The Effects of Thermal Decomposition of Tetrakis-ethylmethylaminohafnium (TEMAHf) Precursors on HfO2 Film Growth using Atomic Layer Deposition |
Oh, Nam Khen
(Graduate School of Energy Science and Technology, Chungnam National University)
Kim, Jin-Tae (Vacuum Center, Korea Research Institute of Standards and Science) Ahn, Jong-Ki (Vacuum Center, Korea Research Institute of Standards and Science) Kang, Goru (Vacuum Center, Korea Research Institute of Standards and Science) Kim, So Yeon (Graduate School of Energy Science and Technology, Chungnam National University) Yun, Ju-Young (Vacuum Center, Korea Research Institute of Standards and Science) |
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