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http://dx.doi.org/10.5369/JSST.2005.14.6.395

Development of a hygroscopic polymer-coated QCM humidity sensor and its characteristics  

Kwon, Su-Yong (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
Kim, Jong-Chul (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
Choi, Byung-Il (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
Nham, Hyun-Soo (Temperature-Humidity Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
Publication Information
Journal of Sensor Science and Technology / v.14, no.6, 2005 , pp. 395-401 More about this Journal
Abstract
A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.
Keywords
QCM sensor; Humidity sensor; PMMA; Linearity and response time;
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