• 제목/요약/키워드: surface pretreatment

검색결과 419건 처리시간 0.024초

NH4OH용액이 반도체 소자용 구리 박막 표면에 미치는 영향 (Cleaning Effects by NH4OH Solution on Surface of Cu Film for Semiconductor Devices)

  • 이연승;노상수;나사균
    • 한국재료학회지
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    • 제22권9호
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    • pp.459-464
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    • 2012
  • We investigated cleaning effects using $NH_4OH$ solution on the surface of Cu film. A 20 nm Cu film was deposited on Ti / p-Si (100) by sputter deposition and was exposed to air for growth of the native Cu oxide. In order to remove the Cu native oxide, an $NH_4OH$ cleaning process with and without TS-40A pre-treatment was carried out. After the $NH_4OH$ cleaning without TS-40A pretreatment, the sheet resistance Rs of the Cu film and the surface morphology changed slightly(${\Delta}Rs:{\sim}10m{\Omega}/sq.$). On the other hand, after $NH_4OH$ cleaning with TS-40A pretreatment, the Rs of the Cu film changed abruptly (${\Delta}Rs:till{\sim}700m{\Omega}/sq.$); in addition, cracks showed on the surface of the Cu film. According to XPS results, Si ingredient was detected on the surface of all Cu films pretreated with TS-40A. This Si ingredient(a kind of silicate) may result from the TS-40A solution, because sodium metasilicate is included in TS-40A as an alkaline degreasing agent. Finally, we found that the $NH_4OH$ cleaning process without pretreatment using an alkaline cleanser containing a silicate ingredient is more useful at removing Cu oxides on Cu film. In addition, we found that in the $NH_4OH$ cleaning process, an alkaline cleanser like Metex TS-40A, containing sodium metasilicate, can cause cracks on the surface of Cu film.

The effect of denture base surface pretreatments on bond strengths of two long term resilient liners

  • Kulkarni, Rahul Shyamrao;Parkhedkar, Rambhau
    • The Journal of Advanced Prosthodontics
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    • 제3권1호
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    • pp.16-19
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    • 2011
  • PURPOSE. Purpose of this study was to evaluate effect of two surface treatments, sandblasting and monomer treatment, on tensile bond strength between two long term resilient liners and poly (methyl methacrylate) denture base resin. MATERIALS AND METHODS. Two resilient liners Super-Soft and Molloplast-B were selected. Sixty acrylic resin (Trevalon) specimens with cross sectional area of $10{\times}10$ mm were prepared and divided into two groups of 30 specimens each. Each group was surface treated (n = 10) by sandblasting (250 ${\mu}$ alumina particles), monomer treatment (for 180 sec) and control (no surface treatment). Resilient liners were processed between 2 poly(methyl methacrylate) surfaces, in the dimensions of $10{\times}10{\times}3$ mm. Tensile strength was determined with Instron Universal testing machine, at a crosshead speed of 5 mm/min; and the modes of failure (adhesive, cohesive or mixed) were recorded. The data were analyzed using one-way ANOVA, followed by Tukey HSD test (${\alpha}$= 0.05). RESULTS. Monomer pretreatment of acrylic resin produced significantly higher bond strengths when compared to sandblasting and control for both resilient liners (P < .001). Sandblasting significantly decreased the bond strength for both the liners when compared to monomer pretreatment and control (P < .001). Mean bond strength of Super-Soft lined specimens was significantly higher than Molloplast-B in various surface treatment groups (P < .05). CONCLUSION. Surface pretreatment of the acrylic resin with monomer prior to resilient liner application is an effective method to increase bond strength between the base and soft liner. Sandblasting, on the contrary, is not recommended as it weakens the bond between the two.

전처리 조건에 따른 PET 섬유 집합체의 가수분해 및 흡수성 거동 연구 (Pretreatment condition Optimization of Hydrolysis and Water Absorption Behavior of PET Fibrous Assembly)

  • 이준희;이광우;서말용;강지만;김북성
    • 한국염색가공학회:학술대회논문집
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    • 한국염색가공학회 2012년도 제46차 학술발표회
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    • pp.88-88
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    • 2012
  • Applied decanol and nonanol provided more weight loss than applied heptanol and octanol. PET using decanol showed the highest weight loss than other alcohols applied. Sodium hydroxide caused weight loss in PET fabrics because terephthalic acid and ethylene glycol were separated by the hydrolysis of the ester group in the PET chains. The terephthalic acid was neutralized to disodium terephthalate and the reaction results in weight loss in the PET fabrics. The weight loss increased with increasing hydrolysis time because disodium terepthalate was water soluble and the reaction was not reached at equilibrium. Pretreatment alcohols increased water absorption, especially in case of PET applied decanol revealed the highest water absorption. PET applied decanol showed 400% of initial water absorption, and PET applied nonanol revealed 250% of initial water absorption. However, the pristine PET showed 90% initial water absorption, and it revealed 230% maximum water absorption as compared to other alcohols. Also, PET applied decanol, nonanol, octanol and heptanol showed 600%, 400%, 350% and 300% maximum water absorption, respectively. The result implied alcohol length affected on water absorption of PET fibrous assembly. This implies that the microvoid of the PET surface hold water molecules. Surface morphology of PET appears that the pretreatment reagent attacks almost entire surface of the fiber, causing surface etching. As the surface etching progresses, it propagates inside the fiber, resulting in the formation of elongated cavities on the surface.

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극초단파 전처리를 적용한 하수슬러지 혐기성소화에서 메탄수율 최적화 (Optimization of Methane Yield in Anaerobic Digestion of Sewage Sludge with Microwave Pretreatment)

  • 박운지;이관재;이동준;이서로;최유진;홍지영;양동석;임경재
    • 한국농공학회논문집
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    • 제62권2호
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    • pp.17-29
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    • 2020
  • The objective of this study was to find an optimum methane yield condition in anaerobic digestion of sewage sludge with microwave pretreatment. The pretreatment process was carried out using a lab scale industrial microwave unit (2,450 MHz frequency). The digestion efficiency of pretreated sludge was evaluated by biochemical methane potential (BMP) test. Box-Behnken design and Response Surface Analysis (RSA) were applied to determine the optimal combination of sludge mixing ratio (0 to 100%), power (400 to 1600 W), holding time (0 to 10 min) and pretreatment temperature (60 to 100℃). BMP test results showed that Volatile Solid (VS) removal efficiency was up to 48% at a condition of 0% for mixing ratio, 1600 W for power, 5 min for holding time, and 80℃ for pretreatment temperature. Methane production was up to 832.3 mL/g VSremoved at a condition of 50% for mixing ratio, 1000 W for power, 5 min for holding time, and 80℃ for pretreatment temperature. The results of the variance analysis (ANOVA) showed that the p-value of the power and pretreatment temperature among the independent variables were significant (p<0.05), and in particular, the pretreatment temperature significantly affected on the solubilization and methane production. The optimum condition for the maximum methane yield (847 mL/g VSremoved) was consist of 38.4% of mixing ratio, 909.1 W of power, 4.1 min of holding time, and 80℃ of temperature within the design boundaries.

Optimization of Lipase Pretreatment Prior to Lipase Immobilization to Prevent Loss of Activity

  • Lee, Dong-Hwan;Kim, Jung-Mo;Shin, Hyun-Yong;Kim, Seung-Woo
    • Journal of Microbiology and Biotechnology
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    • 제17권4호
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    • pp.650-654
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    • 2007
  • In our previous work, a method of pretreating lipase was developed to prevent loss of its activity during covalent immobilization. In this study, Rhizopus oryzae lipase was pretreated before immobilization and then immobilized on a silica gel surface. The effects of the various materials and conditions used in the pretreatment stage on the activity of immobilized lipase were investigated. Immobilized lipase pretreated with 0.1% of soybean oil had better activity than those pretreated with other materials. The optimal temperature, agitation speed, and pretreating time for lipase pretreatment were determined to be $40^{\circ}C$, 200rpm, and 45min, respectively. The activity of immobilized soybean oil pretreated lipase was 630U/g matrix, which is 20 times higher than that of immobilized non-pretreated lipase. In addition, immobilized lipase activity was maintained at levels exceeding 90% of its original activity after 10 reuses.

Bioethanol Production Using Lignocellulosic Biomass - review Part I. Pretreatments of biomass for generating ethanol

  • Sheikh, Mominul Islam;Kim, Chul-Hwan;Yesmin, Shabina;Lee, Ji-Yong;Kim, Gyeong-Chul;Ahn, Byeong-Il;Kim, Sung-Ho;Park, Hyeon-Jin
    • 펄프종이기술
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    • 제42권5호
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    • pp.1-14
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    • 2010
  • Bio-ethanol is a promising alternative energy source for reducing both consumption of crude oil and environmental pollution from renewable resources like lignocellulosic biomass such as wood, forest residuals, agricultural leftovers and urban wastes. Based on current technologies, the cost of ethanol production from lignocellulosic materials is relatively high, and the main challenges are the low yield and high cost of the hydrolysis process. Development of more efficient pretreatment technology (physical, chemical, physico-chemical, and biological pretreatment), integration of several microbiological conversions into fewer reactors, and increasing ethanol production capacity may decrease specific investment for ethanol producing plants. The purpose of pretreatment of lignocellulosic material is to improve the accessible surface area of cellulose for hydrolytic enzymes and enhance the conversion of cellulose to glucose and finally high yield ethanol production which is economic and environmental friendly.

The effect of plamsa treatment on superconformal copper gap-fill

  • 문학기;김선일;박영록;이내응
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.249-249
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    • 2010
  • The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

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반응표면분석법을 이용한 갈조류, 미역의 전처리 인자 영향 파악 및 젖산 생산성 검토 (Validation of Factors Effect on Pretreatment of Brown Algae, Undaria, Using Response Surface Methodology and Prospect of Lactic Acid Production)

  • 민창하;이두근;엄병환;윤정준
    • Korean Chemical Engineering Research
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    • 제56권4호
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    • pp.453-460
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    • 2018
  • 원유 가격의 상승과 지구온난화로 인하여 재생 가능한 바이오매스를 이용하여 산업적으로 중요한 화합물을 생산하는 연구가 주목받고 있다. 특히, 3세대 바이오매스인 해조류는 비식량 자원, 높은 생산 수율, 온실가스 저감 등 장점을 가지고 있기에 연구 되어야 할 필요가 있다. 본 연구에서는 고체분석 방법을 이용하여 4종의 해조류 중에 미역이 가장 많은 당류를 함유하는 것을 확인하였다. 미역의 효과적인 전처리를 위해 반응표면분석법을 이용하였으며 이를 통해 고체의 부하 및 촉매의 농도 증가가 총 당의 추출률과 관계 있음을 확인하였다. 4종의 락토바실러스 균주에서 미역의 전처리물을 이용하여 젖산 생산 수행하였으며 L. alimentarius와 L. brevis가 해조류 이용한 젖산생산에 적합한 균주임을 확인하였다.

배할 및 인사이징 전처리가 횡단면 크기 150 mm 이하 삼나무와 낙엽송 수심재의 고온건조특성에 미치는 영향 (Effect of Kerfing and Incising Pretreatments on High-Temperature Drying Characteristics of Cedar and Larch Boxed-Heart Timbers with Less than 150 mm in Cross Section Size)

  • LEE, Chang-Jin
    • Journal of the Korean Wood Science and Technology
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    • 제48권3호
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    • pp.345-363
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    • 2020
  • 본 연구는 배할 및 인사이징 전처리가 횡단면 크기 150 mm 이하 삼나무와 낙엽송 수심재의 고온건조 특성에 미치는 영향을 확인하기 위해 수행되었다. 그 결과, 전처리는 표면할렬과 수축률에 대하여 유의한 차이를 나타내었다. 배할처리는 표면할렬 발생을 줄이기 위한 전처리로서 적합하였으나, 인사이징은 재면의 자상이 서로 연결됨으로써 표면할렬로 전환되는 현상을 야기하기 때문에 전처리로서 적합하지 않았다. 수축률은 전처리 조건에 따라 건조 후 최종함수율이 인사이징, 배할, 배할-인사이징 순으로 감소되는 경향을 나타냄으로써 유의한 결과를 나타내었다. 뒤틀림은 미성숙재의 수축이방성보다 목리각도가 더 크게 영향을 주었으며, 전처리의 영향은 없었다.

유치와 영구치 상아질의 전처리 시간에 따른 표면 미세구조 변화와 글라스 아이오너머 수복재의 결합력에 관한 연구 (A STUDY ON THE EFFECT OF DENTIN WITH VARIOUS PRETREATMENT APPLICATION TIME ON THE DENTIN SURFACE STRUCTURE AND THE BOND STRENGTH OF GLASS IONOMER RESTORATIVE MATERIALS)

  • 이창근;김용기;김종수
    • 대한소아치과학회지
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    • 제25권4호
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    • pp.749-760
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    • 1998
  • The main purpose of this study was to evaluate the effect of dentin with various pretreatment application time on the dentin surface structure and the bond strength of glass ionomer restorative matrials between primary and permanent tooth. There are difference of composition, structure and pretreated effect of dentin conditioning between the primary and permanent teeth. Inspite of thease fact, we used the same application time of permanent tooth. This study intends to determine the most effective application time using SEM analysis of the surface change by dentin conditioning. Forty five intact primary and permanent teeth were splited mesiodistally with seperating diamond disk. Each eight specimens were prepared for shear bond strength test. (randomely devided eight group as follows:) group I conditioning for five seconds group II conditioning for ten seconds group III conditioning for fifteen seconds group IV conditioning for twenty seconds Additional specimens were prepared to SEM analysis. The result are as follows: 1. Primary teeth are higher shear bond strength in group I and group II. 2. There was no statistically significant difference between primary and permanent teeth in group III and group IV. 3. In SEM analysis, smear layer removal by dentin pretreatment of primary teeth was faster than permanent teeth. Primary teeth may require shorter pretreatment time of dentin for G-I restoration than that of permanent teeth.

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