Dependences of Various Substrate Temperature on the Structural and Electrical Properties of ZnO Thin Films deposited by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법으로 증착한 ZnO 박막의 증착온도에 따른 구조 및 전기적 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.20 no.11
- /
- pp.965-968
- /
- 2007