• 제목/요약/키워드: thermal limit

검색결과 502건 처리시간 0.029초

Micro-scale Thermal Sensor Manufacturing and Verification for Measurement of Temperature on Wafer Surface

  • Kim, JunYoung;Jang, KyungMin;Joo, KangWo;Kim, KwangSun
    • 반도체디스플레이기술학회지
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    • 제12권4호
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    • pp.39-44
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    • 2013
  • In the semiconductor heat-treatment process, the temperature uniformity determines the film quality of a wafer. This film quality effects on the overall yield rate. The heat transfer of the wafer surface in the heat-treatment process equipment is occurred by convection and radiation complexly. Because of this, there is the nonlinearity between the wafer temperature and reactor. Therefore, the accurate prediction of temperature on the wafer surface is difficult without the direct measurement. The thermal camera and the T/C wafer are general ways to confirm the temperature uniformity on the heat-treatment process. As above ways have limit to measure the temperature in the precise domain under the micro-scale. In this study, we developed the thin film type temperature sensor using the MEMS technology to establish the system which can measure the temperature under the micro-scale. We combined the experiment and numerical analysis to verify and calibrate the system. Finally, we measured the temperature on the wafer surface on the semiconductor process using the developed system, and confirmed the temperature variation by comparison with the commercial T/C wafer.

CRITICAL HEAT FLUX FOR DOWNWARD-FACING BOILING ON A COATED HEMISPHERICAL VESSEL SURROUNDED BY AN INSULATION STRUCTURE

  • Yang, J.;Cheung, F.B.;Rempe, J.L.;Suh, K.Y.;Kim, S.B.
    • Nuclear Engineering and Technology
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    • 제38권2호
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    • pp.139-146
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    • 2006
  • An experimental study was performed to evaluate the effects of surface coating and an enhanced insulation structure on the downward facing boiling process and the critical heat flux on the outer surface of a hemispherical vessel. Steady-state boiling tests were conducted in the Subscale Boundary Layer Boiling (SBLB) facility using an enhanced vessel/insulation design for the cases with and without vessel coatings. Based on the boiling data, CHF correlations were obtained for both plain and coated vessels. It was found that the nucleate boiling rates and the local CHF limits for the case with micro-porous layer coating were consistently higher than those values for a plain vessel at the same angular location. The enhancement in the local CHF limits and nucleate boiling rates was mainly due to the micro-porous layer coating that increased the local liquid supply rate toward the vaporization sites on the vessel surface. For the case with thermal insulation, the local CHF limit tended to increase from the bottom center at first, then decrease toward the minimum gap location, and finally increase toward the equator. This non-monotonic behavior, which differed significantly from the case without thermal insulation, was evidently due to the local variation of the two-phase motions in the annular channel between the test vessel and the insulation structure.

소형 다중분광 항공촬영 시스템(PKNU 3호) 개발에 관한 연구 (Research for development of small format multi -spectral aerial photographing systems (PKNU 3))

  • 이은경;최철웅;서영찬;조남춘
    • 한국측량학회:학술대회논문집
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    • 한국측량학회 2004년도 추계학술발표회 논문집
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    • pp.143-152
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    • 2004
  • Researchers seeking geological and environmental information, depend on remote sensing and aerial photographic datum from various commercial satellites and aircraft. However, adverse weather conditions as well as equipment expense limit the ability to collect data anywhere and anytime. To allow for better flexibility in geological and environmental data collection, we have developed a compact, multi-spectral automatic Aerial Photographic system (PKNU2). This system's Multi-spectral camera can record visible (RGB) and infrared (NIR) band (3032*2008 Pixels) images Visible and infrared band images were obtained from each camera respectively and produced color-infrared composite images to be analyzed for the purpose of the environmental monitoring. However this did not provide quality data. Furthermore, it has the disadvantage of having the stereoscopic overlap area being 60% unsatisfied due to the 12 seconds of storage time of each data The PKNU2 system in contrast, photographed photos of great capacity Thus, with such results, we have been proceeding to develop the advanced PKNU2 (PKNU3) system that consists of a color-infrared spectral camera that can photograph in the visible and near-infrared bands simultaneously using a single sensor, a thermal infrared camera, two 40G computers to store images, and an MPEG board that can compress and transfer data to the computer in real time as well as be able to be mounted onto a helicopter platform.

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섬유상 여과필터의 고온 내구성 향상을 위한 테프론 코팅 연구 (Teflon coating of fabric filters for enhancement of high temperature durability)

  • 김은주;박영구
    • 한국응용과학기술학회지
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    • 제28권2호
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    • pp.232-239
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    • 2011
  • Fabric fibrous filter has been used in various industrial applications owing to the low cost and wide generality. However, the basic properties of fabric materials often limit the practical utilization including hot gas cleaning. This study attempts to find new coatings of porous fibrous filter media in order to overcome its insufficient thermal resistance and durability. Teflon was one of the plausible chemicals to supplement the vulnerability against frequent external thermal impacts. A foaming agent composed of Teflon and some organic additives was tentatively coated on the glass fiber mat. The present test Teflon foam coated filter was fount to be useful for hot gas cleaning, up to $250^{\circ}C$-$300^{\circ}C$. Close examination using XPS(X-ray Photoelectron Spectroscopy) and Contact angle proved the binding interactions between carbon and fluorine, which implies coating stability. The PTFE/Glass foam coated filter consisted of more than 95% (C-F)n bond, and showed super-hydrophobic with good-oleophobic characteristics. The contact angle of liquid droplets on the filter surface enabled to find the filter wet-ability against liquid water or oil.

웨스팅하우스형 원자력발전소 가압기 방출 탱크의 실시간 시뮬레이션을 위한 전문모델 개발 (Development of a Dedicated Model for a Real-Time Simulation of the Pressurizer Relief Tank of the Westinghouse Type Nuclear Power Plant)

  • 서재승;전규동
    • 한국시뮬레이션학회논문지
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    • 제13권2호
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    • pp.13-21
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    • 2004
  • The thermal-hydraulic model ARTS which was based on the RETRAN-3D code adopted in the domestic full-scope power plant simulator which was provided in 1998 by KEPRI. Since ARTS is a generalized code to model the components with control volumes, the smaller time-step size should be used even if converged solution could not get in a single volume. Therefore, dedicated models which do not force to reduce the time-step size are sometimes more suitable in terms of a real-time calculation and robustness. In the case of PRT(Pressurizer Relief Tank) model, it is consist of subcooled water in bottom and non-condensable gas in top. The sparger merged under subcooled water enhances condensation. The complicated thermal-hydraulic phenomena such as condensation, phase separation with existence of non-condensable gas makes difficult to simulate. Therefore, the PRT volume can limit the time-step size if we model it with a general control volume. To prevent the time-step size reduction due to convergence failure for simulating this component, we developed a dedicated model for PRT. The dedicated model was expected to provide substantially more accurate predictions in the analysis of the system transients. The results were resonable in terms of accuracy, real-time simulation, robustness and education of operators, complying with the ANSI/ANS-3.5-1998 simulator software performance criteria and RETRAN-3D results.

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파손확률 모델을 이용한 솔더 조인트의 건전성 평가 (Reliability Estimation of Solder Joint by Using Failure Probability Model)

  • 명노훈;이억섭;김동혁
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.365-370
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    • 2004
  • Generally, component and FR-4 board are connected by solder joint. Because material properties of components and FR-4 board are different, component and FR-4 board show different coefficients of thermal expansion (CTE) and thus strains in component and board are different when they are heated. That is, the differences in CTE of component and FR-4 board cause the dissimilarity in shear strain and solder joint' failure. The first order Taylor series expansion of the limit state function incorporating with Tresca failure criterion is used in order to estimate the failure probability of solder joints under heated condition. Using shear stresses and shear strains appeared on the solder joint, we estimate the failure probability of solder joints with the Tresca failure criterion. The effects of random variables such as CTE, distance of the solder joint from the neutral point(DNP), temperature variation and height of solder on the failure probability of the solder joint are systematically studied by using the failure probability model with first order reliability method(FORM).

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백두산의 식생대에 관하여 (On the Vegetation Zone of Mt. Paektu)

  • 임양재;심재국
    • The Korean Journal of Ecology
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    • 제21권5_2호
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    • pp.501-518
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    • 1998
  • Mt. Paektu(2,749.6m)m the biggest mountain in Northeast Asia, located on the border line of Korea and China is characterized as an aspite with broad gentle mountain area and rich biota. however, it seems that the study of forest vegetational feature or vegetation zones in the whole area of this mountain is not yet sufficient in spite of contribution by many investigators. in this paper thermal climatic approach was carried out for the determination of vegetation zones of the mountain with the meteorological data of four stations including Cheonjj and various vegetational data. the application of Warmth Index and/or coldness Index(Kira 1977) for the determination of forest vegetation boundary was useful also here, and their boundaries largely coincided with those of thermal indicies obtained in the Korean Peninsula(Yim and Kira, 1975), including the lapse rate of air temperature along increasing elevation. However, in the mountain the boundary of vegetation zones in not clear like those of mountains in Korea. It may be due so the topographic differences between this area and the Korean Peninsula. Besides, the broad ecotones between different vegetations in this area support the vegetation continum concept rather than the unit concept, and the limit of timber line or tree line reflects various hypothesis(Steven and fox 1991). Therefore, for the explantion of vegetation zone of this area should be considered topography or soil condition, for example, as known the hierachy of ecological units (zonobiomes, orobiomes and pedobiomes, Walter, 1973).

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압축비 변경에 따른 CNG기관의 특성 연구 (Performance Characteristics of CNG Engine at Various Compression Ratios)

  • 김진영;하종률
    • 한국자동차공학회논문집
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    • 제13권4호
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    • pp.145-151
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    • 2005
  • Natural gas is one of clean fuels that can replace petroleum-based fuels, because it has low exhaust emission, comparatively high thermal efficiency and abundant deposits. In this addition, owing to high octane number and wide lean flammability limit, it has a strong point to increase the compression ratio. For this reason, the research is being actively executed to increase the generating power and thermal efficiency of the engine by raising the compression ratio through utilization of high octane number relevant to development of CNG engine. In this study, 0.63L single cylinder diesel engine has been used to alter easily compression ratio. Compression ratio has gotten under control by modifying the thickness of gasket between cylinder head and block without major structural modifications. As the result, as compression ratio has increased, generating power and fuel consumption ratio have been improved. As for emission concentration, as compression ratio has increased, THC concentration has been decreased while exhause concentration of NOx increased. In case compression ratio has excessively increased, brake output decrease and cycle variation have been increased. As the result acquired by analyzing brake output, fuel consumption ratio, cycle variation and exhaust, the engine driving condition has acquired $\varepsilon=13$ as the optimal compression ratio in this study.

SVM 알고리즘을 활용한 선루프 실러도포 공정 품질검사 시스템 구축 (The Construction of Quality Inspection System for Sunroof Sealer Application Process Using SVM Algorithm)

  • 양희종;장길상
    • 대한안전경영과학회지
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    • 제23권3호
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    • pp.83-88
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    • 2021
  • Recently, due to the aging of workers and the weakening of the labor base in the automobile industry, research on quality inspection methods through ICT(Information and Communication Technology) convergence is being actively conducted. A lot of research has already been done on the development of an automated system for quality inspection in the manufacturing process using image processing. However, there is a limit to detecting defects occurring in the automotive sunroof sealer application process, which is the subject of this study, only by image processing using a general camera. To solve this problem, this paper proposes a system construction method that collects image information using a infrared thermal imaging camera for the sunroof sealer application process and detects possible product defects based on the SVM(Support Vector Machine) algorithm. The proposed system construction method was actually tested and applied to auto parts makers equipped with the sunroof sealer application process, and as a result, the superiority, reliability, and field applicability of the proposed method were proven.

Verification of neutronics and thermal-hydraulic coupled system with pin-by-pin calculation for PWR core

  • Zhigang Li;Junjie Pan;Bangyang Xia;Shenglong Qiang;Wei Lu;Qing Li
    • Nuclear Engineering and Technology
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    • 제55권9호
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    • pp.3213-3228
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    • 2023
  • As an important part of the digital reactor, the pin-by-pin wise fine coupling calculation is a research hotspot in the field of nuclear engineering in recent years. It provides more precise and realistic simulation results for reactor design, operation and safety evaluation. CORCA-K a nodal code is redeveloped as a robust pin-by-pin wise neutronics and thermal-hydraulic coupled calculation code for pressurized water reactor (PWR) core. The nodal green's function method (NGFM) is used to solve the three-dimensional space-time neutron dynamics equation, and the single-phase single channel model and one-dimensional heat conduction model are used to solve the fluid field and fuel temperature field. The mesh scale of reactor core simulation is raised from the nodal-wise to the pin-wise. It is verified by two benchmarks: NEACRP 3D PWR and PWR MOX/UO2. The results show that: 1) the pin-by-pin wise coupling calculation system has good accuracy and can accurately simulate the key parameters in steady-state and transient coupling conditions, which is in good agreement with the reference results; 2) Compared with the nodal-wise coupling calculation, the pin-by-pin wise coupling calculation improves the fuel peak temperature, the range of power distribution is expanded, and the lower limit is reduced more.