• 한국정밀공학회지
• /
• 제17권4호
• /
• pp.135-141
• /
• 2000

The major role of temperature sensors in thermal error compensation system of machine tools is improving machining accuracy by supplying reliable temperature data on the machine structure. This paper presents a new method for fault diagnosis of temperature sensors and recovery of faulted data to establish the reliability of thermal error compensation system. The detection of fault and its location is based on the correlation coefficients among temperature data from the sensors. The multiple linear regression model which is prepared using complete normal data is also used fur the recovery of faulted data. The effectiveness of this method was tested by comparing the computer simulation results and measured data in a CNC machining center.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2008년도 추계학술대회A
• /
• pp.1902-1907
• /
• 2008

The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.

• Transactions on Electrical and Electronic Materials
• /
• 제17권4호
• /
• pp.189-195
• /
• 2016

Micro Hotplate (MHP) is the key component in micro-sensors, particularly gas sensors. Indeed, in metal oxide gas sensors MOX, micro-heater is used as a hotplate in order to control the temperature of the sensing layer which should be in the requisite temperature range over the heater area, so as to detect the resistive changes as a function of varying concentration of different gases. Hence, their design is a very important aspect. In this paper, we have presented the design and simulation results of a meander micro heater based on three different materials - platinum, titanium and tungsten. The dielectric membrane size is 1.4 mm × 1.6 mm with a thickness of 1.4 μm. Above the membrane, a meander heating film was deposed with a thickness of 100 nm. In order to optimize the geometry, a comparative study by simulating two different heater thicknesses, then two inter track widths has also been presented. Power consumption and temperature distribution were determined in the micro heater´s structure over a supply voltage of 5, 6, and 7 V.

• 한국산업융합학회 논문집
• /
• 제26권6_2호
• /
• pp.1073-1082
• /
• 2023

Thermal sensors, also called thermal infrared wavelength sensors, measure temperature based on the intensity of infrared signals that reach the sensor. The infrared signals recognized by the sensor include infrared wavelength(0.7~3.0㎛) and radiant infrared wavelength(3.0~100㎛). Infrared(IR) wavelengths are divided into five bands: near infrared(NIR), shortwave infrared(SWIR), midwave infrared(MWIR), longwave infrared(LWIR), and far infrared(FIR). Most thermal sensors use the LWIR to capture images. Thermal sensors measure the temperature of the target in a non-contact manner, and the data can be affected by the sensor's viewing angle between the target and the sensor, the amount of atmospheric water vapor (humidity), air temperature, and ground conditions. In this study, the characteristics of three thermal imaging sensor models that are widely used for observation using unmanned aerial vehicles were evaluated, and the optimal application field was determined.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
• /
• pp.888-891
• /
• 2003

This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

• 센서학회지
• /
• 제16권6호
• /
• pp.407-412
• /
• 2007

For $VO_{2}$ sensors applicable to temperature measurement by using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were investigated systematically as a function of the annealing condition. The starting materials, vanadium pentoxide ($V_{2}O_{5}$) powders, were mixed with vehicle to form paste. This paste was screen-printed on $Al_{2}O_{3}$ substrates and then $VO_{2}$ thick films were heat-treated at $450^{\circ}C$ to $600^{\circ}C$, respectively, for 1 hr in $N_{2}$ gas atmosphere for the reduction. As results of the temperature vs. resistance property measurements, the electrical resistance of the $V_{2}O_{5}$ sensor in phase transition range was decreased by $10^{3.9}$ order. The presented critical temperature sensor could be used in fire-protection and control systems.

• 센서학회지
• /
• 제23권5호
• /
• pp.337-341
• /
• 2014

For various additives doped-$VO_2$ critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of $VO_2$ sensor, vanadium pentoxide ($V_2O_5$) powders were used, and CaO, SrO, $Bi_2O_3$, $TiO_2$, and PbO dopants were used, respectively. The $V_2O_5$ powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on $Al_2O_3$ substrates and then $V_2O_5$-based thick films were heat-treated at $500^{\circ}C$ for 2 hours in $N_2$ gas atmosphere for the reduction to $VO_2$. From X-ray diffraction analysis, $VO_2$ phases for pure $VO_2$, and CaO and SrO-doped $VO_2$ thick films were confirmed and their grain sizes were 0.57 to $0.59{\mu}m$. The on/off resistance ratio of the $VO_2$ sensor in phase transition temperature range was $5.3{\times}10^3$ and that of the 0.5 wt.% CaO-doped $VO_2$ sensor was $5.46{\times}10^3$. The presented critical temperature sensors could be commercialized for fire-protection and control systems.

• 한국지반공학회논문집
• /
• 제28권5호
• /
• pp.13-25
• /
• 2012

그라운드 앵커공법은 현재 우리나라에서 가장 일반적으로 사용되는 사면보강공법들 중 하나이다. 앵커로 보강된 사면의 안정성을 장기간 확인하기 위해서는 그라운드 앵커의 긴장력을 측정하는 것이 매우 중요하다. 그러나 현재 현장에서 주로 사용되는 스트레인게이지 및 V/W타입의 로드 셀은 전자기파에 의한 노이즈 발생이 크고 습기 또는 수분의 영향으로 인해 측정값에 오차가 발생할 수 있으며 자기열화 등으로 장기간의 모니터링에 한계가 있다. 또한 앵커의 개별 텐던에 발생하는 미세한 변화를 정확히 감지할 수 없는 단점이 있어 이를 개선할 수 있는 방안으로 광섬유 센서를 이용하여 강연선의 변형률을 측정할 수 있는 광섬유 센서 내장형 텐던이 개발되었다. 이 광섬유 센서 내장형 텐던은 단기간의 앵커 장력 측정에 성공적으로 적용된 사례가 보고되었으나 장기간에 걸친 장력 변화를 측정하기 위해서는 온도에 의한 광섬유 센서의 변형률을 보상하여야 한다. 이 논문에서는 광섬유 센서 내장형 텐던을 이용하여 그라운드 앵커의 장력모니터링 시 지중온도 변화에 의한 영향을 보상하는 실용적인 방안에 대하여 기술하였다. 먼저 실내실험을 통하여 광섬유 센서 내장형 텐던의 온도반응계수(${\beta}^{\prime}$)를 $2.0{\times}10^{-5}/^{\circ}C$로 결정하고 실제 현장에 설치된 광섬유 센서를 이용하여 깊이별 지중온도 변화값을 측정하였다. 연구 대상지역(여수)의 기상청 지중온도 측정 결과 자료와의 비교를 통하여 결정된 온도반응계수(${\beta}^{\prime}$)를 이용한 광섬유 센서 내장형 텐던의 온도반응 성능을 검증하였다. 최종적으로 광섬유 센서 내장형 텐던을 이용하여 실제 사면에 설치된 인장형 앵커와 압축형 앵커의 계절별 긴장력을 모니터링하고 기상청 지중온도 측정자료와 온도반응계수를 이용하여 온도보상을 실시하여 기존 V/W타입의 로드 셀 측정 결과와 비교하였다. 제안된 광섬유 센서 내장형 텐던의 온도반응계수와 기상청 지중온도 측정결과를 이용한 앵커의 온도보상 방법에 의해 측정된 긴장력 모니터링 결과가 계절에 따른 지중온도 변화에 상관없이 로드 셀 결과와 일관성 있게 비교되어 제안된 온도보상 방법이 매우 실용적이며 합리적인 것으로 나타났다.

• 센서학회지
• /
• 제31권2호
• /
• pp.79-84
• /
• 2022

Self-powered sensors play an important role in everyday life, and they cover a wide range of topics. These sensors are meant to measure the amount of relevant motion and transform the biomechanical activities into electrical signals using triboelectric nanogenerators (TENGs) since they are sensitive to external stimuli such as pressure, temperature, wetness, and motion. The present advancement of TENGs-based self-powered wearable, implantable, and patchable sensors for healthcare monitoring, human body motion, and medication delivery systems was carefully emphasized in this study. The use of TENG technology to generate electrical energy in real-time using self-powered sensors has been the topic of considerable research among various leading scholars. TENGs have been used in a variety of applications, including biomedical and healthcare physical sensors, wearable devices, biomedical, human-machine interface, chemical and environmental monitoring, smart traffic, smart cities, robotics, and fiber and fabric sensors, among others, as efficient mechanical-to-electric energy conversion technologies. In this evaluation, the progress accomplished by TENG in several areas is extensively reviewed. There will be a discussion on the future of self-powered sensors.

• Current Optics and Photonics
• /
• 제5권3호
• /
• pp.238-242
• /
• 2021

In this paper, we present an in line plastic-optical-fiber (POF) temperature sensor based on intensity modulation. The in line POF temperature sensor is composed of a POF, including an in-fiber micro hole filled with reversible thermochromic material, the transmittance of which depends on temperature. The reversible thermochromic material was cobalt chloride/polyvinyl butyral gel. A cobalt chloride solution of concentration 30.8 mM was formulated using 10% water/90% ethanol (v/v) solution, and gelled by dissolving polyvinyl butyral in this solution. Four types of in line POF sensors, with in line micro holes of four different diameters, were fabricated to measure temperature in the range of 25 to 75 ℃. The output optical power of all of these in line POF temperature sensors was inversely proportional to the temperature; the relation between output power and temperature was approximately linear, and the sensitivity was proportional to the diameter of the in-fiber micro hole. The experimental results indicate that an in line POF sensor can be used effectively for measuring moderate temperatures.