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http://dx.doi.org/10.5369/JSST.2007.16.6.407

Characterization of VO2 thick-film critical temperature sensors by heat treatment conditions  

Song, K.H. (Department of Materials Science and Engineering, University of Seoul)
Yoo, K.S. (Department of Materials Science and Engineering, University of Seoul)
Publication Information
Journal of Sensor Science and Technology / v.16, no.6, 2007 , pp. 407-412 More about this Journal
Abstract
For $VO_{2}$ sensors applicable to temperature measurement by using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were investigated systematically as a function of the annealing condition. The starting materials, vanadium pentoxide ($V_{2}O_{5}$) powders, were mixed with vehicle to form paste. This paste was screen-printed on $Al_{2}O_{3}$ substrates and then $VO_{2}$ thick films were heat-treated at $450^{\circ}C$ to $600^{\circ}C$, respectively, for 1 hr in $N_{2}$ gas atmosphere for the reduction. As results of the temperature vs. resistance property measurements, the electrical resistance of the $V_{2}O_{5}$ sensor in phase transition range was decreased by $10^{3.9}$ order. The presented critical temperature sensor could be used in fire-protection and control systems.
Keywords
vanadium oxide; temperature sensor; critical temperature resistor; thick film;
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1 J. B. Goodenough and H. Y-P. Hong, 'Structures and a two-band model for the system $V_1-xCr_xO_2$', Physical Review B, vol. 8, no. 4, pp. 1323-1331, 1973   DOI
2 유광수, 김종만, 정형진, '반도성 $VO_2$계 급변온도센서의 전기적 특성', 한국세라믹학회지, 제30권, 제10호, pp. 866-870, 1993
3 Y. Muraoka, Y. Veda, and Z. Hirai, 'Large modification of the metal-insulator transition temperature in strAlNed $VO_2$ films grawn $TiO_2$ substrates', J. Phys and Chem of Solids, vol. 63, pp. 965-967, 2002   DOI   ScienceOn
4 T. Marutama and Y. Ikuta, 'Vanadium dioxide thin films prepared by chemical vapor deposition from vanadium (III) acetylacetonate', J. Mater. Sci., vol. 28, pp. 5073-5078, 1993   DOI
5 G. Micocci, A. Serra, A. Tcpore, S. Capone, R. Rella, and P. Siciliano, 'Properties of vanadium oxide thin films for ethanol sensor', J. Vac. Sci. Technol. A, vol. 15, no. 1, pp. 34-38, 1997   DOI   ScienceOn
6 Y. Ningyi, L. Jinhua, and L. Chenglu, 'Valence reduction process from sol-gel $V_2O_5$ to $VO_2$ thin films', Appl. Surf. Sci., vol. 191, pp. 176-180, 2002   DOI   ScienceOn
7 J. Verkelis, Z. Bliznikas, K. Breive, V. Dikinis, and R. Sarmaitis, 'Vanadium oxides thin films and fixed-temperature heat sensor with memory', Sensors and Actuators A, vol. 68, pp. 338-343, 1998   DOI   ScienceOn
8 C. H. Griffiths and H. K. Eastwood, 'Influence of stoichiometry on the metal-semiconductor transition in vanadium dioxide', J. Appl. Phys., vol. 45, no. 5, pp. 2201-2206, 1974   DOI   ScienceOn