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A Study on the Electrical Properties of Thin Film Type Humidity Sensor (박막형 습도센서의 전기적 특성에 대한 연구)

  • You, Do-Hyun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.6
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    • pp.1012-1016
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    • 2008
  • [ $TiO_2-V_2O_5$ ] sol was fabricated using sol-gel method and $TiO_2-V_2O_5$ thin films were fabricated using dip-coating method. $V_2O_5$ sol was added 0.01mole, 0.03mole, 0.05mole into $TiO_2$ sol. As a results of crystalline properties, $V_2O_5$ peaks were not found in spite of $V_2O_5$ additive. Thickness of thin films increased $0.1{\sim}0.25{\mu}m$ every a dipping. Capacitance of thin films increased with increasing heat treatment temperature and it increased largest at $700^{\circ}C$. Capacitance of thin films decreased with increasing $V_2O_5$ additive and it increased largest at 0.01mole. Because adsorption time and desorption time of thin films was about 2 minutes 40 seconds and about 3 minutes 40 seconds respectively, adsorption time was faster about 1 minutes than desorption time.

Characteristics of As-doped ZnO thin films with various buffer layer temperatures prepared by PLD method (PLD법을 이용한 Buffer Layer 증착온도에 따른 As-doped ZnO 박막의 특성)

  • Lee, Hong-Chan;Shim, Kwang-Bo;Oh, Young-Jei
    • Journal of Sensor Science and Technology
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    • v.15 no.2
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    • pp.84-89
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    • 2006
  • Highly concentrated p-type ZnO thin films can be obtained by doping of N, P and As elements. In this study, undoped ZnO buffer layers were prepared on a (0001) sapphire substrate by a ultra high vaccum pulsed laser deposition(UHV-PLD) method. ZnO buffer layers were deposited with various deposition temperature($400{\sim}700^{\circ}C$) at 350 mtorr of oxygen working pressure. Arsenic doped(1 wt%) ZnO thin films were deposited on the ZnO buffer layers by UHV-PLD. Crystallinity of the samples were evaluated by X-ray diffractometer and scanning electron microscopy. Optical, electrical properties of the ZnO thin films were estimated by photoluminescence(PL) and Hall measurements. The optimal condition of the undoped ZnO buffer layer for the deposition of As-doped ZnO thin films was at $600^{\circ}C$ of deposition temperature.

Thin film solar cell efficiency improvement using the surface plasmon effect (표면 플라즈몬 효과를 이용한 박막형 태양전지 효율향상)

  • Byun, Soo-Hwan;Soh, Hyun-Jun;Yoo, Jeong-Hoon
    • Transactions of the Society of Information Storage Systems
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    • v.8 no.2
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    • pp.39-43
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    • 2012
  • In spite of many advantages, the practical application of the thin film solar cell is restricted due to its low efficiency compared with the bulk type solar cells. This study intends to adopt the surface plasmon effect using nano particles to solve the low efficiency problem in thin film solar cells. By inserting Ag nano-particles in the absorbing layer of a thin film solar cell, the poynting vector value of the absorbing layer is increased due to the strong energy field. Increasing the value may give thin film solar cells chance to absorb more energy from the incident beam so that the efficiency of the thin film solar cell can be improved. In this work, we have designed the optimal shape of Ag nano-particle in the absorbing laser of a basic type thin film solar cell using the finite element analysis commercial package COMSOL. Design parameters are set to the particle diameter and the distance between each Ag nano-particle and by changing those parameters using the full factorial design variable set-up, we can determine optimal design of Ag nano-particles for maximizing the poynting vector value in the absorbing layer.

Surface Analysis of Copper-Tin Thin Films Synthesized by rf Magnetron Co-sputtering

  • Gang, Yu-Jin;Park, Ju-Yeon;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.272.2-272.2
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    • 2016
  • Copper-Tin (CuSn) thin films were synthsized by rf magnetron co-sputtering method with pure Cu and Sn metal targets with various rf powers and sputtering times. The obtained CuSn thin films were characterized by a surface profiler (alpha step), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), and contact angle measurement. The deposition rates were calculated by the thickness of CuSn thin films and sputtering times. We observed hexagonal Cu20Sn6 and cubic Cu39Sn11 phases from the films by XRD measurement. From the survey XPS spectra, the Cu and Sn main peaks were observed. Therefore, we could conclude CuSn thin films were successfully fabricated on the substrate in this study. The changes of oxidation states and chemical environment of the films were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. Surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG) using the contact angle measurement. The total SFE of CuSn thin films decreased as rf power on Cu target increased. The contribution to the total SFE of dispersive SFE was relatively superior to polar SFE.

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Characterization of zinc tin oxide thin films by UHV RF magnetron co-sputter deposition

  • Hong, Seunghwan;Oh, Gyujin;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.307.1-307.1
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    • 2016
  • Amorphous zinc tin oxide (ZTO) thin films are being widely studied for a variety electronic applications such as the transparent conducting oxide (TCO) in the field of photoelectric elements and thin film transistors (TFTs). Thin film transistors (TFTs) with transparent amorphous oxide semiconductors (TAOS) represent a major advance in the field of thin film electronics. Examples of TAOS materials include zinc tin oxide (ZTO), indium gallium zinc oxide (IGZO), indium zinc oxide, and indium zinc tin oxide. Among them, ZTO has good optical and electrical properties (high transmittance and larger than 3eV band gap energy). Furthermore ZTO does not contain indium or gallium and is relatively inexpensive and non-toxic. In this study, ZTO thin films were formed by UHV RF magnetron co-sputter deposition on silicon substrates and sapphires. The films were deposited from ZnO and SnO2 target in an RF argon and oxygen plasma. The deposition condition of ZTO thin films were controlled by RF power and post anneal temperature using rapid thermal annealing (RTA). The deposited and annealed films were characterized by X-ray diffraction (XRD), atomic force microscope (AFM), ultraviolet and visible light (UV-VIS) spectrophotometer.

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Properties of IZTO Thin Films on Glass with Different Thickness of SiO2 Buffer Layer

  • Park, Jong-Chan;Kang, Seong-Jun;Yoon, Yung-Sup
    • Journal of the Korean Ceramic Society
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    • v.52 no.4
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    • pp.290-293
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    • 2015
  • The properties of the IZTO thin films on the glass were studied with a variation of the $SiO_2$ buffer layer thickness. $SiO_2$ buffer layers were deposited by plasma-enhanced chemical vapor deposition (PECVD) on the glass, and the In-Zn-Tin-Oxide (IZTO) thin films were deposited on the buffer layer by RF magnetron sputtering. All the IZTO thin films with the $SiO_2$ buffer layer are shown to be amorphous. Optimum $SiO_2$ buffer layer thickness was obtained through analyzing the structural, morphological, electrical, and optical properties of the IZTO thin films. As a result, the IZTO surface roughness is 0.273 nm with a sheet resistance of $25.32{\Omega}/sq$ and the average transmittance is 82.51% in the visible region, at a $SiO_2$ buffer layer thickness of 40 nm. The result indicates that the uniformity of surface and the properties of the IZTO thin film on the glass were improved by employing the $SiO_2$ buffer layer and the IZTO thin film can be applied well to the transparent conductive oxide for display devices.

A Study of Injection Mold Manufacturing for Ultra-Thin Walled Plate (초박판 사출성형특성 분석을 위한 금형제작에 관한 연구)

  • Lee, Sung-Hee;Ko, Young-Bae;Lee, Jong-Won;Kim, Sung-Kyu;Yang, Jin-Suk;Heo, Young-Moo
    • Design & Manufacturing
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    • v.2 no.5
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    • pp.11-15
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    • 2008
  • A micro-injection mold for ultra-thin-walled plate was considered in this work. The proposed mold system is for the fabrication of ultra-thin walled plastic plate with micro features by injection molding. As the injection molding of thin-walled plastic, which has the thickness under $400{\mu}m$, itself is not easy, the injection molding of the micro-features in the thin-walled structure is more complicated and difficult. To investigate the basic phenomenon of the ultra-thin walled part during the injection molding process, design of the part and mold system were performed in the present study. The injection molding and structural analysis of the suggested part and mold system were also performed. Consequently, injection molding system for ultra-thin walled plate with micro features were manufactured and presented.

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High-Luminous Efficiency Full-Color Emitting $GdVO_4$:Eu, Er, Tm Phosphor Thin Films

  • Minami, Takatsugu;Miyata, Toshihiro;Mochizuki, Yuu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.1091-1094
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    • 2004
  • High-luminous efficiency full-color emissions in photoluminescence (PL) were obtained in $GdVO_4$ phosphor thin films co-doped with various amounts of Eu, Er and/or Tm and postannealed at approximately 1000$^{\circ}C$. The $GdVO_4$:Eu,Er,Tm phosphor thin films were deposited on thick $BaTiO_3$ ceramic sheets by r.f. magnetron sputtering using powder targets and postannealed in an air atmosphere. The rare earth (RE) content (RE/(Gd+V+RE) atomic ratio) in the oxide phosphor thin films was varied in the range from 0.1 to 2 at.%. It was found that the excitation of $GdVO_4$:Eu.Er,Tm thin films is attributed to band-to-band transition. A white PL emission was obtained in a $GdVO_4$:Eu,Er,Tm thin film with Eu, Er and Tm contents of 0.2, 0.7 and 1 at.%, respectively: CIE chromaticity color coordinates. (X=0.352 and Y=0.351). In addition, a white emission was obtained in a thin-film electroluminescent (TFEL) device made with this thin film.

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Gradational Double Annealing Process for Improvement of Thermal Characteristics of NiCr Thin Films (NiCr 박막의 발열 특성 개선을 위한 순차적 이중 열처리 방법 연구)

  • Kwon, Yong;Noh, Whyo-Sup;Kim, Nam-Hoon;Cho, Dong-You;Park, Jinseong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.8
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    • pp.714-719
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    • 2005
  • NiCr thin film was deposited by DC magnetron sputtering on $A;_2O_3$/Si substrate with NiCr (80:20) alloy target. NiCr thin films were annealed at $300^{\circ}C,\;400^{\circ}C,\;500^{\circ}C,\;600^{\circ}C,\;and\;700^{\circ}C$ for 6 hr in $H_2$ after annealing at $500^{\circ}C$ for 6hr in air atmosphere, respectively. To analyze NiCr thin film properties, the changes of its micro structure were Investigated through field emission scanning electron microscope (FESEM). X-ray photoelectron spectroscopy (XPS) was used to analyze a surface of NiCr thin film. Resistance of NiCr thin film was measured by 4-point probe technique. The generated heats were measured by infrared thermometer through the application of DC voltage (5 V/l2 V). NiCr thin film treated by gradational double annealing process had uniform and small grains. Maximum temperature generated heat by NiCr micro heater was $173^{\circ}C$. We expect that our results will be a useful reference in the realization of NiCr micro heater.

Effects of Somatotype Characteristics on Body Temperature Control Reaction & Thermal Sensation (체형특성(體型特性)이 체온조절반응(體溫調節反應) 및 온열쾌적감(溫熱快適感)에 미치는 영향(影響))

  • Shim, Boo-Ja;Yoo, Hyun
    • Journal of Fashion Business
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    • v.7 no.1
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    • pp.27-37
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    • 2003
  • This study is the first part of the research to reveal the effects of somatotype characteristics on body temperature control reaction as well as thermal sensation. Nine healthy female collegians (classified into 3 body types of thin, normal, and obese according to Rohrer index) living in Busan were chosen as the subjects. The following are the results: Significant differences of skin temperature appeared in the parts of epigastrium (thin/normal>obese), anterior forearm (normal>thin/obese), and anterior leg (obese > thin/normal) as well as mean skin temperature. Mean skin temperature temporarily dropped owing to the exercise but tended to recover as time went by. Skin temperature of normal/thin shows higher than obese type. The change of skin temperature was noticed in the order of forehead > epigastrium > anterior forearm > anterior leg > anterior thigh (obese type) ; epigastrium > forehead > anterior forearm > anterior thigh > anterior leg (normal type) ; epigastrium > forehead > anterior forearm > anterior thigh > anterior leg (thin type, before and after exercise); epigastrium > forehead > anterior forearm > anterior leg > anterior thigh (thin type, during exercise). Significant differences were shown in the temperature change inside clothes according to somatotypes. No significant differences were revealed in thermal sensation, moisture sensation, and comfortable sensation according to body types and time.