• 제목/요약/키워드: thermal decomposition temperature

검색결과 627건 처리시간 0.04초

The Effects of Thermal Decomposition of Tetrakis-ethylmethylaminohafnium (TEMAHf) Precursors on HfO2 Film Growth using Atomic Layer Deposition

  • Oh, Nam Khen;Kim, Jin-Tae;Ahn, Jong-Ki;Kang, Goru;Kim, So Yeon;Yun, Ju-Young
    • Applied Science and Convergence Technology
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    • 제25권3호
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    • pp.56-60
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    • 2016
  • The ALD process is an adequate technique to meet the requirements that come with the downscaling of semiconductor devices. To obtain thin films of the desired standard, it is essential to understand the thermal decomposition properties of the precursors. As such, this study examined the thermal decomposition properties of TEMAHf precursors and its effect on the formation of $HfO_2$ thin films. FT-IR experiments were performed before deposition in order to analyze the thermal decomposition properties of the precursors. The measurements were taken in the range of $135^{\circ}C-350^{\circ}C$. At temperatures higher than $300^{\circ}C$, there was a rapid decrease in the absorption peaks arising from vibration of $Sp^3$ C-H stretching. This showed that the precursors experienced rapid decomposition at around $275^{\circ}C-300^{\circ}C$. $HfO_2$ thin films were successfully deposited by Atomic Layer Deposition (ALD) at $50^{\circ}C$ intervals between $150^{\circ}C$ to $400^{\circ}C$; the deposited films were characterized using a reflectometer, X-ray photoelectron spectroscopy (XPS), Grazing Incidence X-ray Diffraction (GIXRD), and atomic force microscopy (AFM). The results illustrate the relationship between the thermal decomposition temperature of TEMAHf and properties of thin films.

Behaviour of Uranyl Phosphate Containing Solid Waste During Thermal Treatment for the Purpose of Sentencing and Immobilisation: Preliminary Results

  • Foster, Richard Ian;Sung, Hyun-Hee;Kim, Kwang-Wook;Lee, Keunyoung
    • 방사성폐기물학회지
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    • 제18권3호
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    • pp.407-414
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    • 2020
  • Thermal decomposition of the uranyl phosphate mineral phase meta-ankoleite (KUO2PO4·3H2O) has been considered in relation to high temperature thermal sintering for the immobilisation of a uranyl phosphate containing waste. Meta-ankoleite thermal decomposition was studied across the temperature range 25 - 1200℃ under an inert N2 atmosphere at 1 atm. It is shown that the meta-ankoleite mineral phase undergoes a double de-hydration event at 56.90 and 125.85℃. Subsequently, synthetically produced pure meta-ankoleite remains stable until at least 1150℃ exhibiting no apparent phase changes. In contrast, when present in a mixed waste the meta-ankoleite phase is not identifiable after thermal treatment indicating incorporation within the bulk waste either as an amorphous phase and/or as uranium oxide. Visual inspection of the waste post thermal treatment showed evidence of self-sintering owing to the presence of glass former materials, namely, silica (SiO2) and antimony(V) oxide (Sb2O5). Therefore, incorporation of the uranium phase into the waste as part of waste sentencing and immobilisation via high temperature sintering for the purpose of long-term disposal is deemed feasible.

회수 Cyclotol의 비군사화를 위한 소각공정 (Incineration for Demilitarization of Waste Cyclotol)

  • 이시황;백승원;문일;박정수;김현수;오민
    • 한국군사과학기술학회지
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    • 제19권4호
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    • pp.545-550
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    • 2016
  • Demilitarization involves the disposal and recovery of obsolete explosives or ammunition. Cyclotol has been used as a military explosive along with RDX and HMX. A limited number of processes exist for safe disposal due to their sensitivity to thermal shock. Rotary kilns are widely used for thermal decomposition in many countries due to cost effectiveness and simplicity compared with supercritical oxidation. Phase change as well as condensed phase reactions(CPRs) and gas phase reactions(GPRs) with rates described by the Arrhenius equation of cyclotol has been considered in this work. Changes in gas fraction, reaction rate and mass of explosives were predicted at 490, 505 and 575 K. A maximum temperature of 2062 K has been predicted within the reactor at an initial temperature of 575 K due to GPRs. From this research, Thermal decomposition in the rotary kiln is plausible for demilitarization.

Thermal behavior of Alkanethiolate Self-Assembled Monolayers on the Cu(111)

  • Lee, Sun S.;Myung M. Sung;Kim, Yunsoo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.181-181
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    • 1999
  • Self-assembled monolayers(SAMs) of alkanethiol have been formed on the Cu(111) surfaces in vacuum. The thermal behavior of octanethiol-based SAMs on the Cu(111) surface have been examined in ultrahigh vacuum. Using X-ray photoelectron spectroscopy (XPS), it is found that the monolayers are stable up to about 500K in vacuum. Decomposition is signaled by a decrease in the intensity of C ls peak, accompanied by an increase of the intensity of the Cu 2p peak. However, the intensity of the S 2p peak doesn't change much as a function of annealing temperature. Thermal the decomposition mass spectra show that n-alkene is the predominant species desorbing from the surface in the 500-600K temperature range. The totality of these data leads to the conclusion that the monolayers decompose through the S-C bond cleavage by hydrogen elimination reaction, resulting in the desorption of hydrocarbon moiety as n-alkene. Following this initial decomposition step, Cu2S layers are observed on the surface. For comparison, attempts were also made to examine the thermal behavior of octanethiol-based SAMs on the Cu(111) surface in air. It has been shown that the SAMs on the Cu(111) surfaces begin to desorb with the oxidation of the thiolate to sulfonate at 400K. Upon annealing to 450K, the monolayer has almost completely desorbed as indicated by the virtual disappearance of the S 2p peak.

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Na2B4O7·10H2O 열분해 반응속도의 비등온해석 (Non-isothermic Analysis of Reaction Rate for the Thermal Decomposition of Na2B4O7·10H2O)

  • 최호상;박영태;이수각
    • 공업화학
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    • 제8권6호
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    • pp.1029-1033
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    • 1997
  • 본 연구에서는 $Na_2B_4O_7{\cdot}10H_2O$의 열분해 반응계를 이용하여 축열식 열교환기에 적용하기 위한 반응속도의 비등온 해석에 대한 기초연구를 수행하였다. $Na_2B_4O_7{\cdot}10H_2O/Na_2B_4O_7{\cdot}5H_2O$ 계에서 반응의 평형온도가 373K 이하의 저온 온도범위에서 화학축열재로 적합하였으며, 열효율이 일정하여 장시간 사용할 수 있었다. 계 내의 반응 개시온도는 가열속도 증가에 따라 저온 영역에서 고온영역으로 이동하였으며, 수증기 분압의 변화가 있어도 저하되지 않았다. 열분해 탈수반응에 의한 반응속도식의 차수는 0.67차로서 반응의 비등온 해석에 의하여 화학축열재로 사용할 수 있었다.

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열분해와 Hot Injection법을 이용한 CoSb3 나노분말합성 (Thermal Decomposition Synthesis of CoSb3 Nanoparticle by Hot Injection Method)

  • 김민숙;안종필;김경자;박주석;김경훈;김형순
    • 한국세라믹학회지
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    • 제50권6호
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    • pp.476-479
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    • 2013
  • $CoSb_3$ with its high electrical conductivity, Seebeck coefficient and rather low thermal conductivity is quite a promising material for thermoelectric conversion applications. A potentially high figure of merit (ZT) can be achieved by a nanostructure evolution of thermoelectric materials. In this work, $CoSb_3$ nanoparticles were synthesized through a thermal decomposition method in cooperation with a hot injection technique. Nano-sized $CoSb_3$ particles were obtained through the thermal decomposition reaction between the pre-heated cobalt-oleate at $320^{\circ}C$ and the injected antimony oleate with room temperature. The results showed that the particle size was increased with increasing synthesis temperature and the crystallinity of particles was improved with temperature but the decomposition of $CoSb_3$ was observed at $320^{\circ}C$. The $CoSb_3$ particles synthesized at $300^{\circ}C$ showed a high purity and an homogeneous shape with average particle size of 26 nm.

공심법에 의한 $BaTiO_3$ 분말제조 (Preparation of $BaTiO_3$ Powder by Coprecipitation Method)

  • 김윤호;이준;한일호
    • 한국세라믹학회지
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    • 제23권4호
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    • pp.11-16
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    • 1986
  • $BaTiO_3$ ceramics powder was prepared by coprecipitation method either in oxalic acid solution or in potassium hydroxide solution. Thermal decomposition of coprecipitated $BaTiO(C_2O_4)_2$.$4H_2O$ powder in oxalic acid solution was investigated by means of Themogravimetry Differential Thermal Analysis and X-ray Diffraction Analysis. Low temperature decomposition of coprecipitated $BaTiO(C_2O_4)_2$.$4H_2O$ caused narrow particle size distribution whereas high temperature decomposition caused fairly wide particle size distribution by partial sintering. As the reaction time increased the average particle size of coprecipitated $BaTiO_3$ powder in KOH solution was increased. The most narrow paticle size distribution was obtained when the coprecipi-tates were ripened for 4hrs.

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온도와 접촉금속이 Tricyclodecane의 열안정성에 미치는 영향 (Effect of Temperature and Contact Metals on the Thermal Stability of Tricyclodecane)

  • 박선희;김중연;전병희;권정훈;강정원;한정식;정병훈;남궁혁준;김성현
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2009년도 춘계학술대회 논문집
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    • pp.159-162
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    • 2009
  • 온도가 조절되는 회분식 반응기에서 온도와 접촉금속이 Exo-tricyclo[$5.2.1.0^{2,6}$]decane (tricyclodecane, 이하 exo-THDCP로 표기함)의 열안정도에 미치는 영향을 GC/MS로 조사하였다. 그리고 Exo-THDCP와 접촉하는 금속의 특성은 SEM-EDX로 분석하였다. 보관 연료온도 증가 실험에서 exo-THDCP의 분해는 $350^{\circ}C$에서 시작되는 것으로 밝혀졌다. 연료접촉 금속의 경우, 스테인리스 스틸보다 티타늄이 exo-THDCP의 분해에 미치는 영향이 작은 것으로 나타났다.

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Thermal and Rheological Studies of Ricinodendron Heudelotii Wood for Its Pulp Production Potential

  • Ogunleye, Bolade Mercy;Fabiyi, James Sunday;Fuwape, Joseph A.
    • Journal of Forest and Environmental Science
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    • 제32권4호
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    • pp.323-328
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    • 2016
  • Thermal stability and rheological behaviors of Ricinodendron heudelotii wood were investigated. Thermogravimetric analysis conducted at a heating rate of $10^{\circ}C/min$ from 20 to $600^{\circ}C$ in a nitrogen atmosphere indicated that there was no variation in the decomposition of the onset and final temperature for all the polymers. The thermal behaviours were investigated at a temperature range from 130 to $0^{\circ}C$ at $3^{\circ}C/min$, multi-frequencies of 0.1-10 Hz using dynamic mechanical analysis. N-methyl-2-pyrolidone saturated specimens were tested while submerged under the same solvent. Polymers decomposition pattern during thermogravimetric analysis are similar in the radial position of the wood. The glass transition temperature (Tg) of R. heudelotii is $45{\pm}1^{\circ}C$ at 0.1 Hz. The Tg differs from the innerwood to outerwood. The Tg showed that N-methyl-2-pyrolidone saturated R. heudelotii would require low energy consumption during chemi-thermomechanical pulping.

석유화학플랜트에서 발생하는 PP(Poly Propylene) 및 LLDPE(Linear Low Density Poly Ethylene) 분진의 연소 위험성에 관한 연구 (Fire Hazard of PP and LLDPE dust in Chemical Plant Process)

  • 김정환;이창우;현성호;권경옥
    • 한국화재소방학회논문지
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    • 제15권1호
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    • pp.16-22
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    • 2001
  • 석유화학플랜트에서 다량 부산되는 가연성 고체인 PP(Polypropylene) 및 LLDPE(Linear low density polyethylene)의 열적특성과 압력용기를 이용하여 산화제와의 혼촉위험성을 조사하였다. 시차주사열량계 및 열중량 분석기를 이용하여 온도에 따른 발열개시온도 및 중량감소를 조사하였고, PP 및 LLDPE의 혼촉위험성을 살펴보고자 소방법상 제1류 위험물로 분류되고 있는 몇 가지 대표적인 산화성 고체와 혼합하여 무게비에 따른 압력용기 내에서의 혼촉위험성을 조사하였다. 또한 가스농도 측정기를 이용하여 PP 및 LLDPE에 대한 연소생성물의 농도를 측정하였다. DSC분석 결과 열분해에 따른 발열 피크가 PP의 경우 220~$250^{\circ}c$ 부근에서 나타나고 있으며, TGA분석결과 PP 및 LLDPE의 분해온도는 각각 200~$350^{\circ}c$, 300~$500^{\circ}c$ 범위이다. 압력용기 시험에 의한 산화제와 PP 및 LLDPE 분진의 혼촉위험성은 오리피스 직경이 감소할수록, 산화제와의 혼촉 무게비가 증가할수록 그리고 시료의 분해온도와 산화제의 분해온도가 비슷한 경우 흔촉위험성이 크게 나타났다. 또한 시료의 연소가스 분석결과 PP의 경우 LLDPE보다 상당히 많은 양의 일 산화탄소가 발생하는 반면 LLDPE가 PP보다 더 많은 양의 이산화탄소 가스를 발생하였다.

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