• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.450-450
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• 2006

Organic light-emitting diodes (OLED) as pixels for flat panel displays are being actively pursued because of their relatively simple structure, high brightness, and self-emitting nature [1, 2]. The top-emitting diode structure is preferred because of their geometrical advantage allowing high pixel resolution [3]. To enhance the performance of TOLEDs, it is important to deposit transparent top cathode films, such as transparent conducting oxides (TCOs), which have high transparency as well as low resistance. In this work, we report on investigation of the characteristics of an indium tin oxide (ITO) cathode electrode, which was deposited on organic films by using a radio-frequency magnetron sputtering method, for use in top-emitting organic light emitting diodes (TOLED). The cathode electrode composed of a very thin layer of Mg-Ag and an overlaying ITO film. The Mg-Ag reduces the contact resistivity and plasma damage to the underlying organic layer during the ITO sputtering process. Transfer length method (TLM) patterns were defined by the standard shadow mask for measuring specific contact resistances. The spacing between the TLM pads varied from 30 to $75\;{\mu}m$. The electrical properties of ITO as a function of the deposition and annealing conditions were investigated. The surface roughness as a function of the plasma conditions was determined by Atomic Force Microscopes (AFM).

• Journal of the Microelectronics and Packaging Society
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• v.26 no.3
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• pp.37-41
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• 2019

Sheet resistance reduction in the Ag nanowire (NW) coated films is accomplished with slight improvement of optical properties for the application of transparent conducting electrodes by using $O_2$ plasma treatment. The sheet resistance was optimized after 30 seconds $O_2$ plasma treatment, showing the 27 % of maximum decrease of sheet resistance. It is found that the $O_2$ plasma treatment get rid of the residual organic materials at the junction of Ag NWs. However, the Ag NWs may be also snapped by the excessive $O_2$ plasma treatment can showing the collapses of Ag NWs networks. Furthermore, the optical properties such as optical transmittance and haze were monotonically improved with the $O_2$ plasma treatment time until 90 seconds.

• Proceedings of the KIEE Conference
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• 1989.07a
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• pp.319-322
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• 1989

Using pyrosol method, based on the pyrolysis of an aerosol produced by ultrasonic spraying, the deposition of transparent conducting oxides (TCO) such as $In_2O_3$ : Sn, $SnO_2$ : Sb and $SnO_2$ : F on glass substrates was studied. The electrical, optical and structural properties as functions of substrate temperature, dopant concentration, substrate type and carrier gas type were investigated.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.252-252
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• 2014

투명전극 제조에 이용되고 있는 진공기반 ITO공정의 제조 단가를 줄이기 위하여 용액 기반의 투명전극 제조 기술에 대한 연구를 수행 하였다. 용액공정을 수행하기 위하여 ITO 나노입자를 이용한 잉크를 제조하고 이를 잉크젯 인쇄공정에 적용하여 ITO 투명전극을 제조하였다. 열처리 온도에 따른 전기적 광학적 특성에 대한 분석을 진행하였다. 전기적 물성의 극대화를 위해 Ag metal grid를 인쇄공정을 통해 제작하고 용액기반 ITO 박막과 융합화(hybridization) 시켰다. Ag metal grid의 line width를 최소화 하기 위하여 전기수력학 방식의 잉크젯 시스템을 사용하여 metal grid를 형성하였고 Ag metal grid는 약 10um의 선폭을 가졌다. 인쇄된 Ag-grid/ITO 박막의 경우 550 nm파장에서(Ag grid pitch: 500 um기준) 약88%의 투과도를 보이며 저항이 $5{\Omega}/{\square}$ 이하의 특성을 나타내었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.3-3
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• 2011

Graphene has been attracting much attention owing to its fascinating physical properties such as quantum electronic transport, a tunable band gap, extremely high mobility, elasticity, thermal conductivity, mechanical strength and so on. There have been many efforts to utilize these outstanding properties of graphene for macroscopic applications such as transparent conducting films useful for flexible/stretchable electronics. However, the scale and the quality graphene need to be further enhanced for practical applications by developing more efficient synthesis, transfer, and doping methods. In this tutorial, the recent advances in graphene synthesis and applications will be reviewed, and discuss the future directions of graphene research.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.65-69
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• 2007

A design of experiments was applied in order to investigate the effect of processing variables in UV irradiation on the electrical/optical properties in indium-zinc oxide thin films, The processing variables, equivalently input variables are listed as UV irradiation time, oxygen flow rate, and chamber pressure. The statistical significance of Ultra Violet (UV) treatment was confirmed using a paired-t test. The full factorial $2^3$ design was employed to determine significant main and interaction effects in UV irradiation process. The chamber pressure and the interaction between UV irradiation time and $O_2$ flow rate were found to be statistically significant at the significance level of 0.1. Furthermore, the optimized approach was proposed in achieving the improved conductivity after UV irradiation.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.11a
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• pp.103-104
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• 2007

$CuInO_2$ 단일상은 합성조건이 매우 까다롭기 때문에 일반적인 고상법으로 얻기 힘든 것으로 알려저 있다. 투명전도성 $CuInO_2$ 박막을 증착하기 위하여 일반적인 고상법으로 Cu와 In의 비율이 1:1인 $Cu_2O-In_2O_3$ composite target 및 In 대신 Ca, Mg, Ti가 각각 1mol% 도핑된 target을 제작하였다. 제작된 각각의 composite target을 이용하여 pulsed laser deposition(PLD) 공정으로 투명전도성 $CuInO_2$ 박막을 증착하였다. Cu와 In이 1:1 인 $Cu_2O-In_2O_3$ composite target을 사용한 경우, 증착된 박막이 Cu와 In의 비율이 1:1인 c-axis 배향된 단일상의 $CuInO_2$ 박막임을 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.213-213
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• 2010

We investigated the RF sputtering conditions for the deposition of AZO (Al doped ZnO) transparent conducting film on PET using the roll to roll vacuum coater. AZO thin films, sputtered at the various RF powers and working pressures, were studied for their structural, electrical and optical properties.. From the X-Ray diffraction patterns, we calculated the lattice stress using the Bragg equation. The compressive stress tends to decrease with the increase in film thickness. AZO thin film with the thickness of 152nm (1400W, 0.4Pa) exhibit the resistivity of $3.92*10-3{\Omega}/cm$ and the transmittance of 96.9% at 550nm.

• Proceedings of the KIPE Conference
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• 2008.06a
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• pp.646-648
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• 2008

The multi-films of a metallic film and a transparent conducting oxide (TCO, indium-tin oxide, ITO) film were formed on the stainless steel 316 and 304 plates by a sputtering method and an E-beam method and then the external metallic region of the stainless steel bipolar plates was converted into the metal nitride films through an annealing process. The multi-film formed on the stainless steel bipolar plates showed the XRD patterns of the typical indium-tin oxide, the metallic phase and the metal substrate and the external nitride film. The XRD pattern of the thin film on the bipolar plates modified showed two metal nitride phases of CrN and $Cr_2N$ compound. Surface microstructural morphology of the multi-film deposited bipolar plates was observed by AFM and FE-SEM. The electrical resistivity of the stainless steel bipolar plates modified was evaluated.

• Bulletin of the Korean Chemical Society
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• v.35 no.6
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• pp.1799-1805
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• 2014

In this article, we described about the preparation and electrochemical properties of a flexible energy storage system based on a plastic polyethylene terephthalate (PET) substrate. The PET treated with UV/ozone was fabricated with multilayer films composed of 30 polyaniline (PANi)/graphene oxide (GO) bilayers using layer-by-layer assembly of positively charged PANi and negatively charged GO. The conversion of GO to the reduced graphene oxide (RGO) in the multilayer film was achieved using hydroiodic acid vapor at $100^{\circ}C$, whereby PANi structure remained nearly unchanged except a little reduction of doping state. Cyclic voltammetry and charge/discharge curves of 30 PANi/RGO bilayers on PET substrate (shorten to PANi-$RGO_{30}$/PET) exhibited an excellent volumetric capacitance, good cycling stability, and rapid charge/discharge rates despite no use of any metal current collectors. The specific capacitance from charge/discharge curve of the PANi-$RGO_{30}$/PET electrode was found to be $529F/cm^3$ at a current density of $3A/cm^3$, which is one of the best values yet achieved among carbon-based materials including conducting polymers. Furthermore, the intrinsic electrical resistance of the PANi-$RGO_{30}$/PET electrodes varied within 20% range during 200 bending cycles at a fixed bend radius of 2.2 mm, indicating the increase in their flexibility by a factor of 225 compared with the ITO/PET electrode.