• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.368-376
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• 1999

This paper predicts the changes in the spring constant, the resonant frequency, the electrostatic force, and the displacement of a resonant structure due to non-ideal anisotropic RIE etching process. First, a $6\;{\mu}m$ thick polysilicon was etched by RIE and the anisotropy of the etched structure was measured as a function of a RF power, a $Cl_2$ flow rate and a chamber pressure. In the experimental results, an anisotropy was decreased as the RF power, the $Cl_2$ flow rate, or the chamber pressure was increased. A comb actuator's operation characteristic was predicted depending on the anisotropy variations in RIE etching. Comb actuators with three different support beam structures were investigated : fixed-fixed, crab-leg, and double crab-leg. As the RIE etch anisotropy becomes non-ideal, i.e. the cross section becomes rather a trapezoidal than a rectangular shape, it decreases spring constant, resonant frequency and electrostatic force of a comb actuator but it increases the displacement of the mass. Among the three structures, the comb actuator with double crab-leg support beams is more influenced by anisotropy variation in RIE etch than other two.

• Journal of the Korean Geosynthetics Society
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• v.13 no.4
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• pp.97-107
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• 2014

Finite element modelling and analysis were conducted for the roll-type steel mats which were placed on loose sand and subjected to a standard truck wheel load in this study. The roll-type steel mats mean that the steel mats can be folded as a circle shape for the carrying to fields in cold regions where workability is limited and are developed for a rapid rehabilitation method for roadway across soft ground which is caused by thawing during the summer season in cold regions. The model is composed of link elements to simulate nonlinear behavior of connections between steel mats, thick shell elements to have flexural stiffness of the steel mats, and springs to simulate characteristics of foundation soils. The structural behaviors of the shell, link elements, and springs were verified at each modelling step through experiment and analysis. Beam and shell analysis without the link elements were conducted and compared to results obtained from the model presented in this study. Significant vertical displacement is shown in the shell model with hinge connections. Therefore, the results demonstrate that the analysis model for the roll-type steel mats on loose sand needs further detail parametric studies.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.2
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• pp.103-108
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• 2019

Non-equilibrium molecular dynamics simulation on the thermal boundary resistance(TBR) of an aluminum(Al)/silicon(Si) interface was performed in the present study. The constant heat flux across the Si/Al interface was simulated by adding the kinetic energy in hot Si region and removing the same amount of the energy from the cold Al region. The TBR estimated from the sharp temperature drop at the interface was independent of heat flux and equal to $5.13{\pm}0.17K{\cdot}m^2/GW$ at 300K. The simulation result was experimentally confirmed by the time-domain thermoreflectance technique. A 90nm thick Al film was deposited on a Si(100) wafer using an e-beam evaporator and the TBR on the film/substrate interface was measured using the time-domain thermoreflectance technique based on a femtosecond laser system. A numerical solution of the transient heat conduction equation was obtained using the finite difference method to estimate the TBR value. Experimental results were compared to the prediction and discussions on the nanoscale thermal transport phenomena were made.

• Radiation Oncology Journal
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• v.20 no.2
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• pp.172-178
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• 2002

Purpose : X-ray film over responds to low-energy photons in relative photon beam dosimetry because its sensor is based on silver bromide crystals, which are high-Z molecules. This over-response becomes a significant problem in clinical photon beam dosimetry particularly in regions outside the penumbra. In intensity modulated radiation therapy (IMRT), the radiation field is characterized by multiple small fields and their outside-penumbra regions. Therefore, in order to use film dosimetry for IMRT, the nature the source of the over-response in its radiation field need to be known. This study is aimed to verify and possibly improve film dosimetry for IMRT. Materials and Method : Modulated beams were constructed by a combination of five or seven different static radiation fields using 6 MeV X-rays. In order to verify film dosimetry, we used X-ray film and an ion chamber were used to measure the dose profiles at various depths in a phantom. In addition, in order to reduce the over-response, 0.01 inch thick lead filters were placed on both sides of the film. Results : The measured dose profiles showed a film over-response at the outside-penumbra and low dose regions. The error increased with depths and approached 15% at a maximum for the field size of $15{\times}15cm^2$ at 10 cm depth. The use of filters reduced the error to 3%, but caused an under-response of the dose in a perpendicular set-up. Conclusion : This study demonstrated that film dosimetry for IMRT involves sources of error due to its over-response to low-energy Photons. The use of filers can enhance the accuracy in film dosimetry for IMRT. In this regard, the use of optimal filter conditions is recommended.

• Radiation Oncology Journal
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• v.19 no.1
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• pp.74-80
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• 2001

Purpose : Irradiation cones by using backscatter electrons are made for the treatment of superficial small lesions of skin, oral cavity, and rectum where a significant dose gradient and maximum surface dose is desired. Methods and Materials : Backscatter electrons are produced from the primary electron beams from the linear accelerators. The design consists of a cylindrical cone that has a thick circular plate of high atomic number medium (Pb or Cu) attached to the distal end, and the plate can be adjusted the reflected angle. Primary electrons strike the metal plate perpendicularly and produce backscatter electrons that reflect through the lateral hole for treatment. Using film and a parallel plate ion chamber, backscatter electron dose characteristics are measured. Results : The depth dose characteristic of the backscatter electron is very similar to that of the hard x-ray beam that is commonly used for the intracavitary and superficial lesions. The basckscatter electron energy is nearly constant and effectively about 1.5 MeV from the clinical megavoltage beams. The backscatter electron dose rate of $35\~85\;cGy/min$ could be achieved from modern accelerators without any modification. and the depth in water of $50\%$ depth dose from backscatter electron located at 6mm for $45^{\circ}$ angled lead scatter. The beam flatness is dependent on the slit size and the depth of treatment, but is satisfactory to treat small lesions. Conclusions : The measured data for backscatter electron energy, depth dose flatness dose rate and absolute dose indicates that the backscatter electrons are suitable for clinical use.

• Journal of Veterinary Clinics
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• v.31 no.6
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• pp.495-501
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• 2014

The objective of this study was to evaluate the differences and reproducibility of Hounsfield unit (HU) value and volume measurements on different computed tomography (CT) scanner types and different collimations by using a gelatin phantom. The phantom consisting of five synthetic simulated calculus spanning diameters from 3.0 mm to 12.0 mm with 100 HU was scanned using a two-channel multi-detector row CT (MDCT) scanner, a four-channel MDCT scanner, and two 64-channel MDCT scanners. For all different scanner types, the thinnest possible collimation and the second thinnest collimation was used. The HU values and volumes of the synthetic simulated calculus were independently measured three times with minimum intervals of 2 weeks and by three experienced veterinary radiologists. ANOVA and Scheff$\acute{e}$ test for the multiple comparison were performed for statistical comparison of the HU values and volumes of the synthetic simulated calculus according to different CT scanner types and different collimations. The reproducibility of the HU value and volume measurements was determined by calculating Cohen's k. The reproducibility of HU value and volume measurements was very good. HU value varied between different CT scanner types, among different beam collimations. However, there was not statistically significant difference. The percent error (PE) decreased as the collimation thickness decreased, but the decrease was statistically insignificant. In addition, no statistically significant difference in the PEs of the different CT scanner types was found. It can be concluded that the CT scanner type insignificantly affects HU value and the volumetric measurement, but that a thinner collimation tends to be more useful for accurate volumetric measurement.

• The Journal of Korean Society for Radiation Therapy
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• v.26 no.2
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• pp.163-170
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• 2014

Purpose : If electron, chosen for superficial oncotherapy, was applied with bolus, it could work as an important factor to a therapy result by showing a drastic change in surface dose. Hence the calculation value and the actual measurement value of surface dose of Treatment Planning System (TPS) according to four variables influencing surface dose when using bolus on an electron therapy were compared and analyzed in this paper. Materials and Methods : Four variables which frequently occur during the actual therapies (A: bolus thickness - 3, 5, 10 mm, B: field size - $6{\time}6$, $10{\time}10$, $15{\time}15cm2$, C: energy - 6, 9, 12 MeV, D: gantry angle - $0^{\circ}$, $15^{\circ}$) were set to compare the actual measurement value with TPS(Pinnacle 9.2, philips, USA). A computed tomography (lightspeed ultra 16, General Electric, USA) was performed using 16 cm-thick solid water phantom without bolus and total 54 beams where A, B, C, and D were combined after creating 3, 5 and 10 mm bolus on TPS were planned for a therapy. At this moment SSD 100 cm, 300 MU was investigated and measured twice repeatedly by placing it on iso-center by using EBT3 film(International Specialty Products, NJ, USA) to compare and analyze the actual measurement value and TPS. Measured film was analyzed with each average value and standard deviation value using digital flat bed scanner (Expression 10000XL, EPSON, USA) and dose density analyzing system (Complete Version 6.1, RIT, USA). Results : For the values according to the thickness of bolus, the actual measured values for 3, 5 and 10 mm were 101.41%, 99.58% and 101.28% higher respectively than the calculation values of TPS and the standard deviations were 0.0219, 0.0115 and 0.0190 respectively. The actual values according to the field size were $6{\time}6$, $10{\time}10$ and $15{\time}15cm2$ which were 99.63%, 101.40% and 101.24% higher respectively than the calculation values and the standard deviations were 0.0138, 0.0176 and 0.0220. The values according to energy were 6, 9, and 12 MeV which were 99.72%, 100.60% and 101.96% higher respectively and the standard deviations were 0.0200, 0.0160 and 0.0164. The actual measurement value according to beam angle were measured 100.45% and 101.07% higher at $0^{\circ}$ and $15^{\circ}$ respectively and standard deviations were 0.0199 and 0.0190 so they were measured 0.62% higher at $15^{\circ}$ than $0^{\circ}$. Conclusion : As a result of analyzing the calculation value of TPS and measurement value according to the used variables in this paper, the values calculated with TPS on 5 mm bolus, $6{\time}6cm2$ field size and low-energy electron at $0^{\circ}$ gantry angle were closer to the measured values, however, it showed a modest difference within the error bound of maximum 2%. If it was beyond the bounds of variables selected in this paper using electron and bolus simultaneously, the actual measurement value could differ from TPS according to each variable, therefore QA for the accurate surface dose would have to be performed.

• Journal of Radiation Protection and Research
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• v.23 no.3
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• pp.139-147
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• 1998

Purpose: Tissue inhomogeneity such as lung affects tumor dose as well as transmission dose in new concept of on-line dosimetry which estimates tumor dose from transmission dose using the new algorithm. This study was carried out to confirm accuracy of correction by tissue density in tumor dose estimation utilizing transmission dose. Methods: Cork phantom (CP, density $0.202\;gm/cm^3$) having similar density with lung parenchyme and polystyrene phantom (PP, density $1.040\;gm/cm^3$) having similar density with soft tissue were used. Dose measurement was carried out under condition simulating human chest. On simulating AP-PA irradiation, PPs with 3 cm thickness were placed above and below CP, which had thickness of 5, 10, and 20 cm. On simulating lateral irradiation, 6 cm thickness of PP was placed between two 10 cm thickness CPs additional 3 cm thick PP was placed to both lateral sides. 4, 6, and 10 MV x-ray were used. Field size was in the range of $3{\times}3$ cm through $20{\times}20$ cm, and phantom-chamber distance (PCD) was 10 to 50 cm. Above result was compared with another sets of data with equivalent thickness of PP which was corrected by density. Result: When transmission dose of PP was compared with equivalent thickness of CP which was corrected with density, the average error was 0.18 (${\pm}0.27$) % for 4 MV, 0.10 (${\pm}0.43$) % for 6 MV, and 0.33 (${\pm}0.30$) % for 10 MV with CP having thickness of 5 cm. When CP was 10 cm thick, the error was 0.23 (${\pm}0.73$) %, 0.05 (${\pm}0.57$) %, and 0.04 (${\pm}0.40$) %, while for 20 cm, error was 0.55 (${\pm}0.36$) %, 0.34 (${\pm}0.27$) %, and 0.34 (${\pm}0.18$) % for corresponding energy. With lateral irradiation model, difference was 1.15 (${\pm}1.86$) %, 0.90 (${\pm}1.43$) %, and 0.86 (${\pm}1.01$) % for corresponding energy. Relatively large difference was found in case of PCD having value of 10 cm. Omitting PCD with 10 cm, the difference was reduced to 0.47 (${\pm}$1.17) %, 0.42 (${\pm}$0.96) %, and 0.55 (${\pm}$0.77) % for corresponding energy. Conclusion When tissue inhomogeneity such as lung is in tract of x-ray beam, tumor dose could be calculated from transmission dose after correction utilizing tissue density.

• Journal of the Korean Vacuum Society
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• v.22 no.6
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• pp.313-320
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• 2013

The $AlAs_xSb_{1-x}$ step-graded buffer (SGB) layer was grown on the Silicon (Si) substrate to overcome lattice mismatch between Si substrate and $Al_{0.3}Ga_{0.7}As$/GaAs multiple quantum wells (MQWs). The value of root-mean-square (RMS) surface roughness for 5 nm-thick GaAs grown on $AlAs_xSb_{1-x}$ step-graded buffer layer was ~1.7 nm. $Al_{0.3}Ga_{0.7}As$/GaAs MQWs with AlAs/GaAs short period superlattice (SPS) were formed on the $AlAs_xSb_{1-x}$/Si substrate. Photoluminescence (PL) peak at 10 K for the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure showed relatively low intensity at ~813 nm. The RMS surface roughness of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure was ~42.9 nm. The crystal defects were observed on the cross-sectional transmission electron microscope (TEM) images of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure. The decrease of PL intensity and increase of RMS surface roughness would be due to the formation of the crystal defects.

• The Journal of Korean Society for Radiation Therapy
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• v.33
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• pp.79-88
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• 2021

Objectives: Bolus, which combines 3D-bolus and Step-bolus, was produced and its usefulness is evaluated. Materials and Methods: A Bolus was manufactured with a thickness of 10mm and 5mm using a 3D printer (3D printer, USA), and a Step Bolus of 5mm was bonded to a 5mm thick bolus. In order to understand the characteristics of Step bolus and 3D bolus, the differences in relative electron density, HU value, and mass density of the two bolus were investigated. These two Bolus were applied to anthropomorpic phantom to confirm its effectiveness. After all contouring of the phantom, a treatment plan was established using the computed treatment planning system (Eclipse 16.1, Varian medical system, USA). Treatment plan was performed using electron beam 6MeV, nine dose measurement points were designated on the phantom chest, air-gap was measured at that point, and dose evaluation was performed at the same point for each bolus applied using a glass dosimeter (PLD). Results: Bolus, which combines 3D-bolus 5mm and Step-bolus 5mm, was manufactured and evaluated compared with 3D-bolus 1cm. The relative electron density of 3D Bolus was 1.0559 g/cm2 and the step Bolus was 1.0590 g/cm2, which was different by 0.01%, so the relative electron density was almost the same. In the lightweight measurement of air-gap, the combined bolus was reduced to 54.32% for all designated points compared to 3D-bolus. In the dose measurement using a glass dose meter (PLD), the consistency was high in phantom using combined bolus at most points except the slope point. Conclusion: Combined bolus made by combining 3D-bolus and Step-bolus has all the advantages of 3D-bolus and Step-bolus. In addition, by dose inaccuracy due to Air-gap, more improved dose distribution can be shown, and effective radiation therapy can be performed.