• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.420-424
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• 2012

We have investigated temperature dependence and long-term change of humidity measurement from 32 relative humidity sensors. The readings of the humidity sensors depended not only the reference humidity, but also temperature of the chamber. Approximately, the temperature dependence of the humidity sensor in average was 0.05 %R.H./$^{\circ}C$ in the temperature range from $5^{\circ}C$ to $55^{\circ}C$. For humidity sensors that have an internal temperature compensation circuit, the resulting temperature dependence was weaker by 20%. It should be also noted that for the humidity sensors used in this work underwent ${\pm}3$ %R.H. change per year for level of confidence of 95%. The users of relative humidity sensors may refer this value as a minimum change when they set the calibration interval of the humidity sensors.

• Journal of Sensor Science and Technology
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• v.14 no.6
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• pp.395-401
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• 2005

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

• Journal of Sensor Science and Technology
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• v.26 no.3
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• pp.179-185
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• 2017

This article describes the characteristics of nondispersive infrared carbon dioxide gas sensor according to the temperatures and humidifies. In this researches, a thermopile sensor that included application-specific integrated circuit (ASIC) was used and the White-cell structure was implemented as an optical waveguide. The developed sensor modules were installed in gas chamber and then the temperature of gas chamber has been increased from 283 K to 313 K with 10K temperature step. In order to analyze the effects of humidity levels, the relative humidity levels were changed from 30 to 80%R.H. with small humidifier. Then, the characteristics of sensor modules were acquired with the increment of carbon dioxide concentrations from 0 to 2,000 ppm. When the initial voltages of sensors were compared before and after humidifying the chamber at constant temperature, the decrements of the output voltages of sensors are like these: 9mV (reference infrared sensor), 41 mV (carbon dioxide sensor), 2 mV (temperature sensor). With the increment of ambient temperature, the averaged output voltage of carbon dioxide sensor was increased 19 mV, however, when the humidity level was increased, it was decreased 14mV. Based upon the experimental results, the humidity effect could be alleviated by the increment of temperature, so the effects of humidity and temperature could be only compensated by the ambient temperature itself. The estimated carbon dioxide concentrations showed 10% large errors below 200 ppm, however, the errors of the estimations of carbon dioxide concentrations were less than ${\pm}5%$ from 400 to 2,000 ppm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.368-371
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• 2003

The humidity sensors with a stable characteristics and gas sensors operating at room temperature have been fabricated, and a multi-functional sensor system which has gas sensor, humidity sensor, temperature sensor and control circuit has been applied to the microwave oven system. For a suitable cooking state, the humidity sensors was more applicable to heating and defrosting condition than gas sensors, however, the dynamic characteristics of gas sensors were obtained in the easy burning food such as pop corn.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.343-348
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• 2009

$NiO{\cdot}(Co_{0.25}Mn_{0.75})_2O_3$(Mn-Ni-Co) and $Ba_{0.5}Sr_{0.5}TiO_3$(BST) thick films were screen printed on Pt patterned alumina substrate to investigate the effects of sintering temperature on humidity and temperature sensing properties of ceramic sensors. A raise in sintering temperature increased resistance and B constant of the Mn-Ni-Co temperature sensor. This may have derived from the synergic effects of the reduction in charge carriers caused by the substitution of Co for Mn as well as the formation of microcracks from the difference in thermal expansion coefficients. Dependence of resistance on humidity of the Mn-Ni-Co temperature sensor, however, was not found. BST films sintered at temperatures in the range of $1100^{\circ}C$ to $1150^{\circ}C$ showed excellent humidity sensing properties. The BST humidity sensor was faster in its response than the Mn-Ni-Co temperature sensor. The humidity sensor, however, proved to be unstable under various temperatures, suggesting a need for a temperature stabilizing device. In contrast, the Mn-Ni-Co temperature sensor was stable under humid conditions.

• Journal of Sensor Science and Technology
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• v.30 no.4
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• pp.243-249
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• 2021

Humidity is an important physical quantity that is closely related with the quality of everyday life as well as the quality control of products in various industries. Here, we have developed a divided-flow type humidity generator of which humidity generation is faster than the saturator-based humidity generator in ppm level. The operation principle of the divided-flow humidity generator is first introduced. Then, the performance of the divided-flow humidity generator is verified by testing the radiosonde humidity sensor at low temperature. As a result, the humidity generated from the divided-flow humidity generator is consistent with the saturator-based precision humidity generator within 1.6% relative humidity in the range from 10% to 40% at -45 ℃. It is also found that the radiosonde humidity sensor shows measurement errors by 3% - 5% at -45 ℃ when it is only calibrated at room temperature. The response times of radiosonde humidity sensor using the divided-flow humidity generator are between about 2 and 9 minutes, whereas those by the saturator-based humidity generator are about 20 minutes. In this regard, the divided-flow humidity generator has a merit in terms of fast humidity changes for the calibration of radiosonde humidity sensors at low-temperatures.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.347-348
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• 2007

On-chip micro humidity sensor, using $CN_x$ films for the sensing material, was designed, simulated, and fabricated with Op amp based readout circuit and diode temperature sensors. To compensate the temperature and other gases, two methods were applied. One is wheatstone-bridge with reference FET that eliminates other undesirable chemical species, and the other is a diode temperature sensor to compensate the temperature effect. $CN_x$ film can be a new humidity sensing material, and has a strong potential to adapt to smart sensors or multi-sensors using MEMS or nano-technology. A particular design technology for integration of sensors and systems together was proposed that whole fabrication process could be achieved by a standard CMOS process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.25-28
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• 2000

A capacitance-type humidity sensors in which porous silicon layer is used as humidity-sensing material was developed. This sensors was fabricated monolithically to be compatible with the typical IC process technology except for the formation of porous silicon layer. As the sensors is made as a mesa structure, the correct measurement of capacitance is expected because it can remove the effect of the parasitic capacitance from the bottom layer and another junctions. To do this, the sensor was fabricated using process steps such as localized formation of porous silicon, oxidation of porous silicon layer and etching of oxidized porous silicon layer. From completed sensors, capacitance response was measured on the relative humidity of 25 to 95% at room temperature. As the result the measured capacitance showed the increase over 300% at the low frequency of 120Hz, and showed little dependence on the temperature between 10 to $40^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.773-777
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• 2002

In this study, we analyzed the LPG and LNG sensitivity measurement and voltage variation using catalytic type gas sensor characteristics in catalytic combustion type gas detecter sensors. gas detector shall operate as intended when exposed for 24 hours to air having a relative humidity of 0~85 percent at a temperature of $20[{\mu}m]$ and humidity of 45 percent at a temperature of $-10{\sim}40[^{\circ}C]$ the gas detecter sensors are to be subjected to operation for 210 days in an area that has been detemined to be equivalent to a typical residential atmosphere with an air velocity of 50 [cm/sec]. The source of energy for a gas detector sensors employing a supplementary basic circuit is energized from a separate source of supply direct applied voltage 2.1[V], 2.2[V], 2.3[V]. As a result, it was confirmed that the relative humidity and temperature by regression each analysis, compared to the LPG characteristic graph and methane characteristics graph by a relative humidity of 0 ~ 85 [%] at a temperature range of $-10{\sim}40[^{\circ}C]$ show a similar linear pattern on the whore.

• Fashion & Textile Research Journal
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• v.21 no.6
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• pp.697-707
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• 2019

This review paper deals with materials, classification, and a current article investigation on smart textile sensors for wearable vital signs monitoring (WVSM). Smart textile sensors can lose electrical conductivity during vital signs monitoring when applying them to clothing. Because they should have to endure severe conditions (bending, folding, and distortion) when wearing. Imparting electrical conductivity for application is a critical consideration when manufacturing smart textile sensors. Smart textile sensors fabricate by utilizing electro-conductive materials such as metals, allotrope of carbon, and intrinsically conductive polymers (ICPs). It classifies as performance level, fabric structure, intrinsic/extrinsic modification, and sensing mechanism. The classification of smart textile sensors by sensing mechanism includes pressure/force sensors, strain sensors, electrodes, optical sensors, biosensors, and temperature/humidity sensors. In the previous study, pressure/force sensors perform well despite the small capacitance changes of 1-2 pF. Strain sensors work reliably at 1 ㏀/cm or lower. Electrodes require an electrical resistance of less than 10 Ω/cm. Optical sensors using plastic optical fibers (POF) coupled with light sources need light in-coupling efficiency values that are over 40%. Biosensors can quantify by wicking rate and/or colorimetry as the reactivity between the bioreceptor and transducer. Temperature/humidity sensors require actuating triggers that show the flap opening of shape memory polymer or with a color-changing time of thermochromic pigment lower than 17 seconds.