• 제목/요약/키워드: test coupon

검색결과 79건 처리시간 0.027초

Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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Negative PR의 기밀 특성 (Hermetic Characteristics of Negative PR)

  • 최의정;선용빈
    • 반도체디스플레이기술학회지
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    • 제5권2호
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    • pp.33-36
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    • 2006
  • Many issues arose to use the Pb-free solder as adhesive materials in MEMS ICs and packaging. Then this study for easy and simple sealing method using adhesive materials was carried out to maintain hermetic characteristic in MEMS Package. In this study, Hermetic characteristic using negative PR (XP SU-8 3050 NO-2) as adhesive at the interface of Si test coupon/glass substrate and Si test coupon/LTCC substrate was examined. For experiment, the dispenser pressure was 4 MPa and the $200\;{\mu}m{\Phi}$ syringe nozzle was used. 3.0 mm/sec as speed of dispensing and 0.13 mm as the gap between Si test coupon and nozzle was selected to machine condition. 1 min at $65^{\circ}C$ and 15 min at $95^{\circ}C$ as Soft bake, $200\;mj/cm^2$ expose in 365 nm wavelength as UV expose, 1 min at $65^{\circ}C$ and 6 min at $95^{\circ}C$ as Post expose bake, 60 min at $150^{\circ}C$ as hard bake were selected to activation condition of negative PR. Hermetic sealing was achieved at the Si test coupon/ glass substrate and Si test coupon/LTCC substrate. The leak rate of Si test coupon/glass substrate was $5.9{\times}10^{-8}mbar-l/sec$, and there was no effect by adhesive method. The leak rate of Si test coupon/LTCC substrate was $4.9{\times}10^{-8}mbar-l/sec$, and there was no effect by dispensing cycle. Better leak rate value could be achieved to use modified substrate which prevent PR flow, to increase UV expose energy and to use system that controls gap automatically with vision.

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Can Coupon Holding Duration and Message Framing Increase the Effect of Push Notifications on Mobile Coupon Redemption? Evidence from A Randomized Field Experiment

  • Soonki Hwang;Jai-Yeol Son;Sunju Park;Kil-Soo Suh
    • Asia pacific journal of information systems
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    • 제33권3호
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    • pp.812-830
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    • 2023
  • We propose a mobile coupon strategy designed to increase the effect of push notifications on redemption. The proposed strategy recommends that firms deliver mobile coupons with distant expiration dates and remind them through push notifications framed negatively once these expiration dates become imminent, rather than frequently sending coupons with near expiration dates. We test the effectiveness of the proposed strategy using data collected through a randomized field experiment. The findings indicate that push notifications enhance coupon redemption rates for coupons that are held longer by customers than those that are recently received. Additionally, we found that sending negatively framed push notification messages to remind customers of imminent coupon expiration dates further resulted in higher coupon redemption rates. The findings can be employed to offer useful guidance on how to effectively design mobile coupons for achieving higher redemption rates.

Carbon Fabric/Epoxy 적층판의 인장-압축 피로거동 (Tension-Compression Fatigue Behavior of Carbon Fabric/Epoxy Laminates)

  • 김진봉;김태욱
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2001년도 춘계학술발표대회 논문집
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    • pp.60-64
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    • 2001
  • In this paper, the tension-compression fatigue test method and the fatigue life characteristics of carbon fabric/epoxy laminate coupon are presented. To avoid the buckling during the compression, a proper design for the test coupons is essential. The critical buckling loads for the coupons are calculated by assuming the coupons as columns under two types of fixed conditions. The first is that both ends of each coupon are perfectly clamped, the second is that both ends of each coupon are simply supported. The strain-load curves are obtained by compressing the representative coupons, on each surface of which a strain gage is attached. The buckling loads obtained from the tests are all between the two calculated critical buckling loads. All the coupons are broken by the compression during the fatigue tests. It is estimated to be the reason that the fatigue load causes delamination before the eventual failure of each coupon, and sequentially the micro-buckling in the delaminated region drives each coupon into fatigue failure during the compression. The S-N curve, the fatigue life characteristics of carbon fabric/epoxy is obtained.

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패밀리레스토랑의 판매촉진전략 방안에 관한 연구 - 쿠폰을 중심으로 - (A Study on the Sales Promotion Methods for Family Restaurant)

  • 진양호;전진화
    • 한국조리학회지
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    • 제7권3호
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    • pp.211-239
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    • 2001
  • A study is on the coupon which is one of the sales promotion methods for family restaurant. The factor of family restaurant coupon use in the study was analyzed based on theoretical study. In addition, difference of food service manners by behavior and demographic factor, and so by means of this factor was analyzed and was done t-Test and anova. As a result of this study, eight factors were found. This eight factors were named by researcher. Eight factors are as follows There are 1. factor taste, 2. factor choice, 3. factor expectation, 4. factor satisfaction, 5. factor durability, 6. factor convenience, 7. factor safety, 8. factor preference. These factors influence family restaurant coupon used by customer. And so we know that between demographic factor and food service manners are different. In the conclusion, the factor of family restaurant coupon use, by valuable sides and typical sides was presented as the sales promotion methods for coupon. First, valuable side endows coupon with value and so lead persistent purchase. Second, typical side cause interest and so leads repurchase. But in the future, continuous study should be go on for satisfaction of customer and effective marketing strategy of family restaurant.

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Effects of sizes and mechanical properties of fuel coupon on the rolling simulation results of monolithic fuel plate blanks

  • Kong, Xiangzhe;Ding, Shurong;Yang, Hongyan;Peng, Xiaoming
    • Nuclear Engineering and Technology
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    • 제50권8호
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    • pp.1330-1338
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    • 2018
  • High-density UMo/Zr monolithic nuclear fuel plates have a promising application prospect in high flux research and test reactors. The solid state welding method called co-rolling is used for their fabrication. Hot co-rolling simulations for the composite blanks of UMo/Zr monolithic nuclear fuel plates are performed. The effects of coupon sizes and mechanical property parameters on the contact pressures between the to-be-bonded surfaces are investigated and analyzed. The numerical simulation results indicate that 1) the maximum contact pressures between the fuel coupon and the Zircaloy cover exist near the central line along the plate length direction; as a whole the contact pressures decrease toward the edges in the plate width direction; and lower contact pressures appear at a large zone near the coupon corner, where de-bonding is easy to take place in the in-pile irradiation environments; 2) the maximum contact pressures between the fuel coupon and the Zircaloy parts increase with the initial coupon thickness; after reaching a certain thickness value, the contact pressures hardly change, which was mainly induced by the complex deformation mechanism and special mechanical constitutive relation of fuel coupon; 3) softer fuel coupon will result in lower contact pressures and form interfaces being more out-of-flatness.

OES를 이용한 질화막/산화막의 식각 스펙트럼 데이터 분석 (Nitride/Oxide Etch Spectrum Data Verification by Using Optical Emission Spectroscopy)

  • 박수경;강동현;한승수;홍상진
    • 한국전기전자재료학회논문지
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    • 제25권5호
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    • pp.353-360
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    • 2012
  • As semiconductor device technology continuously shrinks, low-open area etch process prevails in front-end etch process, such as contact etch as well as one cylindrical storage (OCS) etch. To eliminate over loaded wafer processing test, it is commonly performed to emply diced small coupons at stage of initiative process development. In nominal etch condition, etch responses of whole wafer test and coupon test may be regarded to provide similar results; however, optical emission spectroscopy (OES) which is frequently utilize to monitor etch chemistry inside the chamber cannot be regarded as the same, especially etch mask is not the same material with wafer chuck. In this experiment, we compared OES data acquired from two cases of etch experiments; one with coupon etch tests mounted on photoresist coated wafer and the other with coupons only on the chuck. We observed different behaviors of OES data from the two sets of experiment, and the analytical results showed that careful investigation should be taken place in OES study, especially in coupon size etch.

대형 할인 마트의 인쇄 쿠폰 발행이 소비자 구매 의도에 미치는 영향 (Effects of Printed-Saving Coupon on Purchasing Intention of Consumer Behavior in Major Discount Store)

  • 이광숙;곽보선
    • 한국인쇄학회지
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    • 제30권1호
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    • pp.21-33
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    • 2012
  • This research attempts to analyze the effect of printed-saving coupons distributed by major discount store on consumer purchasing intention. Those consumers having used printed-saving coupon in major discount store in Daejeon were selected as respondents. 121 copies were retreated from 150 questionnaires. For data analysis, frequency analysis for respondents' characteristics, Cronbach's alpha for reliability of analysis, and $X^2$ test of multi-regression analysis for testing hypothesis were utilized. The result of analysis shows 1) the way of using coupon is respectively different according to sex, age group, marital status, term of coupon, and the number of using coupon; 2) Attributes of coupon partially influence on purchasing intention of consumers. Only shopping cost cutting is insignificant, while keeping convenience, impulse buying, scheduled purchasing are significant. The most effective variable is scheduled purchasing, keeping convenience, and impulse buying influence on purchasing intension of consumers. Therefore, offering printed-coupon by major discount store is useful tool to induce consumers to planned purchasing.

외식업체의 어린이 대상 판매촉진 유형별 고객유인효과 분석 (Customer Attraction Effects of Restaurant Promotion for Kids)

  • 윤수온;신서영;양일선
    • 대한가정학회지
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    • 제46권10호
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    • pp.107-117
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    • 2008
  • The purpose of this study was to analyze customer attraction effects of restaurant promotion for kids. The questionnaires were distributed to 300 parents who have children under 12 years old and a total of 269 questionnaires were collected and used in analysis(usage rate 90.0%). The data was analyzed using SPSS 12.0 for descriptive analysis and paired t-test. The major results were as follows; First, customers mainly got information on coupon from mail. In case of premium and membership, the information was obtained when customers were visiting restaurants. Second, among the types of promotion for kids, coupon was mostly preferred by customers. 'Discount coupon' for the coupon, 'free gift' for the premium and 'pay-back' program for the membership were more preferable than other types of kids promotion. Third, A 'discount coupon' was more effective than 'free coupon'(p<.0l) in term of customer inducement. In case of premium, 'free gift' was more effective than 'lottery'(p<.05) and in case of membership, the customer attraction effect was not significantly different according to the types of membership. In case of coupon and membership, it was more effective in family restaurant than fastfood restaurant(p<.05), but the effect of premium was not significantly different in family vs fastfood restaurant. The results of the study revealed that 'coupon' was the most preferred type of promotion for kids and specifically customers preferred 'discount coupon', 'free gift' and 'pay-back program'.

인터넷 쇼핑몰에서의 e-쿠폰 속성, 지각된 위험이 사용자 만족도를 매개로 인터넷쿠폰의 지속적 사용의도에 미치는 영향 - 쿠폰유형과 성별의 조절효과를 중심으로 - (Effects of E-coupon attributes, Perceived risk in Internet shopping malls on Intention to continuously use online coupons through the User satisfaction - moderating effects of coupon type and gender -)

  • 심선희;김하균
    • 경영과정보연구
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    • 제30권2호
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    • pp.1-25
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    • 2011
  • 본 연구에서는 e-쿠폰 속성 요인과 지각된 위험이 인터넷쿠폰 사용자 만족도를 매개로 인터넷쿠폰의 지속적 사용의도에 어떠한 영향을 미치는지를 알아보기 위하여 20, 30대 인터넷쿠폰 사용자를 대상으로 설문조사를 실시하였다. e-쿠폰 속성 요인으로 경제성, 유희성, 신뢰성, 유용성을 설정하였으며 쿠폰 유형과 성별을 조절 변수로 사용하였다. 분석결과, 유희성, 유용성, 그리고 지각된 위험이 인터넷쿠폰 사용자 만족도에 유의한 영향을 미쳤으며, 인터넷쿠폰 사용자 만족도는 인터넷쿠폰의 지속적 사용의도에 유의한 영향을 미치는 것으로 나타났다. 또한 조절변수로 사용되어진 쿠폰유형과 성별이 인터넷쿠폰 사용자 만족도에 미치는 영향에 대한 집단 간 차이 검정결과, 쿠폰유형의 경우에는 신뢰성, 유용성이 조절효과가 있는 것으로 나타났으며 성별의 경우에는 신뢰성만이 조절효과가 있는 것으로 나타났다. 본 연구를 토대로 인터넷 쇼핑몰의 쿠폰 촉진 전략의 방향 및 구체적인 인터넷 쿠폰 촉진 믹스 전략에 있어서 시사점을 제공할 수 있으리라고 판단되며 소비자가 충분히 만족할 수 있는 신뢰성향이 높은 인터넷쿠폰 제공을 통하여 인터넷쿠폰 사용자 만족도를 강화할 필요가 있을 것으로 사료된다.

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