• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.276-276
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• 2014

High-performance, fully-transparent, and top-gated oxide thin-film transistor (TFT) was successfully fabricated with Ta2O5 high-k gate dielectric on a glass substrate. Through a self-passivation with the gate dielectric and top electrode, the top-gated oxide TFT was not affected from H2O and O2 causing the electrical instability. Heat-treated InSnO (ITO) was used as the top and source/drain electrode with a low resistance and a transparent property in visible region. A InGaZnO (IGZO) thin-film was used as a active channel with a broad optical bandgap of 3.72 eV and transparent property. In addition, using a X-ray diffraction, amorphous phase of IGZO thin-film was observed until it was heat-treated at 500 oC. The fabricated device was demonstrated that an applied electric field efficiently controlled electron transfer in the IGZO active channel using the Ta2O5 gate dielectric. With the transparent ITO electrodes and IGZO active channel, the fabricated oxide TFT on a glass substrate showed optical transparency and high carrier mobility. These results expected that the top-gated oxide TFT with the high-k gate dielectric accelerates the realization of presence of fully-transparent electronics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.240-243
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• 1999

(Sr$\sub$0.85/Ca$\sub$0.15/)TiO$_3$thin films were deposited on Pt-coated TiO$_2$/SiO$_2$/Si wafer by the rf sputtering method. Experiments were conducted to investigate the electrical properties of SCT thin films with various top electrode. C-F and C-V measurements show that SCT thin films annnealed at 600$^{\circ}C$ have a larger capacitance than SCT thin films deposited at 400$^{\circ}C$ , and there is nearly no difference between top electrodes. I-V measurement show that Pt top electrode have a good leakage current density of < 10nA/$\textrm{cm}^2$,. making them suitable for DRAM application.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.9 no.3
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• pp.173-178
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• 2009

We have investigated the electrical properties of oxide metal thin film device. The device has been fabricated top-top electrode structure and its transport properties are measured in order to study the resistance change. Electrical properties with linear voltage sweep on a electrodes are used to show the variation of resistance of oxide metal thin film device. Fabricated oxide metal thin film device with MIM structure is changed from a low conductive Off-state to a high conductive On-state by the external linear voltage sweep. The $Si/SiO_2/MgO$ device is switched from a high resistance state to a low resistance state by forming. Consequently, we believe oxide metal is a promising material for a next-generation nonvolatile memory and other electrical applications.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.410-415
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• 1999

$Ba_{1-x}Sr_xTiO_3$ thin films with various ratio of Sr (X = 0.4, 0.5, 0.6) were grown $Pt/TiN/SiO_2/Si$ subastrate by RF magnetron sputtering deposition. As, Ag, and Cu films were deposited on $Ba_{1-x}Sr_xTiO_3$ thin films as top electrodes by using a thermal evaporator. The electrical properties of $Ba_{1-x}Sr_xTiO_3$ thin films for various compositions were characterized and the physical properties at interface between $Ba_{1-x}Sr_xTiO_3$ thin films and top electrodes were evaluated in terms of the work function difference. At x =0.5, the degradation of capacitance is lower to the other compositions. As negative biasapplied, the specimen with Cu top electrode has board saturation region and low leakage current since work function of Cu is bigger than other electrodes.$ Ba_{0.5}Sr_{0.5}TiO_3$ thin films with Cu top electrode, the dielectric constant was measured to the value of 354 at 1 kHz and the leakage current was obtained to the value of $5.26\times10^{-6}A/cm2$ at the forward bias of 2 V.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.458-463
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• 2003

In order to develope piezoelectric transformer for the ballast of fluorescent lamp, a new shape and electrode pattern of piezoelectric transformer has been investigated in this work. The composition of piezoelectric ceramics was 0.95Pb(Zr$_{0.51}$Ti$_{0.49}$)O$_3$+0.03Pb(Mn$_{1}$3/Nb$_{2}$3/)O$_3$+0.02Pb(Sb$_{1}$2/Nb$_{1}$2/)O$_3$. The sample prepared by this composition system showed the characteristics which has about 1200 of relative dielecric constant, 1100 of the mechanical quality factor, 0.53 of the electromechanical coupling coefficient, 320 pC/N of the piezoelectric constant d$_{33}$, 0.3 % of the dissipation factor. Diameter and thickness of disk-type piezoelectric transformer was 45 mm and 4 mm, respectively. The driving and generating electrode with their gap of 1mm were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface ratio of driving and generating part on the top surface ranges from 1.4:1 to 3:1. We investigated the electrical characteristics with the variation of the electrode surface ratio of driving and generating part in the range of load resistance of 100 $\Omega$～70 k$\Omega$. The set-up voltage ratio of this piezoelectric transformer increases with increasing both the electrode surface of driving part and the load resistance. The set-up voltage ratio at no load resistance was more than 60 times. On the other hand, the efficiency decreases with increasing the electrode surface of driving part. In the case of the electrode surface of both 1.4:1 and 2:1, maximum efficiency showed above 97 % at load resistance of 2 k$\Omega$. However, in the case of the electrode surface of 3:1, maximum efficiency showed about 94 % at load resistance of 3 k$\Omega$.>.>.>.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.391-397
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• 2010

This paper proposes a differential structure sensor for detecting Ringer's solution exhaustion, in which three C-type electrodes of 10 mm width are disposed on a ringer hose at a distance of 5 mm each other in the direction of Ringer's solution flow. In the center of middle electrode, two capacitances are formed at the proposed sensor. When ringer hose is filled with Ringer's solution, there is no difference between two capacitances. But capacitance difference exist under the Ringer's solution shortage, because the shortage causes the hose filled with air from the top position electrode. The capacitance difference got to maximum 1.81 pF, when air was filled between top and middle electrode and the last of hose was filled with 10 % dextrose injection Ringer's solution. The capacitance difference varied with hose-wraparound coverage of electrodes as well as the width of them. For hose-wraparound electrode coverage of 90 % and 70 %, the maximum capacitance difference was 1.81 pF and 1.56 pF, respectively. A differential charge amplifier converted the capacitance difference to electric signal, and minimized electrodes' adhering problem and external noise coupling problem.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.5
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• pp.17-22
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• 2005

In this study, a disk-type piezoelectric transformer was fabricated. Its diameter was 50[mm] and thickness was 4.5[mm]. The driving and generating electrode with their gap of 1[mm] were fabricated on the top surface. But the common electrode was fabricated on the whole bottom surface. The electrode surface ratio of driving and generating part on the top surface was the range of 1.4:1 to 3:1. We investigated the electrical characteristics with the variation of its thickness and the electrode surface ratio of driving and generating part in the range of load resistance of 100${[\Omega]}\~70{[k\Omega]}$.. Form the experimental results, their influence on the set-up voltage ratio were investigated quantitively and qualitatively.

• Korean Journal of Materials Research
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• v.32 no.1
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• pp.51-55
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• 2022

Generally, Au electrodes are the preferred top metal electrodes in most perovskite solar cells (PSCs) because of their appropriate work function for hole transportation and their resistance to metal-halide formation. However, for the commercialization of PSCs, the development of alternative metal electrodes for Au is essential to decrease their fabrication cost. Ag electrodes are considered one of the most suitable alternatives for Au electrodes because they are relatively cheaper and can provide the necessary stability for oxidation. However, Ag electrodes require an aging-induced recovery process and react with halides from perovskite layers. Herein, we propose a bilayer Au/Ag electrode to overcome the limitations of single Au and Ag metal electrodes. The performance of PSCs based on bilayer electrodes is comparable to that of PSCs with Au electrodes. Furthermore, by using the bilayer electrode, we can eliminate the aging process, normally an essential process for Ag electrodes. This study not only demonstrates an effective method to substitute for expensive Au electrodes but also provides a possibility to overcome the limitations of Ag electrodes.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.1035-1038
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• 2002

The electrical properties of Porous polycrystalline silicon Nano-Structure (PNS) as a cold cathode were investigated as a function of anodizing condition, the thickness of Au film as a top electrode and the substrate temperature. Non-doped 2${\mu}m$-polycrystalline silicon was electrochemically anodized in HF: ethanol (=1:1) mixture as a function of the anodizing condition including a current density and anodizing time. After anodizing, the PNS was thermally oxidized for 1 hr at 900 $^{\circ}C$. Then, 20nm, 30nm, 45nm thickness of Au films as a top electrode were deposited by E-beam evaporator. Among the PNSs fabricated under the various kinds of anodizing conditions, the PNS anodized at a current density of 10mA/$cm^2$ for 20 sec has the lowest turn-on voltage and the highest emission current than those of others. Also, the electron emission properties were investigated as functions of measuring temperature and the different thickness of Au film as a top-electrode.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.4
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• pp.330-335
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• 2003

This paper reports the optimum structure of the vacuum packaged Porous poly-silicon Nano-Structured (PNS) emitter. The PNS layer was obtained by electrochemical etching process into polycrystalline silicon layer in a process controlled to anodizing condition. Current-voltage studies were carried out to optimize process condition of electron emission properties as a function of anodizing condition and top electrode thickness. Also, we measured in advance the electron emission properties as a function of substrate temperature because the vacuum packaged process was performed under the condition of high temperature ambient (430$^{\circ}C$). Auger Electron Spectrometer (AES) studies shows that Au as a top-electrode was diffused to PNS layer during temperature experiments. Thus, we optimized the thickness of top-electrode in order to make the vacuum package PNS emitter. As a result, the vacuum Packaged PNS emitter was successfully emitted by optimizing process.