Browse > Article

Characteristic of Mirror Surface ELID Grinding of Large Scale Diametrical Silicon Wafer with Rotary Type Grinding Machine  

박창수 (경남대학교 대학원 기계공학과)
김원일 (경남대학교 기계자동화공학부)
왕덕현 (경남대학교 기계자동화공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.11, no.5, 2002 , pp. 58-64 More about this Journal
Abstract
Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.
Keywords
Large Scale Diametrical Silicon Wafer; ELID(Electrolytic In-Process Dressing); Mirror Like Surface; Surface Integrity; Micro-structure;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Characterristics of Grinding Force and Surface Roughness by CBN and WA Wheel /
[ M.K.Ha;J.S.Kwak;J.Y.Yang;Y.D. Jung;S.B. Sim;I.I.Ryoo ] / Transactions of the Korean Society of Machine Tool Engineers   과학기술학회마을
2 鑄鐵ボンドダイヤモンドによるシリコンの硏削加工 /
[ 大森整 ] / 昭和63年度精密工學會 春季講演論文集
3 Finishing Characteristic of ELID-lap grinding Using Ultra Fine Grain Lapping Wheel /
[ N.Itoh;H.Ohmori ] / International Journal of JSPE
4 Electrolytic In-Process Dressing(ELID) Grinding for Optical Parts Manufacturing. Int; Progress In Ultra-precision Engineering /
[ H. Ohmori ] / Proceedings of IPES 7th
5 Electrolytic In-Process Dressing(ELID) Grinding Technique for Ultra-precision Mirror Surface Machining /
[ H. Ohmori ] / International Journal of JSPE
6 A Study on the Analysis of Grinding Mechanism and Development of Dressing System by using Optimum In Process electrolytic Dressing /
[ E.S.Lee;J.D.KIM ] / Int. J. Mach. Tools Manufacture.   DOI   ScienceOn
7 Wear Characteristic of General and Superhard Abrasive Grain against Various Hard Materials /
[ Matsuo. T;Okamura ] / Annuals of the CIRP   DOI   ScienceOn