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http://dx.doi.org/10.5369/JSST.2019.28.2.76

Characteristics of a Titanium-oxide Layer Prepared by Plasma Electrolytic Oxidation for Hydrogen-ion Sensing  

Lee, Do Kyung (Department of Advanced Material Science and Chemical Engineering, Daegu Catholic University)
Hwang, Deok Rok (Department of Advanced Material Science and Chemical Engineering, Daegu Catholic University)
Sohn, Young-Soo (Department of Biomedical Engineering, Daegu Catholic University)
Publication Information
Journal of Sensor Science and Technology / v.28, no.2, 2019 , pp. 76-80 More about this Journal
Abstract
The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer's capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOS-FET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.
Keywords
Titanium oxide; Plasma electrolytic oxidation; Extended gate field effect transistor; Hydrogen ion sensing;
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