.

• Journal of Biosystems Engineering
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• v.32 no.1 s.120
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• pp.30-36
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• 2007

Geothermal heat pump systems use the earth as a heat source in heating mode and a heat sink in cooling mode. These systems can be used for heating or cooling systems in farm facilities such as greenhouses for protected horticulture, cattle sheds, mushroom house, etc. A horizontal type means that a geothermal heat exchanger is laid in the trench buried in 1.2 to 1.8 m depth. Because a horizontal type has advantages of low installation, operation and maintenance costs compared to a vertical type, it is easy to be adopted to agriculture. In this study, to heat and cool farm facilities and obtain basic data for practical application of horizontal geothermal heat pump systems in agriculture, a horizontal geothermal heat pump system of 10 RT scale was installed in greenhouse. Heating performance of this system was estimated. The horizontal geothermal heat pump used in this study had heating COP of 4.57 at soil temperature of 14$^{\circ}C$ for depth of 1.75m and heating COP of 3.75 at soil temperature of 7$^{\circ}C$ for the same depth. The stratification of water temperature in heat tank appeared during the whole heat rejection period.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.10
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• pp.546-550
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• 2004

Two fabrication approaches are proposed to planarize the sacrificial layer over hollow structures. One is the photoresist filling method that makes use of photolithography, thermal curing and plasma ashing. The other is the lamination method that is applying pressure and temperature to the organic film over the hollow structures. The fabrication results are compared with those of CMP process. Trenches and cavities with various dimensions have been made for the porposed process. Upon measuring the planarization levels, they are dependent on planarization methods and the geometrical size of hollow structures. The photoresist filling method is so strongly dependent on the width and depth of trenches that we have problems to use it for large dimensional trenches. To the contrary, the flatness of sacrificial layer over the trenches was found to be almost independent of trench dimensions for the lamination method. A CMP process shows the most excellent results, but the fabrication is complicated and the access to it is not so easy. It is important to choose the proper planarization method by considering the required flatness levels, materials to be planarized, and connection between the planarization step and the previous or the following process of it.

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.684-687
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• 2005

Ground source heat pump systems are used for heating, ventilating and air-conditioning systems in commercial buildings, schools, and factories because of low operating and maintenance costs. These systems use the earth as a heat source in heating mode and a heat sink in cooling mode. Ground heat exchangers are classified by a horizontal type and vertical type according to the installation method. A horizontal type means that a heat exchanger is laid in the trench bored in 1.2 to 1.8 m depth. The solar heat and the rainwater are affected by the performance of heat exchanger and causes mutual influence among heat exchangers. In this study, to evaluate the performance of straight type, slinky type, and spiral type of horizontal ground heat exchangers designed on 1 RT scale, test sections are buried on the earth and experimental apparatus is installed. Therefore the performance of these is estimated.

• The Journal of the Korea institute of electronic communication sciences
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• v.12 no.4
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• pp.561-568
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• 2017

In order to effectively utilize the Coarse Wavelength Division Multiplexing(CWDM) technology in optical integrated devices, a design of a wavelength selective coupler structure between an optical fiber and an optical waveguide in a flat substrate is can be considered. In this paper, we consider the coupling between a silicon waveguide with an air trench and a single mode fiber. We investigated the tendency of coupling efficiency and its limitations according to the grating depth. For this purpose, the coupling efficiency of coupler structure designed through modeling based on coupled mode theory is predicted and quantitatively compared with simulation results using finite element method.

• Journal of Environmental Health Sciences
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• v.38 no.6
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• pp.529-540
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• 2012

Objective: This research was performed to evaluate the state of oil pollution in an area surrounding a railway station that has over 100 years of business history as a railway station in S City, Korea. The amount of polluted soil was estimated, and the target area for remediation was assessed in this study to restore the oil-polluted area. Methods: To accomplish this aim, five observation wells were installed for the sampling of groundwater, and soil was sampled at 33 points. Electric resistance studies and a trench investigation were undertaken to understand the geological conditions of the site, and the groundwater movement in this area was simulated by MODFLOW. Physiochemical analyses were conducted to determine the quality of the groundwater and the current state of oil pollution influenced by that of the soil. Results: The mean level of total petroleum hydrocarbons (TPHs) in this area was 1,059 mg/kg, and the area for remediation was determined to be 7,610 mg/kg. Levels of benzene, toluene, ethylbenzene, and xylene (BTEX) were determined to be under the legal standard. Conclusion: In terms of depth, the biggest area polluted by TPH found was between 0 and 1 m from ground level, and the affected area was 5,900 $m^3$. TPHs were not detected in groundwater. Diesel and lubricating oil were the main causes of TPH pollution at this railway station.

• Journal of Construction Engineering and Project Management
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• v.3 no.2
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• pp.58-65
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• 2013

Earthwork activities are typically performed by heavy duty diesel (HDD) construction equipment that consumes large quantities of diesel fuel use and emits large quantities of pollutants, including nitrogen oxides (NOx), particulate matters (PM), hydrocarbon (HC), carbon monoxide (CO), and carbon dioxide ($CO_2$). This paper presents the framework for a model that can be used to estimate the production rate, activity duration, total fuel use, and total pollutants emissions for earthwork activities. A case study and sensitivity analysis for an excavator performing excavations are presented. The tool is developed by combining the multiple linear regressions (MLR) approach for modeling the productivity with the EPA's NONROAD model. The excavator data from RSMeans Heavy Construction Data were selected to build the productivity model, and emission factors of all type of pollutants from NONROAD model were used to estimate the total fuel use and emissions. The MLR model for the productivity rate can explain 92% of the variability in the data. Based on the model, the fuel use and emissions of excavator increase as the trench depth increase, but as the bucket size increase, the fuel use and emissions decrease.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.370-370
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• 2012

Feature size of Cu interconnects keep shrinking into several tens of nanometer level. For this reason, the Cu interconnects face challenging issues such as increase of electro-migration, line-width dependent electrical resistivity increase, and gap-filling difficulty in high aspect ratio structures. As the thickness of the Cu film decreases below 30 nm, the electrical resistivity is not any more constant, but rather exponential. Research on alloying with other elements have been started to inhibit such escalation in the electrical resistivity. A faint trace of Al added in Cu film by sputtering was reported to contribute to suppression of the increase of the electrical resistivity. From an industrial point of view, we introduced cyclic metal organic chemical vapor deposition (MOCVD) in order to control Al concentration in the Cu film more easily by controlling the delivery time ratio of Cu and Al precursors. The amount of alloying element could be lowered at level of below 1 at%. Process of the alloy formation was applied into gap-filling to evaluate the performance of the gap-filling. Voidless gap-filling even into high aspect ratio trenches was achieved. In-depth analysis will be discussed in detail.

• Journal of the Semiconductor & Display Technology
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• v.9 no.4
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• pp.13-18
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• 2010

Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.