Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on the Air Cushion Pad of Non-contact Glass Transportation Unit

비접촉식 유리 평판 이송 장치 공기 패드 형상에 대한 연구

  • 전현주 ((주)AVACO 연구소) ;
  • 김광선 (한국기술교육대학교 메카트로닉스 공학부) ;
  • 임익태 (익산대학 자동차학과)
  • Published : 2006.10.12
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Abstract

Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

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