Electrical Characteristics of Ni/Ti/Al Ohmic Contacts to Al-implanted p-type 4H-SiC |
Joo, Sung-Jae
(한국전기연구원 재료응용연구단 고집적전원연구그룹)
Song, Jae-Yeol (동의대학교 전자공학과) Kang, In-Ho (한국전기연구원 재료응용연구단 고집적전원연구그룹) Bahng, Wook (한국전기연구원 재료응용연구단 고집적전원연구그룹) Kim, Sang-Cheol (한국전기연구원 재료응용연구단 고집적전원연구그룹) Kim, Nam-Kyun (한국전기연구원 재료응용연구단 고집적전원연구그룹) |
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