• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.862-867
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• 1997

A 5-axis NC milling technology is presented on ruled surface. Problems in 5-axis NC machining are such as tool interference,tool collision and change of tool attitude,etc. The change of tool attitude causes rotation of cutter and variation of feedrate to overcut part surface. This poor control of tool attitude is the primary problem in multi-axis NC milling. This paper observes ruled surface for control of tool attitude. Ruled surface is composed of directrix and ruling, line of constant magnitude. Directrix corresponds to points on part surface and Ruling cutting tool. Trajectory of tool movement corresponds to ruled surface.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.946-949
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• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• 한국표면공학회지
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• 제38권6호
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• pp.212-215
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• 2005

Novel continuous electroforming process equipped with a rotating patterned mandrel, soluble/insoluble anode and multiple stage of rolling wheels was proposed to produce precision nickel mesh, which is known as a very efficient electromagnetic interference (EMI) shielding material. Continuously electroformed nickel deposits showed a tendency to form small-sized particles as the plating solution temperature increased and mandrel rotation speeded up and the applied current density decreased. Along the honeycomb patterns of mandrel, nickel was accurately electrodeposited on the surface of rotating mandrel, but quite different visual/structural characteristics were measured on both sides.

• KSTLE International Journal
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• 제2권2호
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• pp.133-137
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• 2001

This paper investigates the correlation between strip surface roughness and the surface of the work roll. As the actual temper mill(TM) is used, this data will be adopted to another actual temper mill for the application and operation of this experiment. Conclusions are as follows: Electro-discharge texturing(EDT) roll has homogeneous roughness distribution and shape, and also a sinuous peak surface and the life is 2 times longer than that of shot blast texturing(SBT) method. And the higher surface roughness of work roll, the more time is necessary at the EDT method. In the SBT method without the correlation of roughness, but impeller rotation speed with an uncontrollable peak count. The roughness of SBT roll is irregularity compared to that of EDT roll because the work roll roughness is transferred to the strip which was temper rolled, and produces a more desirable image and greater clarity to the color painted steel sheet.

• 한국표면공학회지
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• 제53권3호
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• pp.124-129
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• 2020

This study is for the development of high temperature ALD SiO₂ film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N₂and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

• 한국표면공학회지
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• 제27권1호
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• pp.45-53
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• 1994

A kinetic study on the electrodeposition of zinc-iron alloys onto a steel in chloride solutions has been car-ried out using a rotating disc geometry. The results show that the deposition rate was increased with electropotential, disc rotation speed and temperature, and consequently the rate was partly controlled by elec-trochemical reaction and partly by mass transport. The iron content of deposit was more increased with cell voltage than with disc rotating speed and temperature. During electrodeposition process, the addition of metal-lic zinc powder retards oxidation rate of $Fe^{2+}$.

• 한국공작기계학회논문집
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• 제16권1호
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• pp.80-85
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• 2007

High speed cutting is a machining process which cuts materials with the fast movement and rotation of a spindle in a machine tool. High speed cutting leaves a plastically deformed layer on the machined surface. This deformed layer affects in various forms to the surface roughness of machined parts such as the dimensional instability, the micro crack. The surface roughness is called surface integrity which is very important in precision cutting. This paper aims to study on the machined surfaces characteristics of aluminum alloy and brass by AFM(Atomic force microscope) measurement. The objective is contribution to ultra- precision cutting by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.

• Bulletin of the Korean Chemical Society
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• 제21권11호
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• pp.1095-1100
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• 2000

we have proposed a three-dimensional GLE approach to gas-surface reactive scattering, model H + H $${\rightarrow}$H_2/Si(100)-(2$ ${\times}$1) system, and the implementation of 3D GLE method on the hydrogen on silicon surface has been presented. The formalism and algori thm of the 3D GLE are worked properly in the reactive scattering system. The calculated normal mode frequencies of surface vibrations were almost identical to previous harmonic slab calculations. The reaction probabilities were calculated for two energies. The calculations show that a very large amount of energy is transferred in surface in low energy scattering. Three different types of reaction mechanisms has been observed, which can not be shown in flat and rigid surface models. Further work on the reaction mechanisms and calculations of the vibrational and rotation distributions of products is in progress. The results will be reported elsewhere soon.

• Design & Manufacturing
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• 제17권2호
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• pp.33-41
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• 2023

Metal raw materials and chemical additives, which are raw materials for secondary batteries, are pulverized by the high-speed rotation of the Grinding Disc of the Classifier Separator Mill (CSM). Grinding discs are required to withstand abrasion, corrosion, high-speed rotational force and impact. In order to analyze the stability of domestic and foreign grinding discs, quality tests including surface roughness, surface lubrication, surface state measurement, and surface 3D shape measurement were analyzed. When producing developed products, it shows that excellent products can be produced.