• Title/Summary/Keyword: substrate thickness

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Effect of Substrate Thickness, Perforation Position and Size on the Bandwidth and Radiation Characteristics of a Proximity Coupled Perforated Microstrip Patch Antenna (기판 두께와 천공의 위치 및 크기가 근접 결합 급전을 이용한 천공된 마이크로스트립 패치 안테나의 대역폭과 방사특성에 미치는 영향)

  • Lee, Kyu-Hoon;Kwak, Eun-Hyuk;Kim, Boo-Gyoun
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.39A no.6
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    • pp.310-321
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    • 2014
  • Effect of substrate thickness, perforation position and size on the bandwidth and radiation characteristics of a proximity coupled perforated microstrip patch antenna (PCPPA) with $2{\times}2$ square perforations inside a patch is investigated. As the thicknesses of antenna substrate and feed substrate increase, the bandwidth of a PCPPA increases without the degradation of radiation characteristics. As the position of a perforation moves toward the edge of a patch along the length direction, the bandwidth of a PCPPA increases without the degradation of radiation characteristics, while the effect of changing the position of a perforation along the width direction on the bandwidth and radiation characteristics of a PCPPA is negligible. As the perforation size is decreased, the bandwidth of a PCPPA is increased and the radiation characteristics of a PCPPA are enhanced.

The Preparation and Magnetic Properties in Ba-ferrite Film on the A12O3 Substrate (A12O3을 하지층으로 하는 Ba-ferrite 박막의 제조 및 자기적 특성에 관한 연구)

  • Sur, Jung-Chul;Park, Chul-Jin;Choi, Jung-Wan
    • Journal of the Korean Magnetics Society
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    • v.15 no.2
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    • pp.125-129
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    • 2005
  • Ba-Ferrite thin films were prepared on $A1_2O_3$ substrate by a pulsed laser deposition system and characterized by SEM, $M\ddot{o}$ssbauer spectroscopy and VSM. The appropriate conditions of pulsation in Ba-ferrite was the oxygen pressure of 0.1 Torr at a substrate temperature of $400^{\circ}C$ and the thickness was variable with the deposition time. Ba-ferrite crystals had the forms of hexagonal plate in the 5 minute deposited film and the needle grains coexisted with the increasing film thickness. $M\ddot{o}ssbauer$ spectroscopy assured that the direction of atomic spin in Fe ion tends to normal to the substrate in the hexagonal plate. The VSM curves have the two types hysteresis of hexagonal and needle phase.

Na Doping Properties of Cu(In,Ga)Se2 Absorber Layer Using NaF Interlayer on Mo Substrate (Mo 기판위의 NaF 중간층을 이용한 Cu(In,Ga)Se2 광흡수층의 Na 도핑특성에 관한 연구)

  • Park, Tae-Jung;Shin, Dong-Hyeop;Ahn, Byung-Tae;Yun, Jae-Ho
    • Korean Journal of Materials Research
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    • v.19 no.8
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    • pp.452-456
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    • 2009
  • In high-efficiency Cu(In,Ga)$Se_2$ solar cells, Na is doped into a Cu(In,Ga)$Se_2$ light-absorbing layer from sodalime-glass substrate through Mo back-contact layer, resulting in an increase of device performance. However, this supply of sodium is limited when the process temperature is too low or when a substrate does not supply Na. This limitation can be overcome by supplying Na through external doping. For Na doping, an NaF interlayer was deposited on Mo/glass substrate. A Cu(In,Ga)$Se_2$ absorber layer was deposited on the NaF interlayer by a three-stage co-evaporation process As the thickness of NaF interlayer increased, smaller grain sizes were obtained. The resistivity of the NaF-doped CIGS film was of the order of $10^3{\Omega}{\cdot}cm$ indicating that doping was not very effective. However, highest conversion efficiency of 14.2% was obtained when the NaF thickness was 25 nm, suggesting that Na doping using an NaF interlayer is one of the possible methods for external doping.

Brazing Adhesion Properties of Ag Coated W-Ag Electric Contact on the Cu Substrate (Ag 코팅한 W-Ag 전기접점/Cu 모재간의 브레이징 접합 특성)

  • Kang Hyun-Goo;Kang Yun-Sung;Lee Jai-Sung
    • Journal of Powder Materials
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    • v.13 no.1 s.54
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    • pp.18-24
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    • 2006
  • The brazing adhesion properties of Ag coated W-Ag electric contact on the Cu substrate have been investigated in therms of microstructure, phase equilibrium and adhesion strength. Precoating of Ag layer ($3{\mu}m$ in thickness) on the $W-40\%Ag$ contact material was done by electro-plating method. Subsequently the brazing treatment was conducted by inserting BCuP-5 filler metal (Ag-Cu-P alloy) layer between Ag coated W-Ag and Cu substrate and annealing at $710^{\circ}C$ in $H_2$ atmosphere. The optimum brazing temperature of $710^{\circ}C$ was semi-empirically calculated on the basis of the Cu atomic diffusion profile in Ag layer of commercial electric contact produced by the same brazing process. As a mechanical test of the electric contact after brazing treatment the adhesion strength between the electric contact and Cu substrate was measured using Instron. The microstructure and phase equilibrium study revealed that the sound interlayer structure was formed by relatively low brazing treatment at $710^{\circ}C$. Thin Ag electro-plated layer precoated on the electric contact ($3{\mu}m$ in thickness) is thought to be enough for high adhesion strength arid sound microstructure in interface layer.

Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays (플렉서블 디스플레이용 저온공정을 갖는 대향 타겟식 스퍼터링 장치를 이용한 ZrO2 가스 차단막의 특성)

  • Kim, Ji-Hwan;Cho, Do-Hyun;Sohn, Sun-Young;Kim, Hwa-Min;Kim, Jong-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.5
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    • pp.425-430
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    • 2009
  • $ZrO_2$ film was deposited by facing target sputtering (FTS) system on polyethylene naphthalate (PEN) substrate as a gas barrier layer for flexible organic light emitting devices (FOLEDs), In order to control the heat of the FTS system caused by the ion bombardment in the cathode compared with the conventional sputtering system, the process characteristics of the FTS apparatus are investigated under various sputtering conditions such as the distance between two targets ($d_{TT}$), the distance between the target and the substrate ($d_{TS}$), and the deposition time. The $ZrO_2$ film by the FTS system can reduce the damage on the films because the ion bombardment with high-energy particles like gamma-electrons, Moreover, the $ZrO_2$ film with optimized condition ($d_{TT}$=140 mm) as a function of the distance from center to edge showed a very uniform thickness below 5 % for a deposition time of 3 hours, which can improve the interface property between the anode and the plastics substrate for flexible displays, It is concluded that the $ZrO_2$ film prepared by the FTS system can be applied as a gas barrier layer or an interlayer between the anode and the plastic substrate with good properties of an uniform thickness and a low deposition-temperature.

The Properties of GaN Grown by BVPE Method on the Si(111) Substrate with Pre-deposited Al Layer (Al 박막이 증착 된 Si(111) 기판 위에 HVPE 방법으로 성장한 GaN의 특성)

  • Shin Dae Hyun;Baek Shin Young;Lee Chang Min;Yi Sam Nyung;Kang Nam Lyong;Park Seoung Hwan
    • Journal of the Korean Vacuum Society
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    • v.14 no.4
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    • pp.201-206
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    • 2005
  • In this work, we tried to improve the fabrication process in HVPE (Hydride Vapor Phase Epitaxy) system by using Si(111) substrate with pre-deposited Al layer. PL measurements was done for samples with and without pre-deposited Al on Si and it was also examined the dependence of the optical characteristic properties on AlN buffer thickness for GaN/AIN/Al/Si. A sample with thin Al nucleation layer on Si substrate reveals a better optical property than the other. And it suggests that the thickness for AlN buffer layer with thin Al nucleation layer on Si(111) substrate is most proper about $260{\AA}$ to grow GaN in HVPE system. The surface morphology of GaN clearly shows the hexagonal crystallization. The XRD pattern showed strong peak at GaN{0001} direction.

Nano-thick Nickel Silicide and Polycrystalline Silicon on Polyimide Substrate with Extremely Low Temperature Catalytic CVD (폴리이미드 기판에 극저온 Catalytic-CVD로 제조된 니켈실리사이드와 실리콘 나노박막)

  • Song, Ohsung;Choi, Yongyoon;Han, Jungjo;Kim, Gunil
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.321-328
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    • 2011
  • The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

Thickness and Orientation Effect on the YBCO Thin Films For Microwave Device Applications (마이크로파 소자응용을 위한 YBCO 박막의 두께 및 증착온도에 관한 특성연구)

  • 이상렬;전희석;허창회;한경보;전창훈
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.6
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    • pp.539-542
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    • 2002
  • The effect of the superconducting film thickness on the surface resistance has been investigated. Superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition. The dependence of the orientation of YBCO film on thickness has been investigated by X-ray diffraction technique. X-ray diffraction indicated that the film orientation was changed by increasing the film thickness and by changing the substrate temperature. The microwave properties of the films with mixed orientations of a-axis and c-axis will be reported for the applications of microwave devices.

The Effects of Film Thickness on the Dipolar Relaxation of $PbTiO_3$ Thin Films in the Microwave-Frequency Range (마이크로파 대역에서 $PbTiO_3$ 박막의 Dipolar Relaxation에 대한 박막 두께의 효과)

  • 이도영;김용조
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.142-142
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    • 2003
  • The effects of film thickness on the dipolar relaxation of ferroelectric PbTiO$_3$ films were investigated in the microwave-frequency range. The dielectric constants ($\varepsilon$) and the dielectric losses (tan $\delta$) were successfully measured up to 30 ㎓ using interdigital capacitors. The PbTiO$_3$ thin films were deposited on the quartz substrate at room temperature and postannealed in oxygen atmosphere. As the film thickness increased, its grain size and tetragonality were enhanced. And the dipolar relaxation behavior began to appear in the thin films with approximately 20 nm thickness, since ferroelectric domains could not be formed hi small grains. The observed relaxation frequency (above 10 ㎓) was higher than the previous values reported in bulk ceramics. It can be correlated with the extremely small domain size of the thinfilms as shown by TEM. And, the Rayleigh constant [1] from domain wall motions was alsoinvestigated by LCR meter at 100 KHz.

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Effects of Implanted $BF_2$ on the Formation of Ti-Silicides (Si 기판에 주입된 $BF_2$ 불순물이 Ti silieides 형성에 미치는 영향)

  • 최석훈;최진석;백수현
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.12
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    • pp.1852-1858
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    • 1990
  • The sheet resistance and thickness of Ti-Silicides treated RTA at 600, 700, 800\ulcorner was measured with amount of BF2 implanted in Si substrate. And the profile of BF2 was studied by SIMS. The formation of TiSi2 starts at 700\ulcorner. The Ti-Silicides almost consist of TiSi2 and have a low resistivity about 16列 cm at 800\ulcorner. The sheet resistances of Ti-silicides increase and thicknesses of it decrease with increasing dose of BF2. Considering the results of SIMS and the thickness of native oxide, the decrease of thickness of Silicides chiefly results from the increase of native oxide thickness with increasing dopants.

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