• Journal of the Korean institute of surface engineering
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• v.48 no.3
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• pp.126-130
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• 2015

A high-pressure depletion method using plasma chemical vapor deposition (CVD) is often used to deposit hydrogenated microcrystalline silicon (${\mu}c-Si:H$) films of a low defect density at a high deposition rate. To understand proper deposition conditions of ${\mu}c-Si:H$ films for a high-pressure depletion method, Si films were deposited in a combinatorial way using a multi-hollow discharge plasma CVD method. In this paper the substrate temperature dependence of ${\mu}c-Si:H$ film properties are demonstrated. The higher substrate temperature brings about the higher deposition rate, and the process window of device quality ${\mu}c-Si:H$ films becomes wider until $200^{\circ}C$. This is attributed to competitive reactions between Si etching by H atoms and Si deposition.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.43-50
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• 2021

The properties of materials which are widely used in industry fields like automobile, shipbuilding, casting, and electronics are strongly needed to have higher surface hardness, lower surface roughness, and higher compressive residual stress. As mentioned above, for the purpose of satisfying three factors, a variety of researches with respect to surface improvement have been actively studied and applied to every industry. SKD61 which is mostly used for die casting process of cold chamber method must meet a countless number of problems which are thermal, mechanical and chemical from highly specific working environment at high temperature over 600℃. Above all, in case of plunger sleeves used for die casting process, thermal fatigue has a bad effect on the surface of an inlet where molten metal is repeatedly injected. On account of it, plunger sleeves cause manufacturers to deteriorate quality of products. Therefore, in this paper, to improve the surface of an inlet of plunger sleeve, multilayer PVD coating using Ti, Cr and Mo is suggested. Furthermore, The surface characteristics such as surface roughness(Rsa, Rsq), surface hardness(HRB, HRC) and residual stress using XRD(X-ray diffractometer) of coated samples and specimens are studied and discussed.

• Bulletin of the Korean Chemical Society
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• v.32 no.2
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• pp.515-518
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• 2011

We investigated how temperature influences the structural and energetic dynamics of carbon nanotubes (CNTs) undergoing a high-speed impact with a Si (110) surface. By performing molecular dynamics simulations in the temperature range of 100 - 300 K, we found that a low temperature CNT ends up with a higher vibrational energy after collision than a high temperature CNT. The vibrational temperature of CNT increases by increasing the surface temperature. Overall, the structural and energy relaxation of low temperature CNTs are faster than those of high temperature CNTs.

• Journal of the Korean institute of surface engineering
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• v.41 no.2
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• pp.48-50
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• 2008

Solid phase crystallization (SPC) of amorphous silicon is usually conducted at around $600^{\circ}C$ since it is used in the application of flat panel display using thermally susceptible glass substrate. In this study we conducted SPC experiments at temperatures higher than $600^{\circ}C$ using silicon wafers. Crystallization rate becomes dramatically rapid at higher temperatures since SPC kinetics is controlled by nucleation with high value of activation energy. We report SPC kinetics of high temperatures compared to that of low temperatures.

• Proceedings of KOSOMES biannual meeting
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• 2007.05a
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• pp.27-33
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• 2007

Heavy metals in the surface seawaters and sediments were measured in Jinhae Bay. The high concentrations of heavy metals in the seawaters were found at the stations near the islands. In the sea waters, the mean concentrations of dissolved heavy metals except for Pb were not higher than previous data in this bay. Higher heavy metal contents in the surface sediments were observed at the stations adjacent to the Kojedo or Kadukdo of the Kadoksudo. The contents of Co, Ni, Zn, Cu, As and Cd in the surface sediments showed relatively high correlation coefficients with IL and COD. The order of enrichment factors(EFs) of heavy metals in the sediments was As>Cd>Pb>Zn>Co>Cu>Hg>Ni, and the EFs of As, Cd, Pb and Zn were higher than 1.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.345.2-345.2
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• 2016

Alumina (Al2O3) doped zinc oxide (ZnO) films (AZO) have been prepared from 2 wt.% Al2O3 doped ZnO target by DC magnetron sputtering at a 2 mTorr (0.27 Pa) chamber pressure in (15 sccm) argon ambient. We obtained films of various opto-electronic properties by variation of target angle from 32.5o to 72.5o. At lower target angle deposited films show higher values in optical gap, mobility of charge carrier, carrier concentration, crystallite grain size, transmission range of wavelength, which are favorable characteristics of AZO as a transparent conducting oxide (TCO). At higher target angle the sheet resistance, work function, surface roughness for the AZO films increases. Measured haze ratio of the films changed lower to higher and size of characteristic surface structure of as deposited film ranges from ~40 nm to ~300 nm. By a combination of low and high target angle we obtained a textured TCO film with high conductivity.

• Transactions on Electrical and Electronic Materials
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• v.17 no.2
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• pp.109-112
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• 2016

We demonstrated an alternative electrically controlled birefringence liquid crystal (ECB-LC) system with ion beam (IB)-irradiated yttrium gallium oxide (YGaO) alignment films using a sol-gel process. The surface roughness of the films was dependent on the annealing temperature; aggregated particles on surface were observed at lower annealing temperatures, whereas a smooth surface could be obtained with higher annealing temperatures. Higher transmittance in the visible region was observed at higher annealing temperatures. The film had an amorphous crystallographic state irrespective of the annealing temperature. Furthermore, ECB-LC cell with our IB-irradiated YGaO film yielded faster response time when compared to ECB-LC cell with rubbed polyimide. Considering the fast response time and high transmittance, the IB-irradiated YGaO-base LC system is a powerful alternative application for the liquid crystal display industry.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.3
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• pp.224-229
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• 2016

Recently, polymeric micro-fluidic biochips with numerous micro patterns on the surface were fabricated by injection molding for realizing low-cost mass production of devices. To evaluate the effects of process parameters on large-scale micro-structure replication, a $50{\times}50mm^2$ tool insert with surface structures having a patterns of trapezoidal shapes (height: $30{\mu}m$) was employed. During injection molding, PMMA was used; packing phase parameters and mold temperature were investigated. The replicated surface textures were quantitatively characterized by confocal laser microscopy with 10-nm resolution. The degree of replication at low mold temperatures was found to be higher than that at high mold temperature at the beginning of the packing stage. Thereafter, the degree of replication increased to a greater extent at higher mold temperatures; application of higher mold temperatures improved the degree of replication.

• Tribology and Lubricants
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• v.18 no.3
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• pp.211-218
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• 2002

The effect of characteristic of surface roughness and roughness patterns on friction was studied experimentally in boundary lubrication with reciprocating tribometer. Roughness was changed from Ra=0.2($\mu\textrm{m}$)to Ra=1.2($\mu\textrm{m}$). Three roughness pattern-transverse, oblique, longitudinal- were tested for various load and velocity. The experimental results show that the scuffing resistance of surfaces with transversal roughness pattern is higher than that of surface with longitudinal and obliq pattern. under the conditions of the roughness values of Ra=0.2, 0.5,1.0 and 1.2. surfacer roughness (Ra) was decreased with the normal load increased before scuffing occurred. oblique pattern and longitudinal pattern with Ra=0.2 and Ra=1.0 was higher scuffing load under low sliding velocity, but with Ra=0.5 was higher scuffing load under high sliding velocity.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.340-340
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• 2016

We have prepared alumina (Al2O3) doped zinc oxide (AZO) films by DC magnetron sputtering (MS) technique and obtained higher self surface texturing at a high target angle (f). We have characterized the films and applied it as a front electrode of a single junction amorphous silicon solar cell. At a lower f the deposited films show higher values of optical gap (Eg), charge carriers mobility & concentration, crystallite grain size and wider wavelength range of transmission. At higher target angle the sheet resistance, surface roughness, haze factor etc for the films increase. For f=72.5o the haze factor for diffused transmission becomes 6.46% at 540 nm wavelength. At f=72.5o the material shows a reduction in crystallinity and evolution of a hemispherical-type sub-micron surface textures. A Monte Carlo method (MCM) of simulation of the AZO film deposition shows that such an enhanced self-surface texturing of the films at higher f is possible.