• 센서학회지
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• 제16권2호
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• pp.91-96
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• 2007

The characteristic of tellurium thin films was studied for detecting nitrogen dioxide gas at room temperature. The film was deposited on $Al_{2}O_{3}$ substrate by using thermal evaporator. The subsequent process was heat treatment by several conditions. (temperature, flowed gases) Surface and grain boundary was investigated using SEM. The results showed that resistance of the tellurium film decreases reversibly in the presence of nitrogen dioxide. The sensitivity of this device depends on the gas concentration and detect lower concentrations less than 10 ppm.

• 전기학회논문지
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• 제60권5호
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• pp.993-998
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• 2011

In this paper we suggest new criteria for the classification of the electrode gap between common and scan electrodes. The electrode gap is categorized as a short, middle, and long gap according to the criteria. Among these structures, we focus on the erase waveform of a mid-gap structure. we report an unstable discharge arising from the erase ramp period in a mid-gap structure. Based on the Vt close curve, we analyze the unstable discharge at various conditions. Our analysis reveals that the unstable discharge is ignited between surface electrodes and caused by un-erased wall charges accumulated on the outer edges of electrodes. By reducing the voltage level of the last sustain pulse, the problem is solved.

• 로봇학회논문지
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• 제8권3호
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• pp.206-216
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• 2013

We investigate the role of contact location information on the perception of local features during contour following in a virtual environment. An absolute identification experiment is conducted under force-alone and force-plus-contact-location conditions to investigate the effect of the contact location information. The results show that the participants identify the local features significantly better in terms of higher information transfer for the force-plus-contact-location condition, while no significant difference was found for measures of the efficacy of contour following between the two conditions. Further data analyses indicate that the improved identification of local features with contact location information is due to the improved identification of small surface features.

• Journal of Information Display
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• 제9권4호
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• pp.6-10
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• 2008

In this study, the selective-wettability-inscription (SWI) technique for the wet-etchingless fabrication of surface microstructures applicable to wide-viewing liquid crystal displays (LCDs) on plastic substrates was demonstrated. On the basis of the selective wetting of the photopolymer, the bi-level microstructures were spontaneously formed to serve as spacers for maintaining uniform cell gap and protrusions for the generation of multi-domains. The LC cell that has bi-level microstructures shows good extinction in the field-off state and a wide-viewing property in the field-on state. The SWI technique would be useful for the fabrication of flexible displays on plastic substrates.

• 반도체디스플레이기술학회지
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• 제4권1호
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• pp.49-53
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• 2005

The nanoparticle deposition chamber, which is used for quantum dot semiconductor memory applications, is designed by means of numerical simulation. In this research, the numerical simulations for deposition chamber were performed by commercial software, FLUENT. The deposition of nanoparticles is calculated by diffusion force, thermophoresis and electrophoresis of particles. As a results, when the diffusion force was considered, the most of particles deposited in the wall of deposition chamber. But as considering thermophoresis and electrophoresis of particles, the particles were deposited wafer surface, perfectly.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.138-144
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• 2006

Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

• 반도체디스플레이기술학회지
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• 제5권2호
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• pp.37-39
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• 2006

We employed in-situ spectroscopic ellipsometry(SE) and imaging ellipsometry(IE) to study the interaction of water and photoresist(PR) in 193 immersion lithography. Real time measurement of SE showed thickness increase when PR was immerged in water indicating swelling effect. From the temporal evolution we could observe its reaction-limited behavior. Meanwhile, IE could identify the modification of PR surface by contact of water even for a short period of a second.

• 반도체디스플레이기술학회지
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• 제12권1호
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• pp.61-65
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• 2013

We investigated the wearable dynamics of diamond spherical abrasive during the substrate surface polishing under the pad compression via classical molecular dynamics modeling. We performed three-dimensional molecular dynamics simulations using the Morse potential functions for the copper substrate and the Tersoff potential function for the diamond abrasive. The pad hardness had a big impact on the wearable dynamics of the abrasive. The moving speed of the abrasive decreased with increasing hardness of the pad. As the hardness decreased, the abrasive was indented into the pad and then the sliding motion of the abrasive was increased. So the pad hardness was greatly influenced on the slide-to-roll ratio as well as the wearable rate.

• Current Optics and Photonics
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• 제2권1호
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• pp.69-78
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• 2018

This paper presents a precise edge detection algorithm for the critical dimension (CD) measurement of a Thin-Film Transistor Liquid-Crystal Display (TFT-LCD) pattern. The sigmoid surface function is proposed to model the blurred step edge. This model can simultaneously find the position and geometry of the edge precisely. The nonlinear least squares fitting method (Levenberg-Marquardt method) is used to model the image intensity distribution into the proposed sigmoid blurred edge model. The suggested algorithm is verified by comparing the CD measurement repeatability from high-magnified blurry and noisy TFT-LCD images with those from the previous Laplacian of Gaussian (LoG) based sub-pixel edge detection algorithm and error function fitting method. The proposed fitting-based edge detection algorithm produces more precise results than the previous method. The suggested algorithm can be applied to in-line precision CD measurement for high-resolution display devices.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
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• pp.125-129
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• 1996

This paper presents the haptic rendering algorithm which gives the feel information to the operator by manipulating a virtual tool with a haptic device in the simulated environment. The movement of a virtual tool grasped by the operator, which is modeled as a square is displayed in the graphic screen of a computer and the virtual environment is modeled as deformable thin film. When the tool contacts with the virtual environment, the operator is forced to feel the contact and the feature of the deformed virtual environment through the torque control of th haptic device. Contact situations are modeled as close as to the reality considering friction, elasticity and multiple contacts. Several experiments are conducted and the effectiveness of the proposed algorithm is confirmed.