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등온 열처리시 알루미늄 다층 박막의 열적 안정성에 관한 연구 (A Study on the Thermal Stability in Multi-Aluminum Thin Films during Isothermal Annealing)

  • 전진호;박정일;박광자;김홍대;김진영
    • 한국표면공학회지
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    • 제24권4호
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    • pp.196-205
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    • 1991
  • Multi-level thin films are very important in ULSI applications because of their high electromigration resistance. This study presents the effects of titanium, titanium nitride and titanium tungsten underlayers of the stability of multi-aluminum thin films during isothermal annealing. High purity Al(99.999%) films have been electron-beam evaporated on Ti, TiN, TiW films formed on SiO2/Si (P-type(100))-wafer substrates by RF-sputtering in Ar gas ambient. The hillock growth was increased with annealing temperatures. Growth of hillocks was observed during isothermal annealing of the thin films by scanning electron microscopy. The hillock growth was believed to appear due to the recrystallization process driven by stress relaxation during isothermal annealing. Thermomigration damage was also presented in thin films by grain boundary grooving processes. It is shown that underlayers of Al/TiN/SiO2, Al/TiW/SiO2 thin films are preferrable to Al/SiO2 thin film metallization.

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The determination of effect of TiO2 on dynamic behavior of scaled concrete structure by OMA

  • Tuhta, Sertac
    • Advances in nano research
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    • 제11권6호
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    • pp.641-648
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    • 2021
  • In this article, the dynamic parameters (frequencies, mode shapes, damping ratios) of the scaled concrete structure and the dynamic parameters (frequencies, mode shapes, damping ratios) of the entire outer surface of titanium dioxide, 80 micron in thickness are compared using operational modal analysis method. Ambient excitation was provided from micro tremor ambient vibration data on ground level. Enhanced Frequency Domain Decomposition (EFDD) was used for the output only modal identification. From this study, a good correlation between mode shapes was found. Titanium dioxide applied to the entire outer surface of the scaled concrete structure has an average of 11.78% difference in frequency values and 10.15% in damping ratios, proving that nanomaterials can be used to increase rigidity in structures, in other words, for reinforcement. Another important result determined in the study was the observation of the adherence of titanium dioxide and similar nanomaterials mentioned in the introduction to concrete structure surfaces was at the highest level.

The determination of effect of TiO2 on dynamic behavior of scaled WPC warehouse by OMA

  • Tuhta, Sertac
    • Advances in nano research
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    • 제12권1호
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    • pp.65-72
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    • 2022
  • The dynamic properties (frequencies, mode shapes, damping ratios) of the scaled WPC warehouse are compared using the operational modal analysis approach to the dynamic parameters (frequencies, mode shapes, damping ratios) of the full outer surface of titanium dioxide, 70 micron in thickness. Micro tremor ambient vibration data on ground level was used to provide ambient excitation. For the output-only modal identification, Enhanced Frequency Domain Decomposition (EFDD) was used. This study discovered a strong correlation between mode shapes. Titanium dioxide applied to the entire outer surface of the scaled WPC warehouse results in an average 14.05 percent difference in frequency values and 7.61 percent difference in damping ratios, demonstrating that nanomaterials can be used to increase rigidity in structures, or for reinforcement. Another significant finding in the study was the highest level of adherence of titanium dioxide and similar nanomaterials mentioned in the introduction to WPC structure surfaces.

A STUDY ON MECHANICAL PROPERTIES OF TiN, ZrN AND WC COATED FILM ON THE TITANIUM ALLOY SURFACE

  • Oh, Dong-Joon;Kim, Hee-Jung;Chung, Chae-Heon
    • 대한치과보철학회지
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    • 제44권6호
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    • pp.740-750
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    • 2006
  • Statement of problems. In an attempt to reduce screw loosening, dry lubricant coatings such as pure gold or tefron have been applied to the abutment screw. However, under repeated tightening and loosening procedures, low wear resistance and adhesion strength of coating material produced free particles on the surface of abutment screw and increased frictional resistance resulting in screw tightening problems. Purpose. The aim of this study was to compare friction coefficient, adhesion strength, vickers hardness and evaluate coating surface of titanium alloy specimens coated with TiN(titanium nitride), ZrN(zirconium nitride) and WC(tungsten carbide). Material and method. Titanium alloy(Ti-6Al-4V) discs of 12mm in diameter and 1mm in thickness divided into 4 groups. TiN, ZrN and WC was coated for the specimens of 3 groups respectively, and those of 1 group were not coated. Each group was made up of 4 specimens. In this study, sputtering method was used among the PVD(Physical Vapor Deposition) techniques available for TiN, ZrN and WC coatings. Friction coefficient, adhesion strength, vickers hardness and coating surface of 4 groups were measured. Results. 1. For all three coating conditions, friction coefficient was significantly decreased. Especially, ZrN coated surface showed the lowest value. $TiN(0.39{\pm}0.02)$, $ZrN(0.24{\pm}0.01)$, $WC(0.31{\pm}0.03)$. 2. TiN coating showed the highest adhesion strength, however ZrN coating had the lowest value. $TiN(25.3N{\pm}1.6)$, $ZrN(14.8N{\pm}0.6)$, $ WC(18.4N{\pm}0.7)$. 3. Vickers hardness of all three coatings was remarkably increased as compared with that of none coated specimen. TiN coating had the highest Vickers hardness, however WC coating showed the lowest value. $TiN(1865.2{\pm}33.8)$, $ZrN(1814.4{\pm}18.6)$, $WC(1008.5{\pm}35.9)$. 4. The ZrN or WC coated specimen showed a homogeneous and smooth surface, however the rough surface with defects was observed for TiN coating. Conclusions. When TiN, ZrN and WC coating applied to the abutment screw, frictional resistance would be reduced, as a result, the greater preload and prevention of the screw loosening could be expected.

Titanium Implant의 Removal Torque에 관한 연구 (A STUDY ON THE REMOVAL TORQUE OF TITANIUM IMPLANTS)

  • 이준석;김영수;김창회
    • 대한치과보철학회지
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    • 제32권1호
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    • pp.148-169
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    • 1994
  • The concept of biologic attachment of load-bearing implants has developed over the past decades as an alternative to the difficulties associated with long term implantation using mechanical fixation and bone cement. The choice of implant material is also as critical an element as site preparation or insertion procedure. The properties of implants that affect host tissue responses are not limited to chemical composition alone, but also include shape, surface characteristics, site of implantation, and mechanical interaction with host tissues. Initial mechanical interlocking prevents micromotion and may be a prerequisite for direct bone apposition. A hard tightening of screws does not necessarily mean a stronger fixation and final tightening of the fixtures is dependent on the experience of the operator. Removal torque is lower than insertion torque. The purpose of this study was to investigate differences in the removal torques at the bone-implant interface of polished and sandblasted Titanium. This experiment will give insight into important factors that must be considered when interpreting in vivo screwing forces on implants during the connection of the transmucosal abutments. We evaluated the significance of different surface textures by comparison of the withdrawal forces necessary for removal of otherwise identical rough and polished implants of Titanium and also evaluated interfacial response on the light microscopic level to implant surface. And the priority of the area of insertion on osseointegration were evaluated. 9 Titanium implants - among them, 3 were for the developmental - of either a smooth or rough surface finish were inserted in the dog mandible in the right side. 3 months later Kanon Torque Gauge was used to unscrew the implants. The results were as follows : 1. No significant difference was seen in the removal torque due to variation in surface treatment, 23 Ncm for the sandblasted and 23.33 Ncm for the polished surface (p>0.05). 2. Implants in the anterior (25 Ncm) mandible showed better resistance to unscrewing in comparison to ones in the posterior (18 Ncm) region (p<0.05). 3. Developmental fixtures (22 Ncm) had similar pullout strength to the control group (p>0.05).

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A TISSUE RESPONSE TO THE TITANIUM ALLOY (Ti-13Zr-6Nb) IN VIVO

  • Kim Chang-Su;Lee Seok-Hyung;Shin Sang-Wan;Suh Kyu-Won;Ryu Jae-Jun
    • 대한치과보철학회지
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    • 제42권6호
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    • pp.619-627
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    • 2004
  • Statement of problem. Mechanisms of tissue-implant interaction and the effect of the implant surface on the behavior of cells has not yet been clarified. Purpose. This study was performed to investigate the tissue reaction to the titanium alloy submerged into rat peritoneum in vivo. Materials and methods. Titanium alloys (titanium-13Zirconium-6Niobium) were inserted inside the peritoneal cavity of Sprague Dawley rats. After 3 months, the tissue formed around the inserted titanium alloys were examined with a light-microscope. Tissue reaction around the material was analyzed by confocal microscopy to evaluate their biocompatibility in a living body. Results. In in vivo study, foreign body type multinucleated giant cells were found in the fibrous tissue formed as a reaction to the foreign material (4 in 20 cases), but the inflammatory reaction was very weak. After experiment, the contaminants of biomaterials was removed from living tissue. In confocal microscopy, we observed that the staining of vinculin and actin showed mixed appearance. In a few cases, we found that the staining of vinculin and beta-catenin showed the prominent appearance. Conclusion. We found that titanium-13Zirconium-6Niobium alloy was an excellent biomaterial.

Research on residual stress in SiCf reinforced titanium matrix composites

  • Qu, Haitao;Hou, Hongliang;Zhao, Bing;Lin, Song
    • Steel and Composite Structures
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    • 제17권2호
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    • pp.173-184
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    • 2014
  • This study aimed to theoretical calculate the thermal residual stress in continuous SiC fiber reinforced titanium matrix composites. The analytical solution of residual stress field distribution was obtained by using coaxial cylinder model, and the numerical solution was obtained by using finite element model (FEM). Both of the above models were compared and the thermal residual stress was analyzed in the axial, hoop, radial direction. The results indicated that both the two models were feasible to theoretical calculate the thermal residual stress in continuous SiC fiber reinforced titanium matrix composites, because the deviations between the theoretical calculation results and the test results were less than 8%. In the titanium matrix composites, along with the increment of the SiC fiber volume fraction, the longitudinal property was improved, while the equivalent residual stress was not significantly changed, keeping the intensity around 600 MPa. There was a pronounced reduction of the radial residual stress in the titanium matrix composites when there was carbon coating on the surface of the SiC fiber, because carbon coating could effectively reduce the coefficient of thermal expansion mismatch between the fiber and the titanium matrix, meanwhile, the consumption of carbon coating could protect SiC fibers effectively, so as to ensure the high-performance of the composites. The support of design and optimization of composites was provided though theoretical calculation and analysis of residual stress.

Characteristics of a Titanium-oxide Layer Prepared by Plasma Electrolytic Oxidation for Hydrogen-ion Sensing

  • Lee, Do Kyung;Hwang, Deok Rok;Sohn, Young-Soo
    • 센서학회지
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    • 제28권2호
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    • pp.76-80
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    • 2019
  • The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer's capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOS-FET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.

A STUDY ON THE RESPONSES OF OSTEOBLASTS TO VARIOUS SURFACE-TREATED TITANIUM

  • Lee Joung-Min;Kim Yung-Soo;Kim Chang-Whe;Jang Kyung-Soo;Lim Young-Jun
    • 대한치과보철학회지
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    • 제42권3호
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    • pp.307-326
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    • 2004
  • Statement of problem. The long-term success of implants is the development of a stable direct connection between bone and implant surface, which must be structural and functional. To improve a direct implant fixation to the bone, various strategies have been developed focusing on the surface of materials. Among them, altering the surface properties can modify cellular responses such as cell adhesion, cell motility and bone deposition. Purpose. This study was to evaluate the cellular behaviors on the surface-modified titanium by morphological observation, cellular proliferation and differentiation. Material and methods. Specimens were divided into five groups, depending on their surface treatment: electropolishing(EP) anoclizing(AN), machining(MA), blasting with hydroxyapatite particle(RBM) and electrical discharge machining(EDM). Physicochemical properties and microstructures of the specimens were examined and the responses of osteoblast-like cells were investigated. The microtopography of specimens was observed by scanning electron microscopy(SEM). Surface roughness was measured by a three-dimensional roughness measuring system. The microstructure was analyzed by X-ray diffractometer(XRD) and scanning auger electron microscopy(AES). To evaluate cellular responses to modified titanium surfaces, osteoblasts isolated from neonatal rat were cultured. The cellular morphology and total protein amounts of osteoblast-like cell were taken as the marker for cellular proliferation, while the expression of alkaline phosphatase was used as the early differentiation marker for osteoblast. In addition, the type I collagen production was determined to be a reliable indicator of bone matrix synthesis. Results. 1. Each prepared specimen showed specific microtopography at SEM examination. The RBM group had a rough and irregular pattern with reticulated appearance. The EDM-treated surface had evident cracks and was heterogeneous consisting of broad sheet or plate with smooth edges and clusters of small grains, deep pores or craters. 2. Surface roughness values were, from the lowest to the highest, electropolished group, anodized group, machined group, RBM group and EDM group. 3. All groups showed amorphous structures. Especially anodized group was found to have increased surface oxide thickness and EDM group had titaniumcarbide(TiC) structure. 4. Cells on electropolished, anodized and machined surfaces developed flattened cell shape and cells on RBM appeared spherical and EDM showed both. After 14 days, the cells cultured from all groups were formed to be confluent and exhibited multilayer proliferation, often overlapped or stratified. 5. Total protein amounts were formed to be quite similar among all the group at 48 hours. At 14 days, the electropolished group and the anodized group induced more total protein amount than the RBM group(P<.05). 6. There was no significant difference among five groups for alkaline phosphatase(ALP) activity at 48 hours. The AN group showed significantly higher ALP activity than any other groups at 14 days(P<.05). 7. All the groups showed similar collagen synthesis except the EDM group. The amount of collagen on the electropolished and anodized surfaces were higher than that on the EDM surface(P<.05).

EF-TEM 직접가열 실험을 통한 titanium의 고온 상전이 연구 (A Study of Titanium Phase Transition through In-situ EF-TEM Heating Experiments)

  • 김진규;이영부;김윤중
    • Applied Microscopy
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    • 제33권1호
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    • pp.49-58
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    • 2003
  • EF-TEM 직접가열 실험을 통하여 titanium의 ${\alpha}-{\beta}$상전이를 연구하였다. 통계적 오차를 줄이기 위해 서로 다른 3군데의 titanium foil의 영역을 관찰하였고, 각각의 영역에 대해 단계별로($RT{\rightarrow}600{\rightarrow}900{\rightarrow}RT$) 회절패턴과 이미지를 기록하였다. 이 연구를 통해 얻은 결과는 다음과 같다. (1) Titanium은 $900^{\circ}C$에서 급격히 상전이가 진행된다. 이 온도에서는 ${\alpha}$${\beta}$-상이 같이 존재한다. (2) 상전이가 일어난 ${\beta}$-상의 영역은 쌍정구조를 가진 plate 형태로 나타나며, 그들은 서로 상호 회전 배열되어 있다. (3) 전자회절도형과 EDS 분석 결과, $600^{\circ}C$ 이상의 가열에서는 열적 산화에 의해 Ti의 산화물이 표면에서 생성되기 시작하며 이들은 냉각 시 Ti의 ${\beta}{\rightarrow}{\alpha}$ 가역 상전이를 저해한다.