• 제목/요약/키워드: thin film filter

검색결과 135건 처리시간 0.033초

SAW 필터용 ZnO 압전 박막의 전기적 특성 (Electrical Characteristics of ZnO Piezo-electric Thin film for SAW filter)

  • 이동윤;윤석진
    • 한국전기전자재료학회논문지
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    • 제18권10호
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    • pp.909-916
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    • 2005
  • The structural and electrical property of RF magnetron sputtered ZnO thin film have been studied as a function of RF power, substrate temperature, oxygen/argon gas ratio and film thickness at constant sputtering power, sputtering working pressure and target-substrate distance. To analyze a crystallo-graphic properties of the films, $\theta$/2$\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity and surface roughness highly depended on oxygen/argon gas ratio. The resistivity of ZnO thin film(6000 ${\AA}$) rapidly increased with increasing oxygen ratio and the resistivity value of $9 {\ast} 10^7 {\Omega}cm$ was obtained at a working pressure of 10 mTorr with the same oxygen/argon gas ratio. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with the same oxygen/argon gas ratio showed the excellent roughness value of 28.7 ${\AA}$. With increase of the substrate temperature, The C-axis preferred orientation of ZnO thin film increases and the resistivity decreases due to deviation from the stoichiometric ZnO due to oxygen deficiency.

박막 광학 필터 디바이스의 패키징시 솔더 조인트의 피로 신뢰성 해석 (Thermal Fatigue Reliability of Solder Joints in a Thin Film Optical Filter Device)

  • 이성철;현충민;이형만;김명진;김회경;김기태
    • 대한기계학회논문집A
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    • 제28권6호
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    • pp.677-684
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    • 2004
  • Plastic and creep deformations of solder joints during thermal cycling are the main factors of misalignments and power losses in optical telecommunication components. Furthermore, the increased mismatch between solder Joint-bonded areas may cause severe failure in the components. Darveaux's creep model was implemented into a finite element program (ABAQUS) to simulate creep response of solder. Based on the finite element results, thermal fatigue reliability was predicted by using various fatigue life prediction models. Also, the effects of ramp conditions, dwelling time, and solder joint-embedding materials on the reliability were investigated under the thermal cycling conditions of the Telcordia schedule (-40∼75$^{\circ}C$).

포물선형 혼 도파관을 이용한 탄성 표면파 콘벌버 연구 (A Study for the SAW Convolver Using Parabolic Horn Waveguide)

  • 박용욱;신현용;이승대;박정흠;윤석진;김현재
    • 한국전기전자재료학회논문지
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    • 제14권11호
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    • pp.947-952
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    • 2001
  • In this paper, a wideband SAW convolver using a parabolic horn waveguide was designed and its characteristics were investigated. The convolver was made with parabolic horn waveguide at compression ratio 9:1 for reducing propagation loss and for improving convolution efficiency between two input IDTs of center frequency 193.78 ㎒. The SAW convolver utilizing acoustic nonlinearities of piezoelectric material demonstrated that it can provide large S/N ratio and can be use for programmable matched filter(PMF) in spread spectrum communication system.

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SAW Filter용 ZnO 박막의 제작 (Preparation of ZnO thin film for SAW filter)

  • 성하윤;양진석;금민종;손인환;김경환
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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    • pp.509-510
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    • 2000
  • Piezoelectric ZnO thin films were deposited on slide glass by Facing Targets Sputtering(FTS). The Facing Targets Sputtering system can deposit thin film in plasma-free situation and change the deposition condition in wide range. The characteristics of zinc oxide thin films on power, working pressure, and substrate temperature were investigated by XRD (x-ray diffractometer), alpha-step (Tencor) and SEM (Scanning Electron Microscopy) analyses. In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin films with good c-axis orientation.

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Effects of Photon Energy Spectrum on the Photocurrent of Hydrogenated Amorphous Silicon Thin Film Transistor by Using Frequency Filters

  • Cho, Eou Sik;Kwon, Sang Jik
    • Transactions on Electrical and Electronic Materials
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    • 제14권1호
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    • pp.16-19
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    • 2013
  • Frequency filters with various filtering wavelengths were used in the photoelectric characterization of hydrogenated amorphous silicon thin film transistor (a-Si:H TFT) and the experimental results were described and analyzed in terms of the photon energy spectral characteristics calculated from the integration of the photon energy and the spectral intensity of transmitted backlight through the filters at each wavelength. From the comparison of the photocurrents and the calculated photon energy spectrums for the filtered ranges of wavelength, it was possible to conclude that the photocurrents are closely related to the photon energy spectrums of the backlight.

반응성 스퍼트링에 의한 ITO의 형성과 유전체 소성공정중의 특성변화에 관한 연구 (The Effect of Dielectric Firing Process in PDP on the Properties of ITO Prepared by Reactive RF Sputtering)

  • 남상옥;지성원;손제봉;조정수;박정후
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.510-514
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    • 1997
  • The thin film that is electrically conductive and optically transparent is called conductive transparent thin film. ITO(Indium-Tin Oxide) which is a kind of conductive transparent thin film has been widely used in solar cell, transparent electrical heater, selective optical filter, FDP(Flat Display Panel) such as LCD(Liquid Crystal Display), PDP(Plasma Display Panel) and so on. Especially in PDP, ITO films is used as a transparent electrode in order to maintain discharge and decrease consumption power through the improvement of cell structure. In this study, we prepared ITO by reactive r.f. sputtering with indium-tin(Sn 10wt%) alloy target instead of indium-tin oxide target. The ITO films deposited at low temperature 15$0^{\circ}C$ and 8% $O_2$. Partial pressure showed about 3.6 Ω/$\square$. At the end of firing, the resistance of ITO was decreased, the optical transparence was improved above 90%.

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RF Integrated Electromagnetic-Noise Filters Incorporated with Nano-granular Co41Fe38AI13O8 Soft Magnetic Thin Films on Coplanar Transmission Line

  • Sohn, Jae-Cheon;Yamaguchi Masahiro;Lim, Sang-Ho;Han, Suk-Hee
    • Journal of Magnetics
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    • 제10권4호
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    • pp.163-170
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    • 2005
  • The RF integrated noise filters are fabricated by photolithography. The stack for the electromagnetic noise filters consists of the nano-granular ($Co_{41}Fe_{38}AI_{13}O_8$) soft magnetic film / $SiO_2$ / Cu transmission line / seed layer (Cu/Ti) / $SiO_2$-substrate. A good signal-attenuation feature along with a low signal-reflection feature is observed in the present filters. Especially in the noise filter incorporated with a $Co_{41}Fe_{38}AI_{13}O_8$ magnetic film with lateral dimensions of $2000{\mu}m$ wide, 15 mm long and $1{\mu}m$ thick, the maximum magnitude of signal attenuation reaches -55 dB, and the magnitude of signal reflection is below -10 dB in the overall frequency range. And this level of signal attenuation is much larger than that of a noise filter incorporated with a Fe magnetic film.

Design and Simulation of Tunable Bandpass Filters Using Ferroelectric Films for Wireless Communication Systems

  • Mai Linh;Dongkyu Chai;Tuan, Le-Minh;Giwan Yoon
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 춘계종합학술대회
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    • pp.523-526
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    • 2002
  • This paper presents the simulation of Au / $Ba_{x}$S $r_{1-x}$ Ti $O_3$(BSTO) / Magnesium oxide (MgO) multi-layered and electrically tunable band-pass filters (BPFs) by using high frequency structure simulator (HFSS). This model is a two-pole microstrip edge coupled filter. The filter was designed fur a center frequency about 5.8 GHz. The tunabillity of the filter is achieved using the nonlinear dc electric-field dependence on the relative dielectric constant of BSTO frroelectric thin film. This work seems very promising for future wireless communication systems....

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