Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.11c
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- Pages.509-510
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- 2000
Preparation of ZnO thin film for SAW filter
SAW Filter용 ZnO 박막의 제작
- Seong, H.Y. (Kyungwon Univ.) ;
- Yang, J.S. (Kyungwon Univ.) ;
- Keum, M.J. (Kyungwon Univ.) ;
- Son, I.H. (Shinsung college) ;
- Kim, K.H. (Kyungwon Univ.)
- 성하윤 (경원대학교 전기전자공학부) ;
- 양진석 (경원대학교 전기전자공학부) ;
- 금민종 (경원대학교 전기전자공학부) ;
- 손인환 (신성대학 전기과) ;
- 김경환 (경원대학교 전기전자공학부)
- Published : 2000.11.25
Abstract
Piezoelectric ZnO thin films were deposited on slide glass by Facing Targets Sputtering(FTS). The Facing Targets Sputtering system can deposit thin film in plasma-free situation and change the deposition condition in wide range. The characteristics of zinc oxide thin films on power, working pressure, and substrate temperature were investigated by XRD (x-ray diffractometer), alpha-step (Tencor) and SEM (Scanning Electron Microscopy) analyses. In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin films with good c-axis orientation.
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