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A Study on the Electrical Properties of Thin Film Type Humidity Sensor  

You, Do-Hyun (안산공과대학 전기과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.57, no.6, 2008 , pp. 1012-1016 More about this Journal
Abstract
[ $TiO_2-V_2O_5$ ] sol was fabricated using sol-gel method and $TiO_2-V_2O_5$ thin films were fabricated using dip-coating method. $V_2O_5$ sol was added 0.01mole, 0.03mole, 0.05mole into $TiO_2$ sol. As a results of crystalline properties, $V_2O_5$ peaks were not found in spite of $V_2O_5$ additive. Thickness of thin films increased $0.1{\sim}0.25{\mu}m$ every a dipping. Capacitance of thin films increased with increasing heat treatment temperature and it increased largest at $700^{\circ}C$. Capacitance of thin films decreased with increasing $V_2O_5$ additive and it increased largest at 0.01mole. Because adsorption time and desorption time of thin films was about 2 minutes 40 seconds and about 3 minutes 40 seconds respectively, adsorption time was faster about 1 minutes than desorption time.
Keywords
$TiO_2-V_2O_5$ Thin Films; Sol-Gel Method; Capacitance of Thin Films; Adsorption Time; Desorption Time;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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