• Journal of Surface Science and Engineering
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• v.32 no.3
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• pp.239-243
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• 1999

At Present, 200mm wafer technology is being applied for commercial fabrications of 64, 128, and 256 M DRAM devices, and 300mm technology will be evolved for 1G DRAM devices in the early 21th century, recognizing limitations of several process technologies. In particular recognition has been realized in harmful effects of surface contamination of trace metals introduced during devicing processes. Such a guide line for surface metal contamination has been proposed as 1E9 and 1E10 atoms/$\textrm{cm}^2$ of individual metal contamination for wafering and devicing of 1G DRAM, respectively, and so its measurement limit should be at least 1E8 atoms/$\textrm{cm}^2$. The detection limit of present measurement systems is 2E9 atoms/$\textrm{cm}^2$ obtainable with TRXFA(Total Reflection X-Ray Fluorescence Analysis). TRXFA is nondestructive and the simplest in terms of operation, and it maps the whole wafer surfaces but needs detection improvement. X-Ray intensity produced with synchrotron accelerator is much higher than that of conventional X-ray sources by order of 4-5 magnitudes. Hence theoretically its reactivity with silicon surfaces is expected to be much higher than the conventional one, realizing improvement of detection limit. X-ray produced with synchrotron accelerator is illuminated at a very low angle with silicon wafer surfaces such as 0.1 degree and reflects totally. Hence informations only from surface can be collected and utilized without overlapping with bulk informations. This study shows the total reflection phenomenon and quantitative improvement of detection limit for metallic contamination. It is confirmed that synchrotron X-ray can be a very promising alternative for realizing improvement of detection limit for the next generation devices.

• Journal of Korean Society for Atmospheric Environment
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• v.15 no.4
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• pp.417-428
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• 1999

The measurement of VOSCs(volatile organic sulfur compounds) in the air is nowadays a very important environmental research field. It is, however, very difficult because the concentration of the VOSC in ambient air is usually very low and the high reactivity makes it difficult to keep in container without loss of recovery. In this study, sampling method with cryogenic preconcentration is evaluated for analysis of atmospheric VOSC such as $CH_3SH,\;CH_3CH_2SH,\;CH_3SCH_3,\;CS_2,\;CH_3SSCH_3,\;CH_3SCH_2SCHA_3,\;and\;C_2H_5SSC_2H_5$ analyzed by GC-MS or GC-FID. Repeatabilities of measurement accompanied with preconcentration for 3-successive runs were in the range of 0.2~1.0% as a relative standard deviation. Stabilities up to 13 days were measured in 6 L canister and 10 L tedlar bag filled with VOSCs in ppb level. Higher stability was observed in tedlar bag as compared to canister with glass coated inner walls, and thiol compounds show dramatic losses in canister within 2~3 days. It is found that recovery over 70% was obtained in a week for all tested VOSCs when the compounds from ambient air matrix were stored in tedlar bag. It is also found that the stabilities of VOSCs are depending on humidity and coexisting compounds in matrix gas due to sample adsorption onto inner surface and reactivity. The results indicate the possibility and limitations of VOSC analysis in ambient air using container sampling method with cryogenic preconcentration.

• Journal of Hydrogen and New Energy
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• v.31 no.1
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• pp.1-7
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• 2020

The synthesis and catalytic activities over vanadium carbides were examined for ammonia decomposition reaction to produce the hydrogen. In particular, the comparison of vanadium nitrides were made on the ammonia decomposition reaction. The experimental data exhibited that BET surface areas ranged from 5.2 ㎡/g to 25.6 ㎡/g and oxygen uptake values varied from 3.8 μmol/g to 31.3 μmol/g. It is general that vanadium carbides (VC) were observed to be superior to vanadium nitrides for ammonia decomposition reaction. The primary reason for these differences were thought to be related to the extent of electronegativity between these materials. Most of vanadium carbide crystallites were exceeded by Pt/C crystallite. We assumed that the activities for vanadium carbide crystallites (VC) were comparable to or even higher than that determined for the Pt/C crystallite.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.3
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• pp.185-189
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• 2017

Recently, titanium alloys have been widely used in aerospace, biomedical engineering, and military industries due to their high strength to weight ratio and corrosion resistance. However, it is well known that titanium alloys are difficult-to-cut materials because of a poor machinability characteristic caused by low thermal conductivity, chemical reactivity with all tool materials at high temperature, and high hardness. To improve the machinability of titanium alloys, cryogenic cooling with LN2 (Liquid Nitrogen) and nanofluid MQL (Minimum Quantity Lubrication) technologies have been studied while turning a Ti-6Al-4V alloy. For the analysis of turning process characteristics, the cutting force, the coefficient of friction, and the surface roughness are measured and analyzed according to varying lubrication and cooling conditions. The experimental results show that combined cryogenic cooling and nanofluid MQL significantly reduces the cutting forces, coefficients of friction and surface roughness when compared to wet condition during the turning process of Ti-6Al-4V.

• Journal of Environmental Health Sciences
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• v.29 no.1
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• pp.34-42
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• 2003

The objective of this study is to investigate the waste recycling possibility, practicability, economic efficiency and acid gas sorbent use of the hard-shelled mussel. This study is to investigate the hydration/calcination reaction and fixed bed reactor. The physical-chemical characteristics of the hard-shelled mussel were analyzed by ICP SEM-EDX, BET and pore volume. Thus, the results could be summarized as follows; Hard-shelled mussel can be used as iron-manufacture and chemical sorbents considering more than 53.7% of the mussel is lime content. The SO$_2$removal efficiency of the hard-shelled mussel after calcined hydration increased thirty times as a result of the higher pore size, specific surface area and pore volume. Also, the CaO content, pore volume, pore size distribution and specific surface area greatly influenced the SO$_2$ and NOx removal reactivity. The optimum particle diameter average of hard-shelled mussel was $\pm$100 mesh, which was applied to the sorbent on the medium/small scale waste incinerator and flue gas desulfurization processes.

• Journal of Powder Materials
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• v.24 no.3
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• pp.242-247
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• 2017

In this study, the electroless nickel plating method has been investigated for the coating of Ni nanoparticles onto fine Al powder as promising energetic materials. The adsorption of nickel nanoparticles onto the surface of Al powders has been studied by varying various process parameters, namely, the amounts of reducing agent, complexing agent, and pH-controller. The size of nickel nanoparticles synthesized in the process has been optimized to approximately 200 nm and they have been adsorbed on the Al powder. TGA results clearly show that the temperature at which oxidation of Al mainly occurs is lowered as the amount of Ni nanoparticles on the Al surface increases. Furthermore, the Ni-plated Al powders prepared for all conditions show improved exothermic reaction due to the self-propagating high-temperature synthesis (SHS) between Ni and Al. Therefore, Al powders fully coated by Ni nanoparticles show the highest exothermic reactivity: this demonstrates the efficiency of Ni coating in improving the energetic properties of Al powders.

• Microbiology and Biotechnology Letters
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• v.27 no.4
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• pp.344-348
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• 1999

A competitive enzyme-linked immunosorbent assay(ELISA) for the detection of antibodies to Treponema pallidum(T.pallidum) was developed and evaluated. T.apllidum lysate was immobilized on the surface of microplate wells and horseradish peroxidase labeled human anti-T.pallidum lysate was immobilized on the surface of microplate wells and horseradish peroxidase labeled human anti-T.pallidum was prepared and used as a tracer. The performance of the competitive ELISA was evaluated by using different specimens. The competitive ELISA showed a sensitivity of 100% in a performance panel consisting of serum and plasma with anti-T.pallidum reactivity ranging from negative to strong positive by FTA-ABS test system and 120 plasma samples positive by TPHA. The specificity of the competitive ELISA was 100% in 1,200 plasma samples collected from healthy seronegative blood donors. These results suggest that the competitive ELISA provides an excellent assay method for the detection of antibodies to T.pallidum, and may be particularly useful for serological blood screening of syphilis.

• Journal of the Korean Society of Industry Convergence
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• v.10 no.2
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• pp.73-80
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• 2007

The preparation of oil absorbent using waste polyurethane was studied. And the effects of shape, size, and contents of waste polyurethane foam was investigated. The waste foam was treated in shape of powder, cube and bar type generated from rigid sandwich panel process. The tests for flexural strength, combustibility, and water absorptivity were carried out to investigate the mechanical and physical properties of the recycled foams. And the cell microstructure was evaluated through Scanning Electron Micrograph. The recycled foam containing powder-shaped underfilled and showed poor properties that was generated through reactivity of the resins and increasing of slurry viscosity. For the recycled foam with the cube and bar-shaped, the underfilling was caused by interference between the waste PUFs and increasing surface areas of PUF. Low cell density, non-uniformity of cell shape and size, and low adhesion of the boundary surface (new/recycled) was showed as a result of the poor properties. Considering underfilling and the properties of PUF (new/recycled), maximum recycle contents were less than 20 wt% for the powder and above 40 wt% for the cube and bar.

• Journal of environmental and Sanitary engineering
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• v.20 no.4 s.58
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• pp.45-50
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• 2005

Titania gel formations were prepared by sol-gel method using titanium(IV) chloride $(TiCl_4)$, and its characteristics were analyzed by varying the $epoxide/TiCl_4$ ratio and the amount of water In the end, titania $(TiO_2)$ aerogel were prepared using supercritical drying process. VOCs such as benzene, toluene, and m-xylene (BTX) were oxidized using prepared titania aerogel and commercially available $TiO_2$, and its performance was compared. The surface area, pore volume, and average pore diameter of 1,2-epoxybutane are significantly smaller than the propylene oxide. And the titania aerogels with 6 moi of epoxides have high surface areas, pore volumes, and average pore diameters. As a result of photo-oxidation, conversion of benzene was reached about $70\%$, and other reactants were reached about $60\%$ similarly. The conversion of BTX was increased as inlet concentration decreased. The reactivity of titania calcined at $600^{\circ}C$ was greater than $400^{\circ}C$ and $800^{\circ}C$. Water is required as a reactants for the oxidation of VOCs, and the continuous consumption of hydroxyl radicals required replenishments to maintain catalyst activity. The activity ratio increased with increasing reaction time when enough amount of water was present in the reactor.

• Journal of Surface Science and Engineering
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• v.28 no.6
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• pp.368-375
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• 1995

Thermal CVD method is in general used for the fabrication of TiC/$Al_2O_3$-coated carbide tools. The growth of TiC layer and the coating morphology depended on the chemical composition of the hard metal substrate on which the tool properties were strongly influenced. TiC-coated layer was grown by the diffusion of carbon from the substrate, whereas the growth of $Al_2O_3$ layer was unrelated to the composition of substrate. In the nitride hard coatings of Zr, Nb and Mo metals deposited on high speed steel substrate by magnetron sputtering, the reactivity of the metal elements was decreased with increasing group number in one period of the periodic system. The hard material films exhibited the highest adhesion with the chemical composition of stoichiometry or substoichiometry. The critical load as a measure of adhesion was evaluated using scratch tester. The CVD tools indicated the values of 80 and 40N in the coated layers with proper bonding to the substrate and with $\eta$ phase of 1$\mu\textrm{m}$ in the interface respectively, but the nitride films prepared by sputtering of PVD showed only the values between 10 and 20N.