• 제목/요약/키워드: thermal oxidation

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Advanced Lubricants for Heat Engines

  • Hsu, S.M.;Li, H.;Perez, J.M.;Ku, C.S.;Wang, J.
    • Tribology and Lubricants
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    • 제11권5호
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    • pp.47-54
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    • 1995
  • An advanced liquid lubricants for heat engines has been developed and tested successfully in a prototype engine. The lubricant possesses superior oxidation stability and high temperature stability and is capable of surviving for a minimum of three minutes at 425$^{\circ}$C (800$^{\circ}$C) at the ring zone and maintains stability at an oil sump temperature of 171$^{\circ}$C. The lubricant has been evaluated by the Cummins Engine Co. Out of a field of several dozens of lubricant, six lubricant was selected for a prototype 200 hours endurance testing. The NIST lubricant was one of the two lubricants that successfully finished the endurance testing. This paper describes the key lubricant considerations including oxidation and thermal stability, volatility, deposit control. The engine test conditions and the results will be presented.

Scale 파괴거동 측정 및 해석 (Analysis and Measurement on Failure Behavior off Scales by Acoustic Emission Method)

  • 최진원
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2005년도 추계학술대회 논문집
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    • pp.330-331
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    • 2005
  • It was found possible to evaluate the temperature at which major scale failure takes place during cooling by installing a most modem acoustic emission(AE) analytical system. Ultra low carbon steel and low carbon steels containing a few minor alloying elements were oxidized in air at 900, 1050 and $1200^{\circ}C$ for 20 min, and then cooled in vacuum at 30, 70 and $110^{\circ}C/min$. The significance of the present research is the evaluation of the spallation temperature and thus the calculation of apparent thermal stress for scale spallation using the difference between oxidation temperature and spallation temperature. They were assessed as 0.22 to 0.68, 0.45 to 1.80, and 0.65 to 1.95 GPa for oxidation at 900, 1050 and $1200^{\circ}C$, respectively.

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새로운 $NH_{3}-O_{2}$ 산화 방법(1) - 매카니즘 및 결정성 (A New $NH_{3}-O_{2}$Oxidation Method (1) - Mechanism and Crystal Properties)

  • 복은경;박선우;김철주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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    • pp.360-362
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    • 1988
  • The new oxidation method was presented to grow the oxide layer by thermal reaction of $NH_{3}$ and $O_{2}$. The growth rate increased according as increase of partial pressure of $NH_{3}$. Optical transparent of the grown film was 12% compared with 17% of thermal oxidation when the wave number was $1,100cm^{-1}$. The oxide layer with good quaility was obtained.

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열산화법으로 형성한 탄탈륨 산화막의 전기적 특성 (Electric Characteristics of Tantalum Pentoxide Thin Film Formed by Thermal Oxidation)

  • 홍영호;박효덕;전춘배;이덕동;김봉렬
    • 전자공학회논문지A
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    • 제29A권3호
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    • pp.87-95
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    • 1992
  • The electrical characteristics of Al/TaS12TOS15T/SiOS12T/Si metal insulator-semiconductor (MIS) capacitors were studied. Tantalum pentoxide thin films on SiOS12T/p-Si substrate have been prepared by thermal oxidation at 450-$600^{\circ}C$ of sputter deposited tantalum films. Composition and structures of the tantalum oxide films were examined by AES and XRD. From the C-V analysis, dielectric constant of TaS12TOS15T which were oxidized at 55$0^{\circ}C$ for 1h in OS12T were 18-23, the value depending on the oxidation and annealing temperature. The leakage current density was found to be about 10S0-10T-10S0-9T A/cmS02T at an applied electric field of 1 MV/cm. The dielectric breakdown strength of the tantalum oxide films annealed at 100$0^{\circ}C$ were in the range from 2.5MV/cm to 2.8 MV/cm.

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RAPID THERAL PROCESS를 응용한 THIN DIELECTRIC FILM의 전기적 특성에 관한 연구. (ELECTRICAL CHARACTERISTICS OF THIN DIELECTRIC FILMS PREPARED BY RAPID THERMAL PROCESS)

  • 이앙구;박성식;최진석;류지효
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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    • pp.542-545
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    • 1987
  • THE ELECTRICAL CHARACTERISTICS Of RAPID THERMAL OXIDES AND NITRIDED OXIDES HAVE BEEN INVESTIGATED. R.T.OXIDE FILMS HAVE BEEN PREPARED BY ONLY R.T. OXIDATION OR R.T.OXIDATION AND SUBSEQUENT R.T.ANNEAL. NITRIDED OXIDE FILMS HAVE BEEN PREPARED BY R.T.OXIDATION AND SUBSEQUENT R.T.NITRIDATION.AND CONVENTIONAL OXIDES ALSO HAVE BEEN PREPARED TO COMPARE WITH R.T.P OXIDES. R.T.ANNEALED OXIDES SHOW EXCELLENT BREAKDOWN FIELD. LEAKAGE CURRENT AND TDDB CHARACTERISTICS. ALSO, CAPACITANCE Of R.T NITRIDED OXIDES ARE SUPERIOR BY 10% TO CONVENTIONAL OXIDES, BUT TDDB CHARACTERISTIC ARE POORER THAN OXIDE FILMS.

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Rapid Fabrication of Cu/Cu2O/CuO Photoelectrodes by Rapid Thermal Annealing Technique for Efficient Water Splitting Application

  • Lee, Minjeong;Bae, Hyojung;Rho, Hokyun;Burungale, Vishal;Mane, Pratik;Seong, Chaewon;Ha, Jun-Seok
    • 마이크로전자및패키징학회지
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    • 제27권4호
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    • pp.39-45
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    • 2020
  • The Cu/Cu2O/CuO photoelectrode has been successfully fabricated by Rapid Thermal Annealing technique. The structural characterization of fabricated photoelectrode was performed using X-Ray diffraction, while elemental composition of the prepared material has been checked with X-Ray Photoelectron Spectroscopy. The synthesis parameters are optimized on the basis of photoelectrochemical performance. The best photoelectrochemical performance has been observed for the Cu/Cu2O/CuO photoelectrode fabricated at 550 ℃ oxidation temperature and oxidation time of 50 seconds with highest photocurrent density of -3 mA/㎠ at -0.13 V vs. RHE.

11층 열장벽 피막의 고온물성에 관한 연구 (A study on the thermal properties of the 11 layer thermal barrier)

  • 권현옥;강현욱;남영민;송요승;홍상희;현규택;윤종구;이득용;김선화
    • 한국표면공학회지
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    • 제34권1호
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    • pp.3-9
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    • 2001
  • The purpose of this study is to evaluate the properties of the functional gradient thermal barrier coatings by plasma spray process. The evaluations of mechanical and thermal properties such as fatigue, oxidation and wear-resistance at high temperatures have been conducted. Furthermore, residual stress and bond strength have been evaluated. The range of thickness of coated layers was 550~600$\mu\textrm{m}$. The range of hardness of layers was 800~900 Hv and the porosity range of coatings was about 7 to 14%. The top coating layer of $ZrO_2$ in thermal barrier was composed of tetragonal structure after spraying. The coated layers of $ZrO_2$ on the Inconel substrate is the best resistance for thermal fatigue. Those coatings had the least compressive stress in comparison with other coatings. In high temperature oxidation test, the coatings on Inconel substrate was better than the coatings on SUS substrate. The bond strength of the concave type was greater than that of linear types and convex types coatings.

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Fabrication and Thermal Oxidation of ZnO Nanofibers Prepared via Electrospinning Technique

  • Baek, Jeong-Ha;Park, Ju-Yun;Kang, Ji-Soo;Kim, Don;Koh, Sung-Wi;Kang, Yong-Cheol
    • Bulletin of the Korean Chemical Society
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    • 제33권8호
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    • pp.2694-2698
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    • 2012
  • Materials on the scale of nanoscale have widely been used as research topics because of their interesting characteristics and aspects they bring into the field. Out of the many metal oxides, zinc oxide (ZnO) was chosen to be fabricated as nanofibers using the electrospinning method for potential uses of solar cells and sensors. After ZnO nanofibers were obtained, calcination temperature effects on the ZnO nanofibers were studied and reported here. The results of scanning electron microscopy (SEM) revealed that the aggregation of the ZnO nanofibers progressed by calcination. X-ray diffraction (XRD) study showed the hcp ZnO structure was enhanced by calcination at 873 and 1173 K. Transmission electron microscopy (TEM) confirmed the crystallinity of the calcined ZnO nanofibers. X-ray photoelectron spectroscopy (XPS) verified the thermal oxidation of Zn species by calcination in the nanofibers. These techniques have helped us deduce the facts that the diameter of ZnO increases as the calcination temperature was raised; the process of calcination affects the crystallinity of ZnO nanofibers, and the thermal oxidation of Zn species was observed as the calcination temperature was raised.

열산화법에 의한 phosphorus 에미터 pile-up (Pile-up of phosphorus emitters using thermal oxidation)

  • 부현필;강민구;이경동;이종한;탁성주;김영도;박성은;김동환
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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    • pp.122.1-122.1
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    • 2011
  • Phosphorus is known to pile-up at the silicon surface when it is thermally oxidized. A thin layer, about 40nm thick from the silicon surface, is created containing more phosphorus than the bulk of the emitter. This layer has a gaussian profile with the peak at the surface of the silicon. In this study the pile-up effect was studied if this layer can act as a front surface field for solar cells. The effect was also tested if its high dose of phosphorus at the silicon surface can lower the contact resistance with the front metal contact. P-type wafers were first doped with phosphorus to create an n-type emitter. The doping was done using either a furnace or ion implantation. The wafers were then oxidized using dry thermal oxidation. The effect of the pile-up as a front surface field was checked by measuring the minority carrier lifetime using a QSSPC. The contact resistance of the wafers were also measured to see if the pile-up effect can lower the series resistance.

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적외선 CVD 방법을 이용한 산화막 성장에 $NH_3$가 미치는 영향 (Effects of NH3 on the Growth of Oxide Film by Infrared-CVD Method)

  • 이철승;정관수;김철주
    • 대한전자공학회논문지
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    • 제25권11호
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    • pp.1329-1334
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    • 1988
  • $NH_3-O_2$의 열반응에 의해 산화막을 성장시키는 새로운 방법을 소개하고, 기존의 건식산화방법을 이용한 $SiO_2$박막의 특성을 비교 설명하였다. $NH_3$의 유량에 따라서 박막의 성장비가 증가하고, 성장된 막의 구성성분이 건식산화때와 같음을 확인하였다. C-V특성곡선에서도 $Q_{OX}$$Q_{SS}$가 거의같았고 히스테리시스현상도 없었다. 또한 n-MOS트랜지스터를 제작하고 측정한 결과 $I_D$-$V_{DS}$특성곡선이 건식산화와 비교하여 우수함을 확인했다.

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