Electrical Characteristics of Ni/Ti/Al Ohmic Contacts to Al-implanted p-type 4H-SiC (Al 이온 주입된 p-type 4H-SiC에 형성된 Ni/Ti/Al Ohmic Contact의 전기적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.21 no.11
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- pp.968-972
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- 2008